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Applied Physics Letters

An ultra-low-noise tunnel junction dc SQUID

M. B. Ketchen, Richard F. Voss

Published Nov 15, 1979• 61 citations
Publisher

Abstract

The design, fabrication, and noise properties of an ultra-low-noise tunnel junction dc SQUID (superconducting quantum interference device) are presented. The two resistively shunted Pb-alloy tunnel junctions are each 3.6 μm diam. The SQUID has an inductance L of ≈11 pH, a critical current per junction, I0 of ≈100 μA, and a resistance per shunt R of ≈2 Ω. At 2.3 K, eI0R≈kBT, and simple theory predicts that the minimum intrinsic energy sensitivity should be ≈2h. The actual minimum value of the measured high-frequency (70 kHz) flux noise at 4.2 K is φn=1.3×10−7φ0 Hz−1/2. This corresponds to an intrinsic energy sensitivity, φ2n/2L, of 3.2×10−33 J Hz−1 or 5h. Lowering the bath temperature to 1.8 K gave no improvement in performance.

DOI
10.1063/1.90946

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IEEE Transactions on Magnetics•Mar 1, 1991•24 citations
The design, fabrication, and noise properties of an ultra-low-noise tunnel junction dc SQUID (superconducting quantum interference device) are presented. The two resistively shunted Pb-alloy tunnel junctions are each 3.6 μm diam. The SQUID has an inductance L of ≈11 pH, a critical current per junction, I0 of ≈100 μA, and a resistance per shunt R of ≈2 Ω. At 2.3 K, eI0R≈kBT, and simple theory predicts that the minimum intrinsic energy sensitivity should be ≈2h. The actual minimum value of the measured high-frequency (70 kHz) flux noise at 4.2 K is φn=1.3×10−7φ0 Hz−1/2. This corresponds to an intrinsic energy sensitivity, φ2n/2L, of 3.2×10−33 J Hz−1 or 5h. Lowering the bath temperature to 1.8 K gave no improvement in performance.
We present a new superconducting quantum interference device (SQUID) that combines ultra-low-noise performance with tight coupling to a useable input coil. The inductive loop of the SQUID consists of a superconducting square washer that is slit in a low inductance fashion from its central hole to an outside edge where two Josephson tunnel junctions are incorporated. The inductance of the SQUID is about 90 pH, and each junction has a critical current of 15 μA and a resistive shunt of 4.5 Ω. The 190-nH input coil is a planar spiral of 50 turns situated immediately above the washer and coupled to the SQUID with a coupling constant k2 of 0.86. The SQUID has a minimum coupled energy sensitivity of 19h at 4.2 K and 8h at 1.5 K, in good agreement with theory. The crossover between white and low frequency noise occurs at ∼250 Hz.
Tunnel-junction dc SQUIDs are being fabricated from Nb films using electron-beam lithography to define linewidths as small as 0.5 μm. The barriers in the Nb-NbOx-Nb junctions are grown in an oxygen plasma discharge, and the Pd2Si resistive shunts are formed by annealing Pd on the Si substrates. These devices have excellent storage and recycling properties. At a measurement frequency of 40 kHz, a SQUID with an inductance of about 1 nH, a critical current of about 4 μA, and a parallel shunt resistance of about 15 Ω had an intrinsic energy resolution of 2.5×10−32 J Hz−1 at 4.2 K and 1.1×10−32 J Hz−1 at 1.6 K, in good agreement with a model of the dc SQUID.
A series of dc SQUIDs has been fabricated in an attempt to obtain quantum-limited sensitivity. Typically, the SQUID inductance, L, is 2 pH, the capacitance and critical current of each tunnel junction are 0.5 pF and 0.5 mA, and the shunt resistance for each junction is 1Ω. The measured spectral density of the voltage noise Sv contains a l/f component that extends typically to 100 kHz or higher. When the l/f component is subtracted out, the best energy sensitivity achieved to date is ε1Hz = Sv2L(θVθΦ)2 less than or approximately equal to 2h, where θV/θΦ PHI is the transfer coefficient.
We have fabricated and characterized the noise performance of well-coupled Nb-Pb alloy edge junction dc superconducting quantum interference devices (SQUIDs) with a resistively shunted inductance. The extra damping resistor removes the resonances in the current-voltage characteristics resulting in a very low value of the extrinsic energy sensitivity in flux-locked-loop operation. Numerical simulations, with the junction capacitance included, indicate that the damping resistance does not degrade noise performance until it is significantly less than the junction-shunting resistance. We also tested different SQUID designs and demonstrated that a large SQUID inductance, proposed earlier to be desirable when resistively shunted, can seriously affect the low-frequency flux noise.
We present the results of an investigation of thin-film dc super conducting quantum interference device (SQUID’s) with very high energy resolution. The SQUID’s were fabricated using integrated-circuit techniques appropriate for superconducting devices. A weakly coupled SQUID with very low inductance (1 pH) had an intrinsic energy sensitivity 6×10−34 J/Hz = 0.9 h. A well-coupled SQUID (coupling constant α = 0.43) had an energy sensitivity referred to the input coil of 4.7×10−32 J/Hz = 71 h.
The authors have designed, fabricated and tested all-refractory DC SQUIDs in Nb-Al/sub 2/O/sub 3/-Nb trilayer technology that have noise performance comparable to the best previously reported for any technology. A variety of SQUID designs were incorporated as part of a trilayer process development test vehicle. SQUID inductance, junction area, and resistive shunt geometry were varied in matrix fashion to give SQUIDs with near-optimum parameter values for a factor of five range in Josephson current density and shunt sheet resistance. The devices were fabricated using a selective niobium anodization with a minimum feature size of 2 mu m. The base electrode and Nb wiring were patterned with dry etching, and the junction areas were defined by anodization: the Ti resistors were patterned with a lift-off process. Current density on different wafers was varied from 400 to 1000 A/cm/sup 2/ with typical junction V/sub m/'s of 60 mV. The shunt sheet resistance was varied in the 1-5- Omega / Square Operator range. The noise was measured with an RF SQUID direct small-signal readout scheme. A 50-pH SQUID with 3- mu m/sup 2/, 16- mu A junctions and 14- Omega shunt resistors was shown to have an ideally low white noise of 1*10/sup -13/ Phi /sub 0//sup 2//Hz, a white to 1/f crossover frequency at 7 Hz, and a noise level less than 6*10/sup -12/ Phi /sub 0//sup 2//Hz at 0.1 Hz.