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IEEE Transactions on Applied Superconductivity

New Fabrication Process for Superconducting Quantum Interference Devices With Nb/AlAlOx/Nb Junctions by Using Photosensitive Polyimide Insulation Layers

Jun Kawai, T. Shimozu, Katsuya Kikuchi, M. Kawabata, Hiroshi Nakagawa, Masahiro Aoyagi, Gen Uehara

Published Jun 1, 2005• 1 citation
Publisher

Abstract

We propose a new fabrication process for Superconducting Quantum Interference Devices (SQUIDs) with Nb/Al/AlOx/Nb junctions by using photosensitive polyimide insulation layers. The photosensitive polyimide, which is synthesized by multi-block copolymerization, can be formed into a thin layer with spin-coating, and patterned with conventional photolithography. Compared to forming a SiO/sub 2/ insulation layer with a sputtering and etching process, the fabrication is simplified and the coverage over the edge of the patterns can be improved due to planarization. SQUIDs with a flux transformer having two insulation layers were successfully fabricated with this process and were characterized. The critical current of the flux transformer was more than 20 mA, and a flux noise of less than 1/spl times/10/sup -6/ /spl Phi//sub 0///spl radic/Hz was obtained in the white region. With an axial gradiometer in combination with this SQUID, a field resolution of 1.5 fT//spl radic/Hz was achieved.

DOI
10.1109/tasc.2005.850071

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We propose a new fabrication process for Superconducting Quantum Interference Devices (SQUIDs) with Nb/Al/AlOx/Nb junctions by using photosensitive polyimide insulation layers. The photosensitive polyimide, which is synthesized by multi-block copolymerization, can be formed into a thin layer with spin-coating, and patterned with conventional photolithography. Compared to forming a SiO/sub 2/ insulation layer with a sputtering and etching process, the fabrication is simplified and the coverage over the edge of the patterns can be improved due to planarization. SQUIDs with a flux transformer having two insulation layers were successfully fabricated with this process and were characterized. The critical current of the flux transformer was more than 20 mA, and a flux noise of less than 1/spl times/10/sup -6/ /spl Phi//sub 0///spl radic/Hz was obtained in the white region. With an axial gradiometer in combination with this SQUID, a field resolution of 1.5 fT//spl radic/Hz was achieved.
Photosensitive polyimide insulation layers have been introduced to fabricate superconducting integrated circuits. It is shown to simplify the fabrication process, because the photosensitive polyimide insulation layer can be patterned by conventional photolithography process, resulting in the etching process unnecessary in the present new fabrication process. Three kinds of contact hole (junction top electrode contact, junction base electrode contact, and resistor contact) are simultaneously formed in the photolithography process of the polyimide. A minimum contact hole size is designed to be 1.5 /spl mu/m square for a 3 /spl mu/m /spl times/ 3 /spl mu/m squared junction. Superconducting current density of 2.4/spl times/10/sup 6/ A/cm/sup 2/ of the contact hole was measured. Palladium resistors were successfully made with through hole contacts of the photosensitive polyimide insulation layer. We demonstrated superconducting integrated circuits using this new fabrication process including the minimum 3 /spl mu/m /spl times/ 3 /spl mu/m squared Nb/Al-AlO/sub x//Nb Josephson tunnel junction. The circuit operation is also demonstrated in the fabricated superconducting integrated circuits with the photosensitive polyimide insulation layers.
We have fabricated superconducting quantum interference devices (SQUIDs) with an inductance of 140 pH by using sub- µm Nb/Al–AlO x –Al/Nb edge junctions. The small capacitance of the junction resulted in the very large voltage swing of 210 µV and gradient dV/ dΦ of 940 µV/Φ0. Consequently, the very low flux noise of 0.61 µΦ0/ Hz0.5 corresponding to the energy sensitivity ε of 8.6h at the white noise level was obtained by using a conventional flux-locked loop configuration. The low-frequency noise was also very low, 2.7 µΦ0/ Hz0.5 corresponding to ε= 170 h at 1 Hz. We could obtain very low flux noise for the SQUID which had the practical inductance using only a conventional readout circuit.
We have fabricated multiloop superconducting quantum interference devices (SQUIDs) of 4×4 mm2 total size using sub-µ m Nb/Al-AlO x -Al/Nb edge junctions. We obtained very large voltage swing and gradient ∂V/∂Φ of 0.95-1.53 mV/Φ0, because it was possible to increase the shunt resistance due to the small junction capacitance. This advantage enabled us to achieve very low flux density noise of 1.9 fT/Hz0.5 for white noise by using a readout circuit in which the voltage noise of the amplifier was 1.4 nV/Hz0.5. The low-frequency noise was also very low (7.3 fT/Hz0.5 at 1 Hz). These noise results are half and one-third, respectively, compared with noise before the improvement achieved by this study. We obtained very low flux density noise for the small SQUID using only an inexpensive, compact readout circuit.
We have fabricated dc superconducting quantum interference devices (SQUIDs) incorporating Nb/Al-oxide/Nb Josephson junctions in both stripline and washer geometries. Low-frequency noise in excess of that predicted by the resistively-shunted junction model is present in both geometries and is demonstrated to be flux noise. This flux noise is not environmental. Improvements in fabrication processing over the past four years have reduced the level of this flux noise. SQUIDs are now fabricated with PdAu resistors, Nb wiring layers, and SiO/sub 2/ interlayer dielectric. In our best well-coupled SQUIDs, the white-noise energy sensitivity is 5/spl times/10/sup -31/ J/spl middot/s, with a 1/f knee below 0.1 Hz. We believe further reduction in the flux noise might be obtained with the use of on-chip flux shielding and/or trapping structures.
Fabrication And Characterization Of High-Quality Nb/Al-AlOx_xx​/Nb Cross-Type Josephson Tunnel Junctions Utilising CMP-based Planarisation Techniques
Josephson tunnel junctions (JJs) are the fundamental building blocks of today's most advanced superconducting electronic components, such as qubits and superconducting quantum interference devices (SQUIDs). Given the ongoing demand for scalability of these devices on the wafer-scale, it is crucial to control the fabrication process as precisely as possible to ensure uniform quality and reproducibility. Today, window-type JJs are often used in the production of DC SQUIDs and while they are reliable and reproducible, they suffer from alignment inaccuracies caused by photolithography and unavoidable parasitic capacitances, thus limiting the energy sensitivity of DC SQUIDs. These problems can be circumvented by producing JJs with cross-type geometry, which allows for smaller junction areas and eliminates parasitic capacitances. Here we discuss the fabrication of Nb/Al-AlOx/Nb-based cross-type JJs, where the trilayer is embedded in sputter-deposited SiO2_22​ to allow for planarisation of the structures and to ensure the reliable insulation of the sidewalls of the bottom electrode. Instead of lift-off processes that require a lot of time and potentially leave unwanted wings along the edges of microstructures behind that might compromise subsequent layers, we use chemical-mechanical polishing (CMP) for the removal of excess SiO2_22​. This is not only much faster, but produces smooth and uniform surfaces, which in turn effectively improves the reliability of our JJ production process resulting in a high yield of over 90 %90\,\%90% on wafer-scale. In addition, we discuss the influence of fabrication details on the quality and electrical properties of our JJs with different junction areas down to 1 μm×1 μm1\,\mathrm{μm} \times 1\,\mathrm{μm}1μm×1μm distributed across the wafer and extract the junction specific quality parameters from their IV-characteristics and their Fraunhofer patterns.
We have fabricated dc-superconducting quantum interference devices (SQUIDs) with all-thin-film point contacts (Nb–Nb nanoconstriction-NbN). The size of the nanoconstriction may be smaller than the superconducting coherence length of bulk Nb. The quasiparticle characteristic of the all-thin-film point contact can be explained using the Blonder, Tinkham and Klapwijk (BTK) quasiparticle current which is applicable to the superconducting quantum point contact. The flux noise of SQUID with 10 pH operated in a flux locked loop is 8 µΦ0/ Hz1/2 at 1 Hz, and 4 µΦ0/ Hz1/2 at frequencies above 10 Hz is limited by the preamplifier.