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Journal of Materials Science Materials in Electronics

Novel fabrication methods for submicrometer Josephson junction qubits

A. Potts, P. R. Routley, G. J. Parker, J. J. Baumberg, P. A. J. de Groot

Published Jun 1, 2001• 16 citations
Publisher
DOI
10.1023/a:1011279908265

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Due to their unique properties as lossless, nonlinear circuit elements, Josephson junctions lie at the heart of superconducting quantum information processing. Previously, we demonstrated a two-layer, submicrometer-scale overlap junction fabrication process suitable for qubits with long coherence times. Here, we extend the overlap junction fabrication process to micrometer-scale junctions. This allows us to fabricate other superconducting quantum devices. For example, we demonstrate an overlap-junction-based Josephson parametric amplifier that uses only 2 layers. This efficient fabrication process yields frequency-tunable devices with negligible insertion loss and a gain of ~ 30 dB. Compared to other processes, the overlap junction allows for fabrication with minimal infrastructure, high yield, and state-of-the-art device performance.
To implement a large-scale integration of superconducting quantum bits (qubits), we have investigated a process of fabricating submicrometer Al/AlOx/Al trilayer Josephson junctions. Moreover, on the basis of this process, we developed a means of fabricating different kinds of superconducting qubits. Superconducting qubits require not only small junctions, but also peripheral circuit elements, such as a large resonator, on the same chip. As a result, we chose to use planarization in the self-aligned junction contact formation, which suppressed a pattern-area-dependence of the chemical-mechanical polishing rate. In addition, Al fine wires with a width of 0.2 μm were required in some parts of the qubits to increase the coupling strength between the SQUIDs and qubits. We developed a two-step etching process to form such fine wires using i-line photoresist, which had a high etching resistance. The operation of three-junction flux qubits was confirmed in a dilution refrigerator.