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IEEE Transactions on Applied Superconductivity

Superconducting Films for Absorber-Coupled MKID Detectors for Sub-Millimeter and Far-Infrared Astronomy

Thomas R. Stevenson, J. S. Adams, Wen-Ting Hsieh, S. H. Moseley, Douglas E. Travers, Kongpop U-yen, Edward J. Wollack, Jonas Stasys Zmuidzinas

Published Jun 1, 2009• 6 citations
Publisher

Abstract

We describe measurements of the properties, at dc, gigahertz, and terahertz frequencies, of thin (10 nm) aluminum films with 10 Omega/square normal state sheet resistance. Such films can be applied to construct microwave kinetic inductance detector arrays for submillimeter and far-infrared astronomical applications in which incident power excites quasiparticles directly in a superconducting resonator that is configured to present a matched-impedance to the high frequency radiation being detected. For films 10 nm thick, we report normal state sheet resistance, resistance-temperature curves for the superconducting transition, quality factor and kinetic inductance fraction for microwave resonators made from patterned films, and terahertz measurements of sheet impedance measured with a Fourier Transform Spectrometer. We compare properties with similar resonators made from niobium 600 nm thick.

DOI
10.1109/tasc.2009.2019661

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IEEE Transactions on Applied Superconductivity•Feb 19, 2016•16 citations
We describe measurements of the properties, at dc, gigahertz, and terahertz frequencies, of thin (10 nm) aluminum films with 10 Omega/square normal state sheet resistance. Such films can be applied to construct microwave kinetic inductance detector arrays for submillimeter and far-infrared astronomical applications in which incident power excites quasiparticles directly in a superconducting resonator that is configured to present a matched-impedance to the high frequency radiation being detected. For films 10 nm thick, we report normal state sheet resistance, resistance-temperature curves for the superconducting transition, quality factor and kinetic inductance fraction for microwave resonators made from patterned films, and terahertz measurements of sheet impedance measured with a Fourier Transform Spectrometer. We compare properties with similar resonators made from niobium 600 nm thick.
Superconducting microwave resonators have the potential to revolutionize submillimeter and far-infrared astronomy, and with it our understanding of the universe. The field of low-temperature detector technology has reached a point where extremely sensitive devices like transition-edge sensors are now capable of detecting radiation limited by the background noise of the universe. However, the size of these detector arrays are limited to only a few thousand pixels. This is because of the cost and complexity of fabricating large-scale arrays of these detectors that can reach up to 10 lithographic levels on chip, and the complicated SQUID-based multiplexing circuitry and wiring for readout of each detector. In order to make substantial progress, next- generation ground-based telescopes such as CCAT or future space telescopes require focal planes with large-scale detector arrays of 104–106 pixels. Arrays using microwave kinetic inductance detectors (MKID) are a potential solution. These arrays can be easily made with a single layer of superconducting metal film deposited on a silicon substrate and pattered using conventional optical lithography. Furthermore, MKIDs are inherently multiplexable in the frequency domain, allowing ∼ 103 detectors to be read out using a single coaxial transmission line and cryogenic amplifier, drastically reducing cost and complexity. An MKID uses the change in the microwave surface impedance of a superconducting thin-film microresonator to detect photons. Absorption of photons in the superconductor breaks Cooper pairs into quasiparticles, changing the complex surface impedance, which results in a perturbation of resonator frequency and quality factor. For excitation and readout, the resonator is weakly coupled to a transmission line. The complex amplitude of a microwave probe signal tuned on-resonance and transmitted on the feedline past the resonator is perturbed as photons are absorbed in the superconductor. The perturbation can be detected using a cryogenic amplifier and subsequent homodyne mixing at room temperature. In an array of MKIDs, all the resonators are coupled to a shared feedline and are tuned to slightly different frequencies. They can be read out simultaneously using a comb of frequencies generated and measured using digital techniques. This thesis documents an effort to demonstrate the basic operation of ∼ 256 pixel arrays of lumped-element MKIDs made from superconducting TiNx on silicon. The resonators are designed and simulated for optimum operation. Various properties of the resonators and arrays are measured and compared to theoretical expectations. A particularly exciting observation is the extremely high quality factors (∼ 3 × 107) of our TiNx resonators which is essential for ultra-high sensitivity. The arrays are tightly packed both in space and in frequency which is desirable for larger full-size arrays. However, this can cause a serious problem in terms of microwave crosstalk between neighboring pixels. We show that by properly designing the resonator geometry, crosstalk can be eliminated; this is supported by our measurement results. We also tackle the problem of excess frequency noise in MKIDs. Intrinsic noise in the form of an excess resonance frequency jitter exists in planar superconducting resonators that are made on dielectric substrates. We conclusively show that this noise is due to fluctuations of the resonator capacitance. In turn, the capacitance fluctuations are thought to be driven by two-level system (TLS) fluctuators in a thin layer on the surface of the device. With a modified resonator design we demonstrate with measurements that this noise can be substantially reduced. An optimized version of this resonator was designed for the multiwavelength submillimeter kinetic inductance camera (MUSIC) instrument for the Caltech Submillimeter Observatory.
Microwave kinetic inductance detectors (MKID) are superconducting broadband direct detectors. If a superconducting thin film patterned into a resonator is illuminated with photons, Cooper pairs break up and the kinetic inductance of the film changes. This shifts the resonance frequency downwards and the dissipation of the resonator increases, which can be detected in the phase and amplitude of a transmitted signal. \n \nIn this thesis, a waveguide coupled MKID is designed and simulated. 350 GHz radiation is coupled into a copper waveguide via a horn antenna. A waveguide probe leads the signal onto a 9 µm silicon membrane where it is absorbed in a 40 nm superconducting aluminum film which is the inductive part of a superconducting resonator. The capacitor of the resonator is made of niobium. Two versions of the device are developed, a transmission line resonator and a lumped element resonator design. The new design will enable an accurate understanding of the optical sensitivity of MKIDs and allow comparison of different resonator materials. Since two different resonator types are used, the direct comparison of transmission line and lumped resonators will also be possible. \n \nA measurement setup is developed including an ADR cryostat to cool MKID devices down to below 40 mK. An analog readout system using either a vector network analyzer or an IQ mixer is designed and built. The necessary software to control the ADR, the temperature monitoring, the readout signal generation and detection and the signal acquisition of the setup is also developed. \n \nThe waveguide coupled MKID design is fabricated in our in-house microfabrication laboratory and measured in the new setup. In my measurements, the devices do not show a resonance feature. The VNA and DC measurements are analyzed to determine a plausible hypothesis of the failure. The devices are diagnosed for critical issues during fabrication which will be addressed in a future iteration. \n \nTo verify the measurement setup, a test device of the IRAM NIKA 2 MKID camera is measured and the complete analysis pipeline is exercised. The quasi-particle lifetime in the aluminum thin films is measured and a dark and optical noise equivalent power are determined. The results are within the uncertainty comparable to measurements of IRAM themselves. \n \nA test chip designed in my master thesis that contains eight NbTiN resonators is measured in the new setup and non-linear effects under strong readout power are studied. Parametric amplification and oscillation of a resonator are shown qualitatively.
Microwave Kinetic Inductance Detectors (MKIDs) provide highly multiplexed arrays of detectors that can be configured to operate from the sub-millimeter to the X-ray regime. We have examined two tungsten silicide alloys (W5Si3 and WSi2), which are dense alloys that provide a critical temperature tunable with composition, large kinetic inductance fraction, and high normal-state resistivity. We have fabricated quarter wavelength CPW superconducting resonators and provide measurement data on critical temperature, surface resistance, quality factor, noise, and quasiparticle lifetime. Tungsten silicide appears to be very promising for kinetic inductance detectors.
We report on the design and performance of microwave kinetic inductance detectors (MKIDs) sensitive to single photons in the optical to near-infrared range using hafnium as the sensor material. Our test device had a superconducting transition temperature of 395 mK and a room temperature normal state resistivity of 97 μΩ cm with RRR=1.6. Resonators on the device displayed internal quality factors of around 200 000. Similar to the analysis of MKIDs made from other highly resistive superconductors, we find that modeling the temperature response of the detector requires an extra broadening parameter in the superconducting density of states. Finally, we show that this material and design is compatible with a full-array fabrication process, which resulted in pixels with decay times of about 40 μs and resolving powers of ∼9 at 800 nm.
Extremely sensitive far-infrared detectors suitable for both direct detection and heterodyne applications, based on mu m-sized thin films with thickness less than a superconducting penetration depth are possible. The penetration depth of such a film, and therefore its inductance, varies with temperature and with quasiparticle population (described by an effective temperature T*), resulting in both bolometric and nonequilibrium photoinductive responses. Incident radiation is coupled into the small-area kinetic inductor by a lithographic antenna, and the resulting inductance changes are amplified and converted to a voltage signal by an integrated microstrip DC SQUID. The device is sensitive because, unlike junction-based devices with large capacitive reactances, the kinetic inductor is naturally well matched to the antenna impedance at the far-IR frequency ( nu >2 Delta /h) and to the preamplifier (SQUID) impedance at microwave or video frequencies ( nu <<2 Delta /h). The best kinetic inductor materials are those with low electronic mean free path, large penetration depth, and high critical current density. Thus, common magnet alloys such as NbTi are the natural choice for liquid-He temperature operation. A detailed analysis predicts a (phonon-limited) NEP of 4*10/sup -17/ W/ square root Hz for a bolometer with an iridium kinetic inductor operated at 0.1 K. A heterodyne noise temperature of 2250 K (single-sideband) at 3 THz, with a 200-MHz bandwidth, is predicted for a Nb-Ti mixer operated at 4 K.
Due to their multiplexing capability and their good sensitivity to radiation from submillimeter to X-ray wavelengths, microwave kinetic inductance detectors (MKIDs) are increasingly used in the field of astrophysics. The Advanced Technology Center of the National Astronomical Observatory of Japan is developing MKIDs for astronomical observations such as CMB B-mode search with LiteBIRD. MKIDs are made of superconductors whose energy gap determines the detector frequency range. The energy gap depends on Tc, the critical temperature of the superconductor. It is thus important to be able to adjust Tc in order to choose the suitable frequency range. When using a single-layer MKID, the Tc is fixed by the superconducting gap energy of the unique component and cannot be changed. One possibility is to make a bilayer MKID using the proximity effect to adjust its critical temperature. This paper presents our new study on MKIDs made of superconductor/metal bilayers. We investigated niobium and copper bilayers (Nb/Cu) and fabricated different bilayers in our clean room. The critical temperature of each of them has been measured. We show that the Tc depends on the ratio between Nb and Cu thicknesses and that we are able to control it. Then, we characterized one of these Nb/Cu bilayers (Nb = 8 nm and Cu = 22 nm) once integrated in a MKID. We measured the temperature dependence of the resonant frequency, and we achieved quality factors as high as 2 × 104. The measurement of the noise spectrum provided a lower limit equal to -85 dBc/Hz, and the calculation of the noise equivalent power has shown that the sensitivity of the Nb/Cu bilayer MKID is not very far from that of an Al monolayer MKID.