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IEEE Transactions on Applied Superconductivity

Rapid Single-Flux-Quantum Circuits Fabricated Using $\hbox{20}\hbox{-}\hbox{kA}/\hbox{cm}^{2}$ $\hbox{Nb}/\hbox{AlO}_{x}/\hbox{Nb}$ Process

Masamitsu Tanaka, Misaki Kozaka, Yuma Kita, Akira Fujimaki, Shuichi Nagasawa, Mutsuo Hidaka

Published Oct 27, 2014• 11 citations
Publisher

Abstract

We designed and fabricated rapid single-flux-quantum (RSFQ) circuits using a new 20-kA/cm2process based on conventional Nb/AlOx/Nb Josephson junction (JJ) technology. Circular JJs were fabricated to improve their uniformity. They had sufficiently low spread of the critical currents for large-scale RSFQ circuits. We selected the circuit design parameters carefully, including the bias voltage and McCumber-Stewart parameter, balancing the energy consumption, switching speeds, margins, and integration density. We demonstrated several logic gates and shift registers at a clock frequency of 154 GHz with the designed bias voltage of 2.5 mV, and demonstrated energy-efficient shift registers using the low-voltage RSFQ (LV-RSFQ) technique at 83 GHz.

DOI
10.1109/tasc.2014.2365100

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Rapid Single-Flux-Quantum Circuits Fabricated Using 20-kA/cm2\hbox{20}\hbox{-}\hbox{kA}/\hbox{cm}^{2}20-kA/cm2 Nb/AlOx/Nb\hbox{Nb}/\hbox{AlO}_{x}/\hbox{Nb}Nb/AlOx​/Nb Process
We designed and fabricated rapid single-flux-quantum (RSFQ) circuits using a new 20-kA/cm2process based on conventional Nb/AlOx/Nb Josephson junction (JJ) technology. Circular JJs were fabricated to improve their uniformity. They had sufficiently low spread of the critical currents for large-scale RSFQ circuits. We selected the circuit design parameters carefully, including the bias voltage and McCumber-Stewart parameter, balancing the energy consumption, switching speeds, margins, and integration density. We demonstrated several logic gates and shift registers at a clock frequency of 154 GHz with the designed bias voltage of 2.5 mV, and demonstrated energy-efficient shift registers using the low-voltage RSFQ (LV-RSFQ) technique at 83 GHz.
We report successful operations of low-energy consumption rapid single-flux-quantum (RSFQ) circuits applying lowered driving voltages, called LV-RSFQ, using different fabrication processes. In the LV-RSFQ, we feed bias currents to Josephson junctions from lowered constant voltages (less than 1 mV) through small resistors without extra inductors. Both static and dynamic energy consumption are reduced because of suppression of amplitudes of SFQ pulses, in exchange for slower switching speed. We show that the switching speed in LV-RSFQ circuits is improved by increasing critical current density of Josephson junctions. We demonstrated high-speed operations of LV-RSFQ shift registers in a range of 5-40 GHz and 15-90 GHz using the 2.5-kA/cm2and 10-kA/cm2fabrication technologies, respectively. Comparison of the experimental results of the LV-RSFQ circuits fabricated using two different technologies derives the optimum bias voltage in terms of energy-delay product ranged from 0.1 to 1.0ICRS, whereICRSis the product of Josephson critical current and shunt resistance.
We demonstrate rapid single-flux-quantum (RSFQ) circuits with reduced energy consumption by lowering the driving voltages and critical currents of Josephson junctions (JJs). At lowered voltages, the energy statically consumed by bias resistors (which is dominant in RSFQ circuits) is reduced. In addition, we show that when RSFQ circuits are driven by lowered constant voltages, the dynamic energy consumption resulting from the switching of JJs is reduced because of the suppression of the amplitudes of the signal voltage pulses, even though the switching speed becomes slower. Utilization of miniaturized JJs with smaller critical currents also leads to the reduction of static and dynamic energy consumption without decreasing the switching speed. We have designed and tested ultra-low-energy 8-bit shift registers, and verified the correctness of high-speed operations up to 18 GHz. The average energy consumption, including that at the bias resistors, was measured at 4.0 aJ/bit, which represents an energy efficiency two orders of magnitude better than that of standard RSFQ circuits.
We report low-power single-flux-quantum (SFQ) circuits fabricated with a lowered critical current density process and low-voltage design. We selected 250 A/cm2^{2}2to obtain 2–10 μA Josephson junctions (JJs) easily using conventional facilities. Our numerical simulation shows that the expected operating frequency is 10 GHz and that we can reduce the bias voltage to 0.1–0.5 mV; power consumption can be reduced to around 1 nW per JJ. We newly developed a fabrication process featuring four planarized Nb layers and a Pd resistor layer. We obtained the correct operation of several basic SFQ circuit elements designed with the lowered critical currents to 1/2 of the conventional circuits at 4.2 K. We also evaluated the Josephson junction critical currents, specific capacitance, resistance, and inductance at 3 K and 300 mK. We observed an increase of 7% in the critical currents at 300 mK, while the other parameters were unchanged. We demonstrated a 0.5-mV Josephson transmission line where we lowered the critical currents to 1/10. We expect such low-power SFQ circuits to operate at 20 mK, providing classical, general-purpose digital processing near quantum bits.
We report the successful operation of a low-power arithmetic logic unit (ALU) based on a low-voltage rapid single-flux-quantum (LV-RSFQ) logic circuit, whereby a dc bias current is fed to circuits from lowered constant-voltage sources through small resistors. Both the static and dynamic energy consumptions are reduced because of the reduction in the amplitudes of voltage pulses across the Josephson junctions, with a trade-off of slightly slower switching speeds. The designed bias voltage was set to 0.25mV, which is one-tenth that of our standard RSFQ circuit design. We investigated several issues related to such low-voltage operation, including margins and timing design. To achieve successful operation, we tuned the circuit parameters in the logic gate design and carefully controlled the timing by considering the interference of pulse signals. We show test results for the low-voltage ALU in on-chip high-speed testing. The circuit was fabricated using the AIST Nb/AlOx/Nb Advanced Process with a critical current density of 10kA/cm2. We verified that arithmetic and logical operations were correctly implemented and obtained dc bias margins of 18% at a target clock frequency of 20GHz and achieved a maximum clock frequency of 28GHz with a power consumption of 28µW. These experimental results indicate energy efficiency of 3.6 times that of the standard RSFQ circuit design.
Abstract Superconductor logic families can operate with small power dissipation and are thus suitable as building blocks for various computing systems. In some applications, superconductor logic circuits should be designed using Josephson junctions with low I c values ( I c : critical current). For instance, lowering I c values enables qubit interface circuits to operate with very small power dissipation at ~10 mK and stochastic electronics to easily induce stochastic operations. In this study, we develop the AIST 1 kA cm −2 Nb planarized process (1KP) with a minimum critical current of 10 µA, dedicated to the design of qubit interface circuits and stochastic electronics. We also develop rapid single-flux-quantum (RSFQ) and adiabatic quantum-flux-parametron (AQFP) cell libraries using the 1KP. The power dissipation of RSFQ logic using the 1KP can be reduced to 3.2% of that for conventional RSFQ logic by reducing both I c values and a bias voltage. Furthermore, the amount of supply currents for AQFP circuits using the 1KP can be reduced to ~40% of that for conventional AQFP circuits due to a large mutual inductance between AQFP gates and excitation lines, which results from a reduction in I c and an increase in inductances. We demonstrate RSFQ and AQFP circuits fabricated by the 1KP at 4.2 K. These results indicate that RSFQ and AQFP circuits using the 1KP have the potential to be used for the design of qubit interface circuits and stochastic electronics.
20 kA/cm2{\hbox{kA/cm}}^{2}kA/cm2 Process Development for Superconducting Integrated Circuits With 80 GHz Clock Frequency
Results of the development of an advanced fabrication process for superconductor integrated circuits (ICs) with 20 kA/cm2Nb/AlOx/Nb Josephson junctions is presented. The process has 4 niobium superconducting layers, one MoNxresistor layer with 4.0 Ohm per square sheet resistance for the junction shunting and circuit biasing, and employs circular Josephson junctions with the minimum diameter of 1 mum; total 11 photolithography levels. The goal of this process development is the demonstration of the feasibility of 80 GHz clock speeds in superconducting ICs for digital signal processing (DSP) and high performance computing. Basic components of rapid single flux quantum (RSFQ) logic such as DC/SFQ, SFQ/DC converters, Josephson transmission lines (JTLs), and simple digital circuits such as T-flip-flops and 4-bit digital counters have been fabricated and tested. The T-flip-flops were shown to operate up to 400 GHz with the widest margin of operation of plusmn13% at 325 GHz. Digital testing results on the 4-bit counters as well as the junctions, resistors, and other process parameters are also presented. Prospects for yet higher speeds and very large scale integration are discussed.