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Sensors and Actuators A Physical

Glass-blown spherical microcells for chip-scale atomic devices

E. Jesper Eklund, Andrei M. Shkel, Svenja A. Knappe, Elizabeth A. Donley, John E. Kitching

Published Oct 11, 2007• 78 citations
Publisher
DOI
10.1016/j.sna.2007.10.006

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Microfabricated (MEMS) alkali vapor cells are at the core of high-precision integrated atomic quantum sensors and devices [1], such as microwave and optical clocks, or magnetometers. The first chip-scale atomic device was a microwave atomic clock based on coherent population trapping [2]. It has offered in its industrial and commercialized version an ultra-low size-power -instability budget, impacting a plethora of industrial and scientific applications. Nevertheless, the short-term stability of these clocks is usually limited at about 10−10 at 1 s. Hot vapor MEMS-based optical frequency standards constitute a new generation of miniaturized clocks, with enhanced stability. These references keep the benefit of using wafer-scalable and mass-producible vapor cells while preventing ultra-high vacuum technologies and laser cooling. Among the transitions explored, the 6S1/2 → 7P1/2 near-UV transition of Cs atom was used to demonstrate an optical reference with a stability of 2.1 × 10−13 at 1 s and averaging down to a few 10−14 [3]. However, this reference was based on a 5 cm-long glass-blown cell, not compliant with the advent of a fully-miniaturized and low-power optical clock. In this work [4], we present the characterization of sub-Doppler resonances detected in a microfabricated cell by probing, in a simple saturated absorption configuration, the Cs atom 6S1/2 → 7P1/2 transition at 459 nm. The impact of the laser intensity and cell temperature on the sub-Doppler resonance is experimentally investigated. Optimal values are identified for the development of a near-UV microcell-stabilized frequency reference. Detection noise measurements are also reported, predicting a short-term stability in the 10−13 range at 1 s. Tests of cells with embedded getters are under progress for improved purity of the cell inner atmosphere and narrowing of the resonance.

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We report the fabrication of a micro vapor cell which has Rb and Ne inside with internal volumes of several millimeters, which is the key component of chip-scale atomic devices like clocks and magnetometers. The cells were filled with Ne at a controlled pressure as the buffer gas by using glass-silicon anodic bonding techniques and dispenser pills of SAES Getters. And a special two-step bonding method was taken to avoid breakdown caused by the buffer gas and to secure the quality of the bonding. We also built an optical measuring system and measured the coherent population trapping (CPT) resonance of85Rb D1 line with a linewidth below 2.0 kHz and a contrast about 1.1%. Zeeman spectrum for CPT resonance was also detected in these microcells. These results show that these vapor cells are capable to be used in atomic clocks or magnetometers.
Microfabricated (MEMS) alkali vapor cells are at the core of high-precision integrated atomic quantum sensors and devices [1], such as microwave and optical clocks, or magnetometers. The first chip-scale atomic device was a microwave atomic clock based on coherent population trapping [2]. It has offered in its industrial and commercialized version an ultra-low size-power -instability budget, impacting a plethora of industrial and scientific applications. Nevertheless, the short-term stability of these clocks is usually limited at about 10−10 at 1 s. Hot vapor MEMS-based optical frequency standards constitute a new generation of miniaturized clocks, with enhanced stability. These references keep the benefit of using wafer-scalable and mass-producible vapor cells while preventing ultra-high vacuum technologies and laser cooling. Among the transitions explored, the 6S1/2 → 7P1/2 near-UV transition of Cs atom was used to demonstrate an optical reference with a stability of 2.1 × 10−13 at 1 s and averaging down to a few 10−14 [3]. However, this reference was based on a 5 cm-long glass-blown cell, not compliant with the advent of a fully-miniaturized and low-power optical clock. In this work [4], we present the characterization of sub-Doppler resonances detected in a microfabricated cell by probing, in a simple saturated absorption configuration, the Cs atom 6S1/2 → 7P1/2 transition at 459 nm. The impact of the laser intensity and cell temperature on the sub-Doppler resonance is experimentally investigated. Optimal values are identified for the development of a near-UV microcell-stabilized frequency reference. Detection noise measurements are also reported, predicting a short-term stability in the 10−13 range at 1 s. Tests of cells with embedded getters are under progress for improved purity of the cell inner atmosphere and narrowing of the resonance.