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Applied Physics Letters

Detection of single infrared, optical, and ultraviolet photons using superconducting transition edge sensors

Blas Cabrera, Roland M. Clarke, P. Colling, Aaron Miller, Sae Woo Nam, Roger W. Romani

Published Aug 10, 1998• 353 citations
Publisher

Abstract

We have demonstrated the use of superconducting transition edge sensors for the wide-band detection of individual photons from the mid infrared (IR), through the optical, and into the far ultraviolet (UV). These tungsten transition edge sensors are squares about 18 μm on a side and detect single photon events above a threshold of 0.3 eV (4 μm wavelength), with an energy resolution of 0.15 eV full width at half maximum, and with a risetime (falltime) of .5 μs (60 μs). The calibration data extend up to the UV cutoff of the fiber optic feed at 3.5 eV (350 nm).

DOI
10.1063/1.121984

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We have demonstrated the use of superconducting transition edge sensors for the wide-band detection of individual photons from the mid infrared (IR), through the optical, and into the far ultraviolet (UV). These tungsten transition edge sensors are squares about 18 μm on a side and detect single photon events above a threshold of 0.3 eV (4 μm wavelength), with an energy resolution of 0.15 eV full width at half maximum, and with a risetime (falltime) of .5 μs (60 μs). The calibration data extend up to the UV cutoff of the fiber optic feed at 3.5 eV (350 nm).
We report on the detection of single photons with λ = 8 μm using a superconducting hot-electron microbolometer. The sensing element is a titanium transition-edge sensor with a volume ∼0.1 μm3 fabricated on a silicon substrate. Poisson photon counting statistics including simultaneous detection of 3 photons was observed. The width of the photon-number peaks was 0.11 eV, 70% of the photon energy, at 50–100 mK. This achieved energy resolution is one of the best figures reported so far for superconducting devices. Such devices can be suitable for single-photon calorimetric spectroscopy throughout the mid-infrared and even the far-infrared.
Superconducting nanowire single-photon detectors are widely used for detecting individual photons across various wavelengths from ultraviolet to near-infrared range. Recently, there has been increasing interest in enhancing their sensitivity to single photons in the mid-infrared spectrum, driven by applications in quantum communication, spectroscopy, and astrophysics. Here, we present our efforts to expand the spectral detection capabilities of U-shaped NbTiN-based superconducting nanowire single-photon detectors, fabricated in a 2-wire configuration on a silicon-on-insulator substrate, into the mid-infrared range. We demonstrate saturated internal detection efficiency extending up to a wavelength of 3.5 μm for a 5 nm thick and 50 nm wide NbTiN nanowire with a dark count rate less than 10 counts per second at 0.9 K and a rapid recovery time of 4.3 ns. The detectors are engineered for integration on waveguides in a silicon-on-insulator platform for compact, multi-channel device applications.
The ability to detect single photons in the mid-infrared spectral range (beyond 2 μm wavelength, photon energy below 0.62 eV) is the key to unlocking a range of emerging scientific applications, from remote sensing LIDAR, molecular spectroscopy, and powerful new approaches to dark matter detection. Conventional detector types, such as semiconductor single-photon avalanche diodes, lose sensitivity at such low photon energy. Superconducting materials, with a much lower characteristic energy gap, hold particular promise. In this Perspective, we focus on recent advances in superconducting nanowire single-photon detectors, which have recently extended single-photon sensitivity up to 29 μm (0.043 eV). We discuss the potential for future advances and strategies to overcome challenges to technological development.
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Single photon detectors are fundamental tools for quantum metrology, e.g. to calibrate both detectors and sources, as for quantum information. One of the most promising detectors able to resolve single photons is the transition-edge sensor (TES). We report our last results obtained with Ti/Au TES deposited on SiN substrate. Photon counting measurements, obtained by using pulsed sources, in the NIR-visible wavelength range, show the ability to resolve up to fourteen photons with an energy resolution of 0.44 eV at 690 nm (1.80 eV) and 0.38 eV at 1310 nm (0.95 eV), with a good linearity. A preliminary measurement obtained by using a parametric down conversion (PDC) heralded single photon source, at 812 nm (1.53 eV), is also reported.
Superconducting nanowire single-photon detectors (SNSPDs) are among the most sensitive single-photon detectors available and have the potential to transform fields ranging from infrared astrophysics to molecular spectroscopy. However, extending their performance into the mid-infrared spectral region - crucial for applications such as exoplanet transit spectroscopy and vibrational fingerprinting of molecules - has remained a major challenge, primarily due to material limitations and scalability constraints. Here, we report on the development of SNSPDs based on tungsten germanide, a novel material system that combines high mid-infrared sensitivity with compatibility for large-scale fabrication. Our detectors exhibit saturated internal detection efficiency at wavelengths up to 29 μm, while using 2.7x thicker films (8 nm vs 3 nm) and up to 4.5x wider nanowires (360 nm vs 80 nm) compared to mid-infrared-optimized SNSPDs fabricated from tungsten silicide. This advance will enable scalable, high-performance single-photon detection in a spectral region that was previously inaccessible, opening new frontiers in remote sensing, thermal imaging, environmental monitoring, molecular physics, and astronomy.