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Superconductor Science and Technology

Performances of niobium planar nanointerferometers as a function of the temperature: a comparative study

Roberto Russo, C. Granata, Antonio Vettoliere, E. Esposito, Matteo Fretto, Natascia De Leo, Emanuele Enrico, V. Lacquaniti

Published Mar 18, 2014• 10 citations
Publisher

Abstract

The growing interest in the development of nano-superconducting quantum interference devices (nanoSQUIDs) and their applications in nanoscience demands a deep study of these ultra-high-sensitivity nanodevices. In this paper, the main features of niobium planar nanointerferometers as a function of the temperature have been investigated. In particular, two types of nanodevices have been realized and studied: one based on nanobridges and the other on sub-micron Josephson tunnel junctions (JTJs). The nanobridge-based nanointerferometer, fabricated by electron beam lithography (EBL), consists of a sub-micrometric loop (effective area of 0.5 μ m 2 ), interrupted by two Dayem nanobridges having a width and length of 50 and 80 nm respectively. The JTJs-based nanointerferometer has two Nb/Al-AlO x /Nb SNIS (superconductor/normal-insulator/superconductor) junctions with an area of 0.09 μ m 2 , connected by a rectangular loop (1 μ m × 0.2 μ m), and realized by the three-dimensional focused ion beam (3D FIB) sculpting technique. For both nanodevices, measurements of current–voltage characteristics and critical current versus external magnetic flux have been performed at operating temperatures ranging from 4.2 to 1.2 K. The critical current modulation depths, magnetic flux to current transfer factor (current responsivity) and magnetic flux resolution as a function of the temperature have been evaluated for both nanosensors. Furthermore, measurements of the voltage–magnetic flux characteristics and the spectral density of magnetic flux noise have been performed at T = 4.2 K.

DOI
10.1088/0953-2048/27/4/044028

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The growing interest in the development of nano-superconducting quantum interference devices (nanoSQUIDs) and their applications in nanoscience demands a deep study of these ultra-high-sensitivity nanodevices. In this paper, the main features of niobium planar nanointerferometers as a function of the temperature have been investigated. In particular, two types of nanodevices have been realized and studied: one based on nanobridges and the other on sub-micron Josephson tunnel junctions (JTJs). The nanobridge-based nanointerferometer, fabricated by electron beam lithography (EBL), consists of a sub-micrometric loop (effective area of 0.5 μ m 2 ), interrupted by two Dayem nanobridges having a width and length of 50 and 80 nm respectively. The JTJs-based nanointerferometer has two Nb/Al-AlO x /Nb SNIS (superconductor/normal-insulator/superconductor) junctions with an area of 0.09 μ m 2 , connected by a rectangular loop (1 μ m × 0.2 μ m), and realized by the three-dimensional focused ion beam (3D FIB) sculpting technique. For both nanodevices, measurements of current–voltage characteristics and critical current versus external magnetic flux have been performed at operating temperatures ranging from 4.2 to 1.2 K. The critical current modulation depths, magnetic flux to current transfer factor (current responsivity) and magnetic flux resolution as a function of the temperature have been evaluated for both nanosensors. Furthermore, measurements of the voltage–magnetic flux characteristics and the spectral density of magnetic flux noise have been performed at T = 4.2 K.
An integrated magnetic nanosensor based on a niobium dc SQUID (superconducting quantum interference device) for nanoscale applications is presented. The sensor, having a washer shape with a hole of 200 nm and two Josephson-Dayem nanobridges of 80 nm × 100 nm, consists of a Nb(30 nm)/Al(30 nm) bilayer patterned by electron beam lithography (EBL) and shaped by lift-off and reactive ion etch (RIE) processes. The presence of the niobium coils, integrated on-chip and tightly coupled to the SQUID, allows us to easily excite the sensor in order to get the voltage-flux characteristics and to flux bias the SQUID at its optimal point. The measurements were performed at liquid helium temperature. A voltage swing of 75 µV and a maximum voltage-flux transfer coefficient (responsivity) as high as 1 mV/Φ(0) were directly measured from the voltage-flux characteristic. The noise measurements were performed in open loop mode, biasing the SQUID with a dc magnetic flux at its maximum responsivity point and using direct-coupled low-noise readout electronics. A white magnetic flux noise spectral density as low as 2.5 μΦ(0) Hz(-1/2) was achieved, corresponding to a magnetization or spin sensitivity in units of the Bohr magneton of 100 spin Hz(-1/2). Possible applications of this nanosensor can be envisaged in magnetic detection of nanoparticles and small clusters of atoms and molecules, in the measurement of nanoobject magnetization, and in quantum computing.
A superconducting quantum interference device (SQUID) miniaturized into the nanoscale is promising in the inductive detection of a single electron spin. A nano-SQUID with a strong spin coupling coefficient, a low flux noise, and a wide working magnetic field range is highly desired in a single spin resonance measurement. Nano-SQUIDs with Dayem bridge junctions excel in a high working field range and in the direct coupling from spins to the bridge. However, the common planar structure of nano-SQUIDs is known for problems such as a shallow flux modulation depth and a troublesome hysteresis in current–voltage curves. Here, we developed a fabrication process for creating three-dimensional (3-D) niobium (Nb) nano-SQUIDs with nanobridge junctions that can be tuned independently. Characterization of the device shows up to 45.9% modulation depth with a reversible current–voltage curve. Owning to the large modulation depth, the measured flux noise is as low as 0.34 μΦ 0 /Hz 1/2 . The working field range of the SQUID is greater than 0.5 T parallel to the SQUID plane. We believe that 3-D Nb nano-SQUIDs provide a promising step toward effective single-spin inductive detection.
Reduction of the size of the superconducting quantum interference device (SQUID) ring structure improves its sensitivity to magnetic moments. Nanobridge junctions are advantageous for SQUID miniaturization. However, many planar SQUIDs with nanobridge junctions have shallow flux modulation depths because of their nonideal Josephson current-phase relationships. Here, we fabricated a three-dimensional niobium nitride (NbN) miniaturized SQUID in which the nanobridge junction structures are much thinner than the superconducting ring. We grew a thick superconducting NbN film on a silicon wafer and embedded an insulating slit in the middle of the film. By setting two thin nanobridge junctions across this insulating slit, we were able to manufacture NbN miniaturized SQUIDs that, in principle, can become nano-SQUIDs. The flux modulation depths of these devices reached 36% at 4.2 K. In addition, the fabricated devices show reversible current-voltage characteristics in the absence of any shunting resistance.
Abstract Nano-superconducting quantum interference devices (nano-SQUIDs) with high energy sensitivity and spatial resolution are essential in many applications such as single spin detection, nano-electromechanical vibration detection and microscale magnetic imaging. This paper studies a Dayem-type niobium nano-SQUID using focus ion beam milling technology. The device has two 42 nm × 60 nm nano-bridges and an integrated on-chip Nb modulation flux line located beside the SQUID loop with a 100 nm nanogap. The non-hysteretic temperature range of the nano-SQUID is about 1.4 K from 4.6 K to 6.0 K, which could broaden the operation temperature range of the device. The maximal transfer coefficient V Φ and peak-to-peak voltage ΔV are 8.53 mV/Φ 0 and 430 μV at 4.8 K, respectively.
We report on the design, the fabrication and the performance of an integrated magnetic nano-sensor based on niobium dc-SQUID (Superconducting QUantum Interference Device) for nanoscale applications is presented. The nano-sensors are based on nanometric niobium constrictions (Dayem bridges) inserted in a square loop having a side length of 200 nm. Measurements of voltage-flux characteristic, flux to voltage transfer factor and noise performances are reported. In small signal mode, the sensors have shown a magnetic flux noise spectral density of 1.5 μΦ 0 /Hz 1/2 corresponding to a spin sensitivity in unit of Bohr magneton of 60 spin/Hz 1/2 . Supercurrent decay measurements of these devices are also reported. Such measurements provide useful information for applications which employ the SQUID as a trigger where the sensor works on the zero voltage state. The experimental data, have shown an intrinsic current fluctuation less than 0.2% of the critical current at liquid helium temperature, corresponding to an intrinsic sensor magnetic flux resolution of a few mΦ 0 . In view of the nano-SQUID employments in the detection of small spin populations, the authors calculated the spin sensitivity and the magnetic response relative to the single spin, as a function of its position within the SQUID hole. The results show that the SQUID response depends strongly on the spin position.
The overdamped Nb/Al-AlOx/Nb superconductor-normal metal-insulator-superconductor SNIS Josephson junctions recently developed at INRIM exhibit high values of critical current density and characteristic voltage, making these devices appealing both for metrology and digital electronics. High current densities could allow reduction of junction size, increasing the integration level. In this work authors present first results concerning the realization of sub-μm SNIS including a nanolithographic technique (Electron Beam Lithography, EBL) into the conventional process, to reduce junction dimensions. Fabrication and electrical parameters have been evaluated considering the scaling of the areas of junctions, furthermore RF and temperature behaviour have been studied.