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arXiv:1506.07921 · AIP Advances

Superconducting nanowire single-photon detectors at a wavelength of 940 nm

W. J. Zhang, Hao Li, Lixing You, Y. H. He, Lingsun Zhang, X.Y. Liu, Xuezhi Yang, Junjie Wu, Qi Guo, Shijian Chen, Z. Wang, Xiaohui Xie

Published Jun 1, 2015• 7 citations
arXivHTMLPDF

Abstract

We develop single-photon detectors comprising single-mode fiber-coupled superconducting nanowires, with high system detection efficiencies at a wavelength of 940 nm. The detector comprises a 6.5-nm-thick, 110-nm-wide NbN nanowire meander fabricated onto a Si substrate with a distributed Bragg reflector for enhancing the optical absorptance. We demonstrate that, via the design of a low filling factor (1/3) and active area (Φ = 10 μm), the system reaches a detection efficiency of ∼60% with a dark count rate of 10 Hz, a recovery time <12 ns, and a timing jitter of ∼50 ps.

DOI
10.1063/1.4922548

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We develop single-photon detectors comprising single-mode fiber-coupled superconducting nanowires, with high system detection efficiencies at a wavelength of 940 nm. The detector comprises a 6.5-nm-thick, 110-nm-wide NbN nanowire meander fabricated onto a Si substrate with a distributed Bragg reflector for enhancing the optical absorptance. We demonstrate that, via the design of a low filling factor (1/3) and active area (Φ = 10 μm), the system reaches a detection efficiency of ∼60% with a dark count rate of 10 Hz, a recovery time <12 ns, and a timing jitter of ∼50 ps.
We report the development of the multimode fiber-coupled superconducting nanowire single-photon detector with high system detection efficiency at visible wavelength. The detector consists of a 10.5-nm-thick and 150-nm-wide NbN nanowire meander fabricated on a Si substrate with a multilayer dielectric mirror and a quarter wavelength cavity for obtaining high optical absorptance. The meander area was 35 µm in diameter and coupled with the GRIN-lensed multimode optical fiber with a core diameter of 50 µm. The system reached detection efficiency of 70% with dark count rate of 100 Hz at the wavelength of 635 nm, 3 dB roll-off response counting rate of 8.5 Mcps, and timing jitter of 76 ps.
Satellite-ground quantum communication requires single-photon detectors of 850-nm wavelength with both high detection efficiency and large sensitive area. We developed superconducting nanowire single-photon detectors (SNSPDs) on one-dimensional photonic crystals, which acted as optical cavities to enhance the optical absorption, with a sensitive-area diameter of 50 μm. The fabricated multimode fiber coupled NbN SNSPDs exhibited a maximum system detection efficiency (DE) of up to 82% and a DE of 78% at a dark count rate of 100 Hz at 850-nm wavelength as well as a system jitter of 105 ps.
We present high performance fiber-coupled niobium titanium nitride superconducting nanowire single photon detectors fabricated on thermally oxidized silicon substrates. By applying a double sided cavity structure, simulated absorptance in the nanowire meander reached 97% at 1550 nm wavelength. The fabricated device showed a system detection efficiency (DE) of 74% at 1550 nm, dark count rate of 100 c/s, and a full width at half maximum timing jitter of 68 ps under a bias current of 18.0 μA with a practical Gifford-McMahon cryocooler system.
Niobium nitride superconducting nanowire single-photon detectors were fabricated on thermally oxidized silicon substrates with large active areas of 30 μm× 30 μm.To achieve non-constricted detectors,we improved the film growth and electron beam lithography process to fabricate uniform 100-nm wide Nb N nanowires with a fill factor of 50%.The devices showed 72.4% system detection efficiency(SDE) at 100-Hz dark count rate(DCR) and 74-ps timing jitter,measured at the fiber communication wavelength of 1550 nm.The highest SDE which is 81.2% when the DCR is ～ 700 c/s appears at the wavelength of 1650 nm.
Implementations of quantum information require single-photon detectors (SPDs) with high detection efficiency (DE) at a wavelength of 940 nm, which is a challenge for the available semiconducting SPDs. Superconducting nanowire SPDs (SNSPDs) are capable of detecting visible and near-infrared single photons with high DE. However, these detection capabilities place stringent design requirements on the cavity and nanowire geometry structures. We design, fabricate, and measure SNSPDs with high DE optimized for the 940-nm wavelength. The NbN SNSPDs were fabricated on 1-D photonic crystals for high optical absorptance. By tuning the filling factor of the nanowire through numerical simulations and experiments, we were able to obtain an SNSPD (7 nm thick, 125 nm width, and 0.57 filling factor, as well as active area of18∗18 μm18\ast 18\ \mu\text{m}18∗18 μm) with a saturated system DE of 83.6$\pm3.73.7%, at a dark count rate of 10 Hz, and a low polarization dependence of 1.173.7\pm$0.02. To our best knowledge, this is the highest value reported for NbN SNSPDs at 940-nm wavelength. The availability of an SNSPD with high system DE at 940 nm may have a profound impact in the field of photonic quantum technologies, such as multiphoton entanglement.
Superconducting nanowire single photon detectors with an optical resonant cavity structure are fabricated directly on the single crystal substrate. In order to enhance the photons absorption of incident light and improve system detection efficiency (SDE) efficiently, the structure of SNSPD was designed and optimized using the finite-difference time-domain analysis for different kinds of substrates. The NbN-SNSPDs fabricated on different substrates are measured and compared. The SDE of NbN-SNSPD on MgO substrate reaches 66 % at the wavelength of 940nm at a dark count rate of 100 cps by illuminating from the back of the device through single mode optical fiber.