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IEEE Transactions on Applied Superconductivity

Fabrication and Characterization of Superconducting NbN Nanowire Single Photon Detectors

Jeff A. Stern, William H. Farr

Published Jun 1, 2007• 33 citations
Publisher

Abstract

We report on the fabrication and characterization of high-speed, single photon detectors using superconducting NbN nanowires at a wavelength of 1064 nm. A 15 by 15 microns detector with a detector efficiency of 40% has been measured. Due to kinetic inductance, the recovery time of such large area detectors is longer than that of smaller or single wire detectors. The recovery time of our detectors (50 ns) has been characterized by measuring the inter-arrival time statistics of our detector.

DOI
10.1109/tasc.2007.898060

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We report on the fabrication and characterization of high-speed, single photon detectors using superconducting NbN nanowires at a wavelength of 1064 nm. A 15 by 15 microns detector with a detector efficiency of 40% has been measured. Due to kinetic inductance, the recovery time of such large area detectors is longer than that of smaller or single wire detectors. The recovery time of our detectors (50 ns) has been characterized by measuring the inter-arrival time statistics of our detector.
We fabricated superconducting nanowire single-photon detectors (SNSPDs) made of NbTiN and NbN thin films in the same fabrication batch. Various parameters, such as critical temperature, resistivity, switching current, and kinetic inductance, were compared between the two types of SNSPDs. These data indicate that NbTiN SNSPD surpasses NbN SNSPD in many aspects, including a shorter recovery time due to smaller kinetic inductance, a lower timing jitter due to higher switching current, and better uniformity. Based on the measurement of 28 out of 121 NbTiN SNSPDs on a 2-in Si wafer, 71% of detectors show a system detection efficiency of over 50% at a dark count rate of 100 Hz, with the maximum efficiency being 77.5%.
We develop single-photon detectors comprising single-mode fiber-coupled superconducting nanowires, with high system detection efficiencies at a wavelength of 940 nm. The detector comprises a 6.5-nm-thick, 110-nm-wide NbN nanowire meander fabricated onto a Si substrate with a distributed Bragg reflector for enhancing the optical absorptance. We demonstrate that, via the design of a low filling factor (1/3) and active area (Φ = 10 μm), the system reaches a detection efficiency of ∼60% with a dark count rate of 10 Hz, a recovery time <12 ns, and a timing jitter of ∼50 ps.
We report on the performance of large area NbN nanowire superconducting single-photon detectors (SSPDs). 20×20μm2 area SSPDs with 80 and 100nm linewidths and 50% fill factor were fabricated in 4-nm-thick NbN films grown on single-crystal MgO substrates. The high quality of the devices was verified by electrical and optical testing and compares favorably to measurements of 10×10μm2 area SSPDs. Measurements of kinetic inductance versus bias current indicate that the constriction density is low. The fiber-coupled detection efficiency of the devices was 0.4%–3.5% at 100Hz dark count rate.
Superconducting single photon detectors consist of a narrow and thin wire of superconductor and can detect single photons with high efficiency and high speed. Simultaneous optimization of the detection efficiency and detector response time is difficult because the response time is set by the dimensions of the wire (cross section and length) while the detection efficiency is determined by both the internal detection mechanism and the dimensions of the wire. Wider and shorter wires are easier to fabricate, are more robust and lead to shorter detector reset time, but are generally less efficient. Experiments employing detector tomography provide important insights into the photon detection mechanism and indicate a detection mechanism where the edges of the wire are more efficient. This leads to a position dependent local detection efficiency that can be explained in the context of a photon-assisted-vortex-entry model and predicts an optimum wire width ~70 nm. A 50 nm wide silicon nanowire deposited on top of a 150 nm wide NbN nanowire directs light at 1550 nm wavelength to the edges and improves both the total absorption efficiency and the internal detection efficiency of the wire. The total absorption efficiency can be enhanced by 30% while the internal detection efficiency is increased by 70%. Assuming that the wire covers a similar area the detector response time is reduced 4-fold compared to the standard design using a 70 nm wide wire.
Superconducting single-photon detectors (SSPD) is typically 100 nm-wide supercondiucting strip in a shape of meander made of 4-nm-thick film. To reduce response time and increase voltage response a parallel connection of the strips was proposed. Recently we demonstrated that reduction of the strip width improves the quantum effciency of such a detector at wavelengths longer than 1.5 μm. Being encourage by this progress in quantum effciency we improved the fabrication process and made parallel-wire SSPD with 40-nm-wide strips covering total area of 10 μm x 10 μm. In this paper we present the results of the characterization of such a parallel-wire SSPD at 10.6 μm wavelength and demonstrate linear dependence of the count rate on the light power as it should be in case of single-photon response.
Superconducting nanowire single-photon detectors (SNSPDs) play a pivotal role in infrared single-photon-detection applications owing to their free-running mode, near-unity detection efficiency, and excellent time resolution. However, conventional niobium nitride- (NbN) SNSPDs often have a trade-off between optimal detection efficiency and time resolution. We herein demonstrate NbN SNSPDs in the combination of high efficiency and time resolution by using the helium-ion-irradiated film of 10 nm and a homemade cryogenic amplifier to improve the signal-to-noise ratio. The proposed 18-μm-diameter device operated at 850 mK shows a saturated system detection efficiency of ∼90.5% at 1550 nm wavelength with a dark count rate below 50 counts per second (cps), and minimum system timing jitter of ∼14.7 ps. Meanwhile, the recovery time is 21.2 ns owing to its lower kinetic inductance. The time-of-flight light detection and ranging with this device was further carried out indoors, which demonstrates a submillimeter (<0.5 mm) depth resolution, as well as good depth and intensity reconstruction of a low-signature object even under the dwell time of 0.5 ms. It indicates that our device has a great advantage and potential in high-time-resolution and weak-signal-detection applications, such as real-time imaging, fluorescence lifetime detection, and remote laser sensing.