Science and industry demand ever more sensitive measurements on ever smaller systems, as exemplified by spintronics, nanoelectromechanical system, and spin-based quantum information processing, where single electronic spin detection poses a grand challenge. Superconducting quantum interference devices (SQUIDs) have yet to be effectively applied to nanoscale measurements. Here, we show that a simple bilayer deposition route, combining photolithography with focused ion beam patterning, produces high performance nanoscale SQUIDs. We present results of noise measurements on these nanoSQUIDs which correspond to a magnetic flux sensitivity of around 0.2μΦ0∕Hz1∕2. This represents one of the lowest noise values achieved for a SQUID device operating above 1K.
Science and industry demand ever more sensitive measurements on ever smaller systems, as exemplified by spintronics, nanoelectromechanical system, and spin-based quantum information processing, where single electronic spin detection poses a grand challenge. Superconducting quantum interference devices (SQUIDs) have yet to be effectively applied to nanoscale measurements. Here, we show that a simple bilayer deposition route, combining photolithography with focused ion beam patterning, produces high performance nanoscale SQUIDs. We present results of noise measurements on these nanoSQUIDs which correspond to a magnetic flux sensitivity of around 0.2μΦ0∕Hz1∕2. This represents one of the lowest noise values achieved for a SQUID device operating above 1K.
The requirements of quantum metrology and nanoscience are driving the need for single-particle detection capability across a wide variety of physics areas, including quantum information processing, single-photon detection, nanoelectromechanical systems, nanomagnetism and spintronics. The single particles to be detected include atoms, molecules, photons, spins and even phonons, in the future. Nanoscale superconducting quantum interference devices (nanoSQUIDs) represent a new manifestation of an old but exciting superconducting technology which addresses some of these requirements. In this paper we describe a straightforward approach to fabricating Nb microbridge weak links using combined optical lithography and focused ion beams which may be used to fabricate nanoSQUIDs. The devices show non-hysteretic current?voltage characteristics and demonstrate very low noise, even at operating temperatures above 4.2?K. To improve our understanding of the superconducting properties of the Josephson microbridge/nanobridge junctions which have proved very successful in realizing low noise nanoSQUIDs we have carried out a combination of investigations. These include cryogenic resistance versus temperature (R(T)) and current?voltage characteristic measurements, atomic force microscope scans, controlled gallium (Ga) ion milling and implantation, and ion beam track modelling of these Josephson devices and Nb thin films.
Abstract In this paper a nanofabrication process, based on a focused ion beam (FIB) nanosculpting technique, for high sensitivity three-dimensional nanoscale superconducting quantum interference devices (nanoSQUIDs) is reported. The crucial steps of the fabrication process are described, as are some peculiar features of the superconductor–normal metal–insulator–superconductor (SNIS) Josephson junctions, which may useful for applications in cryocooler systems. This fabrication procedure is employed to fabricate sandwich nanojunctions and high sensitivity nanoSQUIDs. Specifically, the superconductive nanosensors have a rectangular loop of 1 × 0.2–0.4 μ m 2 interrupted by two square Nb/Al–AlO x /Nb SNIS Josephson junctions with side lengths of 0.3 μ m. The characterization of a typical nanoSQUID has been carried out and a spectral density of magnetic flux noise as low as 0.8 μ Φ 0 Hz –1/2 has been measured.
We report here recent work at the U.K. National Physical Laboratory on developing nanoscale SQUIDs using Dayem bridge Josephson junctions. The advantages are simplicity of fabrication, exceptional low-noise performance, toward the quantum limit, and a range of novel applications. Focused ion beam patterned Nb SQUID, possessing exceptionally low noise (~200 nΦ0/Hz1/2above 1 kHz), and operating above 4.2 K can be applied to measurement of nanoscale magnetic objects or coupled to nanoelectromechanical resonators, as well as single particle detection of photons, protons, and ions. The limited operating temperature range may be extended by exposing the Dayem bridges to carefully controlled ion beam implantation, leading to nonreversible changes in junction transition temperature.
YBa2Cu3O7 24∘ (30∘) bicrystal grain boundary junctions (GBJs), shunted with 60\,nm (20\,nm) thick Au, were fabricated by focused ion beam milling with widths 80nm≤w≤7.8μm. At 4.2\,K we find critical current densities jc in the 105A/cm2 range %\dkc{\#1} (without a clear dependence on w) and an increase in resistance times junction area ρ with an approximate scaling ρ∝w1/2. For the narrowest GBJs jcρ≈100μV, which is promising for the realization of sensitive nanoSQUIDs for the detection of small spin systems. We demonstrate that our fabrication process allows the realization of sensitive nanoscale dc SQUIDs; for a SQUID with w≈100\,nm wide GBJs we find an rms magnetic flux noise spectral density of SΦ1/2≈4μΦ0/Hz1/2 in the white noise limit. We also derive an expression for the spin sensitivity Sμ1/2, which depends on SΦ1/2, on the location and orientation of the magnetic moment of a magnetic particle to be detected by the SQUID, and on the SQUID geometry. For the not optimized SQUIDs presented here, we estimate Sμ1/2=390μB/Hz, which could be further improved by at least an order of magnitude.
The increasing demands of quantum metrology and nanoscience are driving the requirements for single particle detection capability across a wide variety of physics applications, including QIP, single photon detection, NEMS, nanomagnetism and spintronics. NanoSQUIDs represent a new manifestation of an old but exciting superconducting technology which addresses some of these requirements. We will describe a straightforward approach to fabricating Nb microbridge weak-links which may be used in nanoscale SQUIDs. These devices have demonstrated very low noise, even at operating temperatures above 4.2 K. We will also describe the performance of prototype devices made using this technique for energy resolving single photon detection, nanoparticle spin detection and NEMS resonator readout.
Focused ion-beam (FIB) technology has been used to fabricate miniature Nb DC SQUIDs (superconducting quantum interference devices) which incorporate resistively shunted microbridge junctions and a central loop with a hole diameter ranging from 1058 to 50 nm. The smallest device, with a 50 nm hole diameter, has a white flux noise level of 2.6 µΦ 0 Hz −1/2 at 10 4 Hz. The scaling of the flux noise properties and focusing effect of the SQUID with the hole size were examined. The observed low frequency flux noises of different devices were compared with the contribution due to the spin fluctuation of defects introduced during FIB processing and of thermally activated flux hopping in the SQUID washer.