Superconducting nanowire single photon detectors with an optical resonant cavity structure are fabricated directly on the single crystal substrate. In order to enhance the photons absorption of incident light and improve system detection efficiency (SDE) efficiently, the structure of SNSPD was designed and optimized using the finite-difference time-domain analysis for different kinds of substrates. The NbN-SNSPDs fabricated on different substrates are measured and compared. The SDE of NbN-SNSPD on MgO substrate reaches 66 % at the wavelength of 940nm at a dark count rate of 100 cps by illuminating from the back of the device through single mode optical fiber.
Superconducting nanowire single photon detectors with an optical resonant cavity structure are fabricated directly on the single crystal substrate. In order to enhance the photons absorption of incident light and improve system detection efficiency (SDE) efficiently, the structure of SNSPD was designed and optimized using the finite-difference time-domain analysis for different kinds of substrates. The NbN-SNSPDs fabricated on different substrates are measured and compared. The SDE of NbN-SNSPD on MgO substrate reaches 66 % at the wavelength of 940nm at a dark count rate of 100 cps by illuminating from the back of the device through single mode optical fiber.
We have developed a practical superconducting nanowire single photon detector (SNSPD) system with our superconducting thin films and devices fabrication, optical coupling packaging, and cryogenic technology. The SNSPD devices were fabricated from high-quality niobium nitride (NbN) ultra-thin films that were epitaxially grown on single-crystal MgO substrates, and optical cavity structure were applied for improvement of photo absorption efficiency. The SNSPD system was developed based on a compact Gifford-McMahon (GM) cryocooler, in which SNSPD can operate continuously at temperature of 2.9 K +/- 10 mK with low power consumption without any liquid cryogens. The system detection efficiencies at 1550 nm wavelength (at a 100 Hz dark count rate) were found to be 2.6% for device without optical cavity and 21% for device with optical cavity. The response speed of devices showed maximally 200 MHz with 5 × 5 mm square device, and timing jitter of 100 ps full width at a half maximum (FWHM) was observed.
We develop single-photon detectors comprising single-mode fiber-coupled superconducting nanowires, with high system detection efficiencies at a wavelength of 940 nm. The detector comprises a 6.5-nm-thick, 110-nm-wide NbN nanowire meander fabricated onto a Si substrate with a distributed Bragg reflector for enhancing the optical absorptance. We demonstrate that, via the design of a low filling factor (1/3) and active area (Φ = 10 μm), the system reaches a detection efficiency of ∼60% with a dark count rate of 10 Hz, a recovery time <12 ns, and a timing jitter of ∼50 ps.
Implementations of quantum information require single-photon detectors (SPDs) with high detection efficiency (DE) at a wavelength of 940 nm, which is a challenge for the available semiconducting SPDs. Superconducting nanowire SPDs (SNSPDs) are capable of detecting visible and near-infrared single photons with high DE. However, these detection capabilities place stringent design requirements on the cavity and nanowire geometry structures. We design, fabricate, and measure SNSPDs with high DE optimized for the 940-nm wavelength. The NbN SNSPDs were fabricated on 1-D photonic crystals for high optical absorptance. By tuning the filling factor of the nanowire through numerical simulations and experiments, we were able to obtain an SNSPD (7 nm thick, 125 nm width, and 0.57 filling factor, as well as active area of18∗18μm) with a saturated system DE of 83.6$\pm3.7\pm$0.02. To our best knowledge, this is the highest value reported for NbN SNSPDs at 940-nm wavelength. The availability of an SNSPD with high system DE at 940 nm may have a profound impact in the field of photonic quantum technologies, such as multiphoton entanglement.
Abstract The performance of superconducting nanowire single-photon detectors (SNSPDs) relies on substrate materials. Magnesium fluoride (MgF 2 ) exhibits outstanding optical properties, such as large optical transmission range and low refractive index ( n = 1.38), making it an attractive substrate. We present the fabrication and the performance of SNSPDs made of a 4.5 nm thick NbN thin film deposited on MgF 2 substrate for the wavelength of 1550 nm. The front-side illuminated SNSPDs without an optical cavity showed a maximal detection efficiency of 12.8% at a system dark count rate (DCR) of 100 Hz, while the backside illuminated SNSPDs with a SiO 2 /Au optical cavity atop displayed a maximal detection efficiency of 33% at a DCR of 100 Hz.
Ever since superconducting nanowire single-photon detectors (SNSPDs or SSPDs) were demonstrated, they have attracted a considerable attention due to the detectors’ promising performance that includes high detection efficiency (DE), low dark count rate (DCR), broadband sensitivity, and low timing jitter. The system detection efficiency (SDE) has been improved to be over 90% with a wavelength of 1550 nm in a fiber-coupled system by embedding the SNSPD in optical cavities. However, the implementation of optical cavity usually reduces the bandwidth of SNSPDs. As a result, there are some recent works on increasing the bandwidth of SNSPD. Furthermore, the size of the active area of meandered nanowires has to be compatible with the core size of an optical fiber such that good optical coupling can be achieved; this setup requires a long nanowire with a large kinetic inductance, thus resulting in a small counting rate and a large timing jitter, particularly for multi-mode fiber-coupled devices. Nevertheless, a particularly impressive waveguide-coupled SNSPD has been developed in recent years. By placing an SNSPD atop an optical waveguide that has been fabricated on various substrate materials, photons propagating in the waveguide have been found to be evanescently absorbed by nanowires that are only a few tens of microns long. The on-chip DE of this device has been estimated to be over 90%, thus indicating that it has both high absorptance and high intrinsic DE. If the waveguide and the nanowire are correctly dimensioned, the absorptance of this device can reach over 90% for a wavelength range of more than 700 nm. Furthermore, the length of the nanowire is shorter than that of the fiber-coupled SNSPD, thus leading to a higher count rate and lower timing jitter (~18 ps). However, unsatisfactory coupling losses between the optical fiber and the waveguide in such devices can decrease its SDE (~10%), thus limiting its applicability to quantum photonic integrated circuits (QPIC). Recently, we proposed a type of SNSPD that was coupled with microfibers (MFs), and simulations for this SNSPD indicated that its absorption would be as high as 90%. Microfibers and nanofibers, tapered adiabatically from standard fibers, with diameters close to or smaller than the wavelength of the guided light were demonstrated to have low transmittance losses by Tong et al. in 2003. MFs have been shown to have many interesting properties, such as strong evanescent fields, tight optical confinement, wideband abilities, and small masses; these properties are appealing for applications such as optical sensing and coupling. MFs also provide seamless connections with high transmittance from standard fibers; therefore, MF-coupled SNSPDs can achieve both high SDEs and wideband compatibility. We proposed and demonstrated the MF-coupled SNSPDs successfully. The simulation results indicate that with optimal device structure, the optical absorption with efficiency < 90% can be realized over a wavelength range of 350 nm to 2150 nm. The fabricated MF-coupled SNSPD, shows unparalleled broadband system detection efficiencies (SDEs) of more than 50% from 630 nm to 1500 nm. The SDEs reach 66% at 785 nm and 45% at 1550 nm. These results pave the way for ultra-broadband weak light detection with quantum-limit sensitivity.
We demonstrate superconducting nanowire single photon detector (SNSPD) for the wavelength at around 2 μm. The linewidth of the NbN nanowire is squeezed to 56 nm to increase the intrinsic response efficiencies at longer wavelengths such as 2 μm. Serially connecting avalanche architecture is applied to increase the signal-to-noise ratio (SNR) of the response signal. Further, the optical cavity is optimized to improve the absorption of the device. A silica single-mode fiber is adopted to introduce photons to the SNSPD at a temperature of 2.25 K using a Gifford-McMahon cryocooler. The SNSPD exhibits detection efficiencies of 58%, 67%, and 63% at wavelengths of 1550, 1700, and 2000 nm, respectively, with dark count rate of ~12 kcps, which is reduced to 2 cps when the attached fiber pigtail is all placed inside the 40-K cryostat. The detection efficiency at 2000 nm is 2.5 times greater than that of the best previously developed detector with an efficiency of 25%. Our SNSPD is promising for practical applications in molecular science and earth meteorology.