Superconducting nanowire single-photon detectors (SNSPDs) play a pivotal role in infrared single-photon-detection applications owing to their free-running mode, near-unity detection efficiency, and excellent time resolution. However, conventional niobium nitride- (NbN) SNSPDs often have a trade-off between optimal detection efficiency and time resolution. We herein demonstrate NbN SNSPDs in the combination of high efficiency and time resolution by using the helium-ion-irradiated film of 10 nm and a homemade cryogenic amplifier to improve the signal-to-noise ratio. The proposed 18-μm-diameter device operated at 850 mK shows a saturated system detection efficiency of ∼90.5% at 1550 nm wavelength with a dark count rate below 50 counts per second (cps), and minimum system timing jitter of ∼14.7 ps. Meanwhile, the recovery time is 21.2 ns owing to its lower kinetic inductance. The time-of-flight light detection and ranging with this device was further carried out indoors, which demonstrates a submillimeter (<0.5 mm) depth resolution, as well as good depth and intensity reconstruction of a low-signature object even under the dwell time of 0.5 ms. It indicates that our device has a great advantage and potential in high-time-resolution and weak-signal-detection applications, such as real-time imaging, fluorescence lifetime detection, and remote laser sensing.
Superconducting nanowire single-photon detectors (SNSPDs) play a pivotal role in infrared single-photon-detection applications owing to their free-running mode, near-unity detection efficiency, and excellent time resolution. However, conventional niobium nitride- (NbN) SNSPDs often have a trade-off between optimal detection efficiency and time resolution. We herein demonstrate NbN SNSPDs in the combination of high efficiency and time resolution by using the helium-ion-irradiated film of 10 nm and a homemade cryogenic amplifier to improve the signal-to-noise ratio. The proposed 18-μm-diameter device operated at 850 mK shows a saturated system detection efficiency of ∼90.5% at 1550 nm wavelength with a dark count rate below 50 counts per second (cps), and minimum system timing jitter of ∼14.7 ps. Meanwhile, the recovery time is 21.2 ns owing to its lower kinetic inductance. The time-of-flight light detection and ranging with this device was further carried out indoors, which demonstrates a submillimeter (<0.5 mm) depth resolution, as well as good depth and intensity reconstruction of a low-signature object even under the dwell time of 0.5 ms. It indicates that our device has a great advantage and potential in high-time-resolution and weak-signal-detection applications, such as real-time imaging, fluorescence lifetime detection, and remote laser sensing.
Superconducting nanowire single photon detectors (SNSPDs) have demonstrated advantages over traditional detectors in many fields [1]. Most fiber-coupled SNSPDs are coupled to single mode fibers, limiting their usability for applications where large surface area detectors are needed, for example fluorescence detection and satellite-based quantum communication [2][3]. Other important requirements for many applications are broadband detection efficiency, and low timing jitter [4]. So far, the increased meander length of multimode detectors, and the therefore increased kinetic inductance and number of imperfections due to film inhomogeneities have limited the timing jitter [5]. Moreover, combining low timing jitter with high detection efficiency and low dark count rate in one device is challenging due to the tradeoffs between different properties of SNSPDs [6]. In this paper, we achieved high efficiency and strong saturation over a broad wavelength range with a low timing jitter of 16.99 ps while maintaining a low dark count rate of < 0.2 Hz for an SNSPD coupled to a 50 µm core multimode fiber. To enhance the broadband absorption from 405 nm to 830 nm, detectors were fabricated on an optimized SiO2 cavity and Aluminum mirror. The geometry of the nanowire was also tuned to reach a good internal saturation of efficiency over the visible/NIR range but also to carry high current to get a large signal. Furthermore, a cryogenic readout amplifier was optimized to improve the signal to noise ratio and thus lead to high time resolution. Our devices can be readily used to enable higher resolution and faster quantum optics, bio-imaging, laser ranging and other optical experiments.
Generally, a superconducting nanowire single-photon detector (SNSPD) is composed of wires with a typical width of ∼ 100 nm . Recent studies have found that superconducting strips with a micrometer-scale width can also detect single photons. Compared with the SNSPD covering the same area, the superconducting microstrip single-photon detector (SMSPD) has smaller kinetic inductance, higher working current, and lower requirements in fabrication accuracy, providing potential applications in the development of ultralarge active area detectors. However, the study of SMSPD is still in its infancy, and the realization of its high-performance and practical use remains an open question. This study demonstrates a NbN SMSPD with a nearly saturated system detection efficiency (SDE) of ∼ 92.2 % at a dark count rate of ∼ 200 cps , a polarization sensitivity of ∼ 1.03 , and a minimum timing jitter of ∼ 48 ps at the telecom wavelength of 1550 nm when coupled with a single-mode fiber and operated at 0.84 K. Furthermore, the detector’s SDE is over 70% when operated at a 2.1 K closed-cycle cryocooler.
Shortly after their inception, superconducting nanowire single-photon detectors (SNSPDs) became the leading quantum light detection technology. With the capability of detecting single-photons with near-unity efficiency, high time resolution, low dark count rate, and fast recovery time, SNSPDs outperform conventional single-photon detection techniques. However, detecting lower energy single-photons (<0.8 eV) with high efficiency and low timing jitter has remained a challenge. To achieve unity internal efficiency at mid-infrared wavelengths, previous works used amorphous superconducting materials with low energy gaps at the expense of reduced time resolution (close to a nanosecond), and by operating them in complex mK dilution refrigerators. In this work, we provide an alternative approach with SNSPDs fabricated from 5-9.5 nm thick NbTiN superconducting films and devices operated in conventional Gifford-McMahon (GM) cryocoolers. By optimizing the superconducting film deposition process, film thickness and nanowire design, our fiber-coupled devices achieved > 70% system detection efficiency (SDE) at 2 μm and sub-15 ps timing jitter. Furthermore, detectors from the same batch demonstrated unity internal detection efficiency at 3 μm and 80% internal efficiency at 4 μm, paving the road for an efficient mid-infrared single-photon detection technology with unparalleled time resolution and without mK cooling requirements.
Shortly after their inception, superconducting nanowire single-photon detectors (SNSPDs) became the leading quantum light detection technology. With the capability of detecting single-photons with near-unity efficiency, high time resolution, low dark count rate, and fast recovery time, SNSPDs outperform conventional single-photon detection techniques. However, detecting lower energy single photons ( < 0.8 eV ) with high efficiency and low timing jitter has remained a challenge. To achieve unity internal efficiency at mid-infrared wavelengths, previous works used amorphous superconducting materials with low energy gaps at the expense of reduced time resolution (close to a nanosecond), and by operating them in complex milliKelvin (mK) dilution refrigerators. In this work, we provide an alternative approach with SNSPDs fabricated from 5 to 9.5 nm thick NbTiN superconducting films and devices operated in conventional Gifford-McMahon cryocoolers. By optimizing the superconducting film deposition process, film thickness, and nanowire design, our fiber-coupled devices achieved > 70 % system detection efficiency (SDE) at 2 μm and sub-15 ps timing jitter. Furthermore, detectors from the same batch demonstrated unity internal detection efficiency at 3 μm and 80% internal efficiency at 4 μm, paving the road for an efficient mid-infrared single-photon detection technology with unparalleled time resolution and without mK cooling requirements. We also systematically studied the dark count rates (DCRs) of our detectors coupled to different types of mid-infrared optical fibers and blackbody radiation filters. This offers insight into the trade-off between bandwidth and DCRs for mid-infrared SNSPDs. To conclude, this paper significantly extends the working wavelength range for SNSPDs made from polycrystalline NbTiN to 1.5–4 μm, and we expect quantum optics experiments and applications in the mid-infrared range to benefit from this far-reaching technology.
We demonstrate superconducting nanowire single photon detector (SNSPD) for the wavelength at around 2 μm. The linewidth of the NbN nanowire is squeezed to 56 nm to increase the intrinsic response efficiencies at longer wavelengths such as 2 μm. Serially connecting avalanche architecture is applied to increase the signal-to-noise ratio (SNR) of the response signal. Further, the optical cavity is optimized to improve the absorption of the device. A silica single-mode fiber is adopted to introduce photons to the SNSPD at a temperature of 2.25 K using a Gifford-McMahon cryocooler. The SNSPD exhibits detection efficiencies of 58%, 67%, and 63% at wavelengths of 1550, 1700, and 2000 nm, respectively, with dark count rate of ~12 kcps, which is reduced to 2 cps when the attached fiber pigtail is all placed inside the 40-K cryostat. The detection efficiency at 2000 nm is 2.5 times greater than that of the best previously developed detector with an efficiency of 25%. Our SNSPD is promising for practical applications in molecular science and earth meteorology.
Superconducting nanowire single photon detectors (SNSPDs) promise to combine near-unity quantum efficiency with >100 megacounts per second rates, picosecond timing jitter, and sensitivity ranging from x-ray to mid-infrared wavelengths. However, this promise is not yet fulfilled, as superior performance in all metrics is yet to be combined into one device. The highest single-pixel detection efficiency and the widest bias windows for saturated quantum efficiency have been achieved in SNSPDs based on amorphous materials, while the lowest timing jitter and highest counting rates were demonstrated in devices made from polycrystalline materials. Broadly speaking, the amorphous superconductors that have been used to make SNSPDs have higher resistivities and lower critical temperature (Tc) values than typical polycrystalline materials. Here, we demonstrate a method of preparing niobium nitride (NbN) that has lower-than-typical superconducting transition temperature and higher-than-typical resistivity. As we will show, NbN deposited onto unheated SiO2 has a low Tc and high resistivity but is too rough for fabricating unconstricted nanowires, and Tc is too low to yield SNSPDs that can operate well at liquid helium temperatures. By adding a 50 W RF bias to the substrate holder during sputtering, the Tc of the unheated NbN films was increased by up to 73%, and the roughness was substantially reduced. After optimizing the deposition for nitrogen flow rates, we obtained 5 nm thick NbN films with a Tc of 7.8 K and a resistivity of 253 μΩ cm. We used this bias sputtered room temperature NbN to fabricate SNSPDs. Measurements were performed at 2.5 K using 1550 nm light. Photon count rates appeared to saturate at bias currents approaching the critical current, indicating that the device's quantum efficiency was approaching unity. We measured a single-ended timing jitter of 38 ps. The optical coupling to these devices was not optimized; however, integration with front-side optical structures to improve absorption should be straightforward. This material preparation was further used to fabricate nanocryotrons and a large-area imager device, reported elsewhere. The simplicity of the preparation and promising device performance should enable future high-performance devices.