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IEEE photonics journal

Superconducting Nanowire Single-Photon Detector With a System Detection Efficiency Over 80% at 940-nm Wavelength

W. J. Zhang, Hao Li, Lixing You, Jia Huang, Y. H. He, Lingsun Zhang, Xiaoyi Liu, Shijian Chen, Z. Wang, Xiaohui Xie

Published Mar 16, 2016• 12 citations
Publisher

Abstract

Implementations of quantum information require single-photon detectors (SPDs) with high detection efficiency (DE) at a wavelength of 940 nm, which is a challenge for the available semiconducting SPDs. Superconducting nanowire SPDs (SNSPDs) are capable of detecting visible and near-infrared single photons with high DE. However, these detection capabilities place stringent design requirements on the cavity and nanowire geometry structures. We design, fabricate, and measure SNSPDs with high DE optimized for the 940-nm wavelength. The NbN SNSPDs were fabricated on 1-D photonic crystals for high optical absorptance. By tuning the filling factor of the nanowire through numerical simulations and experiments, we were able to obtain an SNSPD (7 nm thick, 125 nm width, and 0.57 filling factor, as well as active area of$18\ast 18\ \mu\text{m}$) with a saturated system DE of 83.6$\pm$3.7%, at a dark count rate of 10 Hz, and a low polarization dependence of 1.17$\pm$0.02. To our best knowledge, this is the highest value reported for NbN SNSPDs at 940-nm wavelength. The availability of an SNSPD with high system DE at 940 nm may have a profound impact in the field of photonic quantum technologies, such as multiphoton entanglement.

DOI
10.1109/jphot.2016.2542838

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•Jan 1, 2019•0 citations
Implementations of quantum information require single-photon detectors (SPDs) with high detection efficiency (DE) at a wavelength of 940 nm, which is a challenge for the available semiconducting SPDs. Superconducting nanowire SPDs (SNSPDs) are capable of detecting visible and near-infrared single photons with high DE. However, these detection capabilities place stringent design requirements on the cavity and nanowire geometry structures. We design, fabricate, and measure SNSPDs with high DE optimized for the 940-nm wavelength. The NbN SNSPDs were fabricated on 1-D photonic crystals for high optical absorptance. By tuning the filling factor of the nanowire through numerical simulations and experiments, we were able to obtain an SNSPD (7 nm thick, 125 nm width, and 0.57 filling factor, as well as active area of18∗18 μm18\ast 18\ \mu\text{m}18∗18 μm) with a saturated system DE of 83.6±\pm±3.7%, at a dark count rate of 10 Hz, and a low polarization dependence of 1.17±\pm±0.02. To our best knowledge, this is the highest value reported for NbN SNSPDs at 940-nm wavelength. The availability of an SNSPD with high system DE at 940 nm may have a profound impact in the field of photonic quantum technologies, such as multiphoton entanglement.
Satellite-ground quantum communication requires single-photon detectors of 850-nm wavelength with both high detection efficiency and large sensitive area. We developed superconducting nanowire single-photon detectors (SNSPDs) on one-dimensional photonic crystals, which acted as optical cavities to enhance the optical absorption, with a sensitive-area diameter of 50 μm. The fabricated multimode fiber coupled NbN SNSPDs exhibited a maximum system detection efficiency (DE) of up to 82% and a DE of 78% at a dark count rate of 100 Hz at 850-nm wavelength as well as a system jitter of 105 ps.
We develop single-photon detectors comprising single-mode fiber-coupled superconducting nanowires, with high system detection efficiencies at a wavelength of 940 nm. The detector comprises a 6.5-nm-thick, 110-nm-wide NbN nanowire meander fabricated onto a Si substrate with a distributed Bragg reflector for enhancing the optical absorptance. We demonstrate that, via the design of a low filling factor (1/3) and active area (Φ = 10 μm), the system reaches a detection efficiency of ∼60% with a dark count rate of 10 Hz, a recovery time <12 ns, and a timing jitter of ∼50 ps.
Superconducting nanowire single photon detectors with an optical resonant cavity structure are fabricated directly on the single crystal substrate. In order to enhance the photons absorption of incident light and improve system detection efficiency (SDE) efficiently, the structure of SNSPD was designed and optimized using the finite-difference time-domain analysis for different kinds of substrates. The NbN-SNSPDs fabricated on different substrates are measured and compared. The SDE of NbN-SNSPD on MgO substrate reaches 66 % at the wavelength of 940nm at a dark count rate of 100 cps by illuminating from the back of the device through single mode optical fiber.
Abstract The detection efficiency (DE) of superconducting nanowire single-photon detectors (SNSPDs) at 1550 nm has been significantly improved in the past decades as a result of evolution of the optical structure, the materials, and the fabrication process. We discuss the general optical design for a high-efficiency SNSPD based on dielectric optical films that can detect wavelengths from visible to near infrared regions. This structure shows close-to-unity absorption and good insensitivity to the fine wavelength and the incident angle. We demonstrate an SNSPD specifically fabricated for the detection of 1064 nm wavelength with a maximal system DE of 87.4% ± 3.7%. The DEs of the SNSPDs for visible and near infrared wavelengths are also summarized and compared with those of semiconducting detectors.
Abstract Superconducting nanowire single-photon detectors (SNSPDs) are widely used for the detection of visible and near-infrared single photons. Due to the nature of the polarization sensitive absorption of the nanowire, the detection efficiency (DE) of the meander SNSPD is polarization sensitive. In order to obtain a polarization-insensitive device with high DE, we fabricated NbN SNSPDs with spiral structure, which were embedded into an optical cavity. No meaningful current crowding effect was observed in the spiral SNSPDs. The spiral SNSPD showed a maximal system detection efficiency of 52.5% at 1550 nm with a dark count rate of 100 Hz and a polarization extinction ratio of 1.04, due to the combination of a spiral geometry and an optical cavity.
Single photon detection advanced rapidly in the last decade. The superconducting nanowire single-photon detector (SNSPD) is an emerging technology, which offers low dark count rates, broadband sensitivity from visible to mid-infrared wavelengths and very high quantum efficiency. All these features are appealing for future emerging applications in remote gas sensing, quantum key distribution and quantum information processing. By enclosing the detector in an optical cavity, tuned to the operating wavelength, the total system detection of the SNSPD is improved. Based on the cavity design, the detector absorption is boosted at the desired experimental wavelength. Devices have been fabricated and tested, in this thesis, with enhanced detection efficiency at near-infrared, infrared and mid-infrared wavelengths. NbTiN detectors fabricated on Ta2O5 / SiO2 distributed Bragg reflectors (DBR) for front-side coupling exhibit a system detection efficiency of ≈ 90% at λ = 940 nm for the best device measured. SNSPDs were also fabricated in NbTiN on metallic mirrors for back-side coupling for 1550 and 2333 nm experimental wavelengths. The first design exhibited a system detection efficiency of ≈ 84.5%, at λ = 1550 nm for the best device measured. The second exhibited low system detection efficiency since the device suffered from unexpectedly high dark count rate mainly due to blackbody radiation at 2.2 K. However, it was possible to measure the timing jitter of this device at 350 mK indicating a FWHM of 84 ps. Another technique to improve the total system detection efficiency of the SNSPD, is by fabricating a hairpin-shaped nanowire atop a single mode waveguide. In this design, photons travel through the waveguide and via evanescent coupling are absorbed in the nanowire. These SNSPD devices have been designed to thread along single mode Si ridge waveguides using a hairpin-shaped nanowire structure, which offers enhanced coupling and absorption efficiency via evanescent coupling. These ultra-thin superconducting MoSi detectors are precisely patterned on top of a single mode Si waveguide (600 nm) with alignment error less than 40 nm. Low temperature electrical and nano-optical characterization was carried out using a two-stage pulse tube (PT) coldhead, using an additional 4He / 3He sorption pump, low vibration characterization of SNSPD devices at 350 mK was carried out. Characterised devices exhibit low dark count rate <5 counts per second and timing jitter of ≈ 83 ps full width half maximum (FWHM) at wavelength (λ) = 1550 nm and at critical current ≈ 30 µA.