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Superconductor Science and Technology

Superconducting nanowire single-photon detector on dielectric optical films for visible and near infrared wavelengths

Lixing You, Hao Li, Weijun Zhang, Xiaoyan Yang, Lu Zhang, Sijing Chen, Hui Zhou, Zhen Wang, Xiaoming Xie

Published May 22, 2017• 24 citations
Publisher

Abstract

Abstract The detection efficiency (DE) of superconducting nanowire single-photon detectors (SNSPDs) at 1550 nm has been significantly improved in the past decades as a result of evolution of the optical structure, the materials, and the fabrication process. We discuss the general optical design for a high-efficiency SNSPD based on dielectric optical films that can detect wavelengths from visible to near infrared regions. This structure shows close-to-unity absorption and good insensitivity to the fine wavelength and the incident angle. We demonstrate an SNSPD specifically fabricated for the detection of 1064 nm wavelength with a maximal system DE of 87.4% ± 3.7%. The DEs of the SNSPDs for visible and near infrared wavelengths are also summarized and compared with those of semiconducting detectors.

DOI
10.1088/1361-6668/aa7495

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Optics Express•Feb 8, 2019•19 citations
Abstract The detection efficiency (DE) of superconducting nanowire single-photon detectors (SNSPDs) at 1550 nm has been significantly improved in the past decades as a result of evolution of the optical structure, the materials, and the fabrication process. We discuss the general optical design for a high-efficiency SNSPD based on dielectric optical films that can detect wavelengths from visible to near infrared regions. This structure shows close-to-unity absorption and good insensitivity to the fine wavelength and the incident angle. We demonstrate an SNSPD specifically fabricated for the detection of 1064 nm wavelength with a maximal system DE of 87.4% ± 3.7%. The DEs of the SNSPDs for visible and near infrared wavelengths are also summarized and compared with those of semiconducting detectors.
Superconducting nanowire single-photon detectors(SSPDs or SNSPDs) can detect single photons in a wide spectrum range from ultraviolet to mid-infrared wavelengths. We developed SSPDs for the light wavelength of 900-1100 nm, where it is difficult to achieve high detection efficiency by either Si or InGaAs avalanche photodiodes. We designed and fabricated the SSPD with non-periodic dielectric multilayers (DMLs) composed of SiO2 and TiO2 to enhance the optical absorptance in the wavelength range of 900-1100 nm. We measured the detection efficiency (DE) in the wavelength range of 800-1360 nm using a supercontinuum light source and found that the wavelength dependence of DE was in good agreement with the simulated spectrum of the optical absorptance of the nanowire device on the designed DML. The highest system DE was 81.0% for the wavelength of 980 nm.
Implementations of quantum information require single-photon detectors (SPDs) with high detection efficiency (DE) at a wavelength of 940 nm, which is a challenge for the available semiconducting SPDs. Superconducting nanowire SPDs (SNSPDs) are capable of detecting visible and near-infrared single photons with high DE. However, these detection capabilities place stringent design requirements on the cavity and nanowire geometry structures. We design, fabricate, and measure SNSPDs with high DE optimized for the 940-nm wavelength. The NbN SNSPDs were fabricated on 1-D photonic crystals for high optical absorptance. By tuning the filling factor of the nanowire through numerical simulations and experiments, we were able to obtain an SNSPD (7 nm thick, 125 nm width, and 0.57 filling factor, as well as active area of18∗18 μm18\ast 18\ \mu\text{m}18∗18 μm) with a saturated system DE of 83.6$\pm3.73.7%, at a dark count rate of 10 Hz, and a low polarization dependence of 1.173.7\pm$0.02. To our best knowledge, this is the highest value reported for NbN SNSPDs at 940-nm wavelength. The availability of an SNSPD with high system DE at 940 nm may have a profound impact in the field of photonic quantum technologies, such as multiphoton entanglement.
Abstract Superconducting nanowire single-photon detectors (SNSPDs) are widely used for the detection of visible and near-infrared single photons. Due to the nature of the polarization sensitive absorption of the nanowire, the detection efficiency (DE) of the meander SNSPD is polarization sensitive. In order to obtain a polarization-insensitive device with high DE, we fabricated NbN SNSPDs with spiral structure, which were embedded into an optical cavity. No meaningful current crowding effect was observed in the spiral SNSPDs. The spiral SNSPD showed a maximal system detection efficiency of 52.5% at 1550 nm with a dark count rate of 100 Hz and a polarization extinction ratio of 1.04, due to the combination of a spiral geometry and an optical cavity.
Superconducting nanowire single-photon detector (SNSPD) with near-unity system efficiency is a key enabling, but still elusive, technology for numerous quantum fundamental theory verifications and quantum information applications. The key challenge is to have both a near-unity photon-response probability and absorption efficiency simultaneously for the meandered nanowire with a finite filling ratio, which is more crucial for NbN than other superconducting materials (e.g., WSi) with lower transition temperatures. Here, we overcome the above challenge and produce NbN SNSPDs with a record system efficiency by replacing a single-layer nanowire with twin-layer nanowires on a dielectric mirror. The detector at 0.8 K shows a maximal system detection efficiency (SDE) of 98% at 1590 nm and a system efficiency of over 95% in the wavelength range of 1530-1630 nm. Moreover, the detector at 2.1 K demonstrates a maximal SDE of 95% at 1550 nm using a compacted two-stage cryocooler. This type of detector also shows the robustness against various parameters, such as the geometrical size of the nanowire and the spectral bandwidth, enabling a high yield of 73% (36%) with an SDE of >80% (90%) at 2.1 K for 45 detectors fabricated in the same run. These SNSPDs made of twin-layer nanowires are of important practical significance for batch production.
Superconducting nanowire single photon detectors with an optical resonant cavity structure are fabricated directly on the single crystal substrate. In order to enhance the photons absorption of incident light and improve system detection efficiency (SDE) efficiently, the structure of SNSPD was designed and optimized using the finite-difference time-domain analysis for different kinds of substrates. The NbN-SNSPDs fabricated on different substrates are measured and compared. The SDE of NbN-SNSPD on MgO substrate reaches 66 % at the wavelength of 940nm at a dark count rate of 100 cps by illuminating from the back of the device through single mode optical fiber.
In this work, we report multispectral superconducting nanowire single photon detectors (SNSPDs) that can simultaneously detect single photons at multiple wavelengths with high efficiency. The superconducting nanowires are fabricated on an all-dielectric mirror consisting of two quarter-wave stack reflectors with separated central wavelengths. The unique optical structure results in serially coupled optical cavities, leading to multiple resonant absorption bands that are utilized for high-efficiency single photon detection. The fabricated detector shows system detection efficiencies of >80% at the three target wavelengths of 1550 nm, 1310 nm, and 1064 nm. The multispectral detector may eliminate the need for multiple SNSPDs for different wavelengths in a system, potentially resulting in a reduction in size, weight, and power, as well as in the cost of the overall detection system. The detector may also find interesting use for applications such as multispectral ranging or imaging.