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Japanese Journal of Applied Physics

Fabrication and Evaluation of Superconducting Quantum Interference Devices with Nb/Al–AlOx–Al/Nb Edge Junctions

Naoki Mizutani, Shuichi Yamasaki, Youichi Takada, Akira Adachi, Gen Uehara Kado

Published May 1, 1994• 5 citations
Publisher

Abstract

We have fabricated superconducting quantum interference devices (SQUIDs) with an inductance of 140 pH by using sub- µm Nb/Al–AlO x –Al/Nb edge junctions. The small capacitance of the junction resulted in the very large voltage swing of 210 µV and gradient dV/ dΦ of 940 µV/Φ0. Consequently, the very low flux noise of 0.61 µΦ0/ Hz0.5 corresponding to the energy sensitivity ε of 8.6h at the white noise level was obtained by using a conventional flux-locked loop configuration. The low-frequency noise was also very low, 2.7 µΦ0/ Hz0.5 corresponding to ε= 170 h at 1 Hz. We could obtain very low flux noise for the SQUID which had the practical inductance using only a conventional readout circuit.

DOI
10.1143/jjap.33.l635

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Applied Physics Letters•Oct 2, 1989•45 citations
We have fabricated superconducting quantum interference devices (SQUIDs) with an inductance of 140 pH by using sub- µm Nb/Al–AlO x –Al/Nb edge junctions. The small capacitance of the junction resulted in the very large voltage swing of 210 µV and gradient dV/ dΦ of 940 µV/Φ0. Consequently, the very low flux noise of 0.61 µΦ0/ Hz0.5 corresponding to the energy sensitivity ε of 8.6h at the white noise level was obtained by using a conventional flux-locked loop configuration. The low-frequency noise was also very low, 2.7 µΦ0/ Hz0.5 corresponding to ε= 170 h at 1 Hz. We could obtain very low flux noise for the SQUID which had the practical inductance using only a conventional readout circuit.
We have fabricated multiloop superconducting quantum interference devices (SQUIDs) of 4×4 mm2 total size using sub-µ m Nb/Al-AlO x -Al/Nb edge junctions. We obtained very large voltage swing and gradient ∂V/∂Φ of 0.95-1.53 mV/Φ0, because it was possible to increase the shunt resistance due to the small junction capacitance. This advantage enabled us to achieve very low flux density noise of 1.9 fT/Hz0.5 for white noise by using a readout circuit in which the voltage noise of the amplifier was 1.4 nV/Hz0.5. The low-frequency noise was also very low (7.3 fT/Hz0.5 at 1 Hz). These noise results are half and one-third, respectively, compared with noise before the improvement achieved by this study. We obtained very low flux density noise for the small SQUID using only an inexpensive, compact readout circuit.
Autonomous single-layer dc superconducting quantum interference devices (SQUIDs) have been prepared from epitaxial, laser-deposited YBa2Cu3Ox films on step edge SrTiO3 and LaAlO3 substrates. For device patterning, a SiOx inhibit technique as well as conventional ethylenediaminetetraacetic wet etch was used. The Josephson junctions are of grain boundary type. Their widths are 5 μm. The SQUID hole is a square of about 5 μm; the SQUID inductance is estimated to be about 20 pH. We obtained a very regular, nonhysteretic flux to voltage modulation over more than 100 flux quanta (Φ0). The maximum voltage signal is of the order of 15 μV peak to peak and the maximum transfer function dV/dΦ at the appropriate flux bias is 50 μV/Φ0 at 77 K. The best value of the equivalent flux noise as measured in the flux locked loop mode is 1.4×10−5 Φ0/Hz1/2 at 1 Hz and 1×10−5 Φ0/Hz1/2 in the white noise region for f≳5 Hz. This results in an energy resolution εn,w(f≳5 Hz)=1×10−29 J/Hz in the white noise region and 2×10−29 J/Hz at 1 Hz.
Double relaxation oscillation superconducting quantum interference devices (SQUIDs) (DROSs) based on Nb/AlOx tunnel junctions have been fabricated and characterized. The estimated relaxation frequencies range from 400 MHz up to 14 GHz. Transfer coefficients from flux to voltage of 2 up to 7 mV/φ0 have been obtained. Both the intrinsic flux noise and the performance in a flux-locked loop with direct-voltage readout have been determined. Special attention is paid to the effect of damping resistors on the sensitivity of DROSs. The intrinsic sensitivity improves with increasing relaxation frequency, leveling off to a value of 13h at relaxation frequencies above 2–3 GHz for SQUID inductances of about 30 pH. This sensitivity is very close to the theoretical maximum sensitivity of 6h of a comparable standard type dc SQUID. In a flux-locked loop based on direct-voltage readout, a noise level of 0.55 μφ0/√Hz corresponding to an energy sensitivity of 34h has been obtained for a DROS with a SQUID inductance of 29 pH.
Arrays of dc-superconducting quantum interference devices (dc-SQUIDs) were investigated, in which each dc-SQUID element has a multiturn input coil. The dependence of flux noise on the number of turns of the input coil was studied for current amplifiers. SQUID arrays were fabricated by a Nb/AlO x /Nb Josephson tunnel junction fabrication process. Results show that the flux noise of the SQUID array amplifier does not depend on the turn number of the input coil. A SQUID array amplifier consisting of 128 dc-SQUID elements was fabricated, in which each element had a 7-turn input coil and a mutual inductance between the input coil and the SQUID loop of 460 pH. This amplifier showed an ultrahigh current resolution of 1 pA/Hz0.5 and a maximum input current of 11 µA for signals of 50 kHz, which is sufficient bandwidth for X-ray detection applications. These values correspond to a large dynamic range of 87 dB. The flux-voltage characteristics of this SQUID array, however, showed asymmetric behavior, which originated from electronic resonance in stray capacitance and the mutual inductance between the SQUID loop and the multiturn input coil.
Abstract We report on the development of nearly quantum limited SQUIDs with miniature pickup loop dimensions. The implemented high quality and low capacitance cross-type Nb/AlO x /Nb Josephson junctions offer large I C R N -products and therefore enable an exceptional low noise level of the SQUIDs. Devices with loop dimensions of 1 μ m exhibit white flux noise levels as low as 45 nΦ 0 Hz −1/2 corresponding to an energy resolution ε of about 1 h at 4.2 K, with h being Planck’s constant. Moreover, the large usable voltage swings of the devices of about 300 μ V allow highly sensitive and easy single-stage operation while exploring nearly the intrinsic noise of the SQUIDs, beneficial e.g. for sensor arrays in SQUID microscopy.
We have fabricated and characterized the noise performance of well-coupled Nb-Pb alloy edge junction dc superconducting quantum interference devices (SQUIDs) with a resistively shunted inductance. The extra damping resistor removes the resonances in the current-voltage characteristics resulting in a very low value of the extrinsic energy sensitivity in flux-locked-loop operation. Numerical simulations, with the junction capacitance included, indicate that the damping resistance does not degrade noise performance until it is significantly less than the junction-shunting resistance. We also tested different SQUID designs and demonstrated that a large SQUID inductance, proposed earlier to be desirable when resistively shunted, can seriously affect the low-frequency flux noise.