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arXiv:2505.02764 · Physical Review Applied

Hyperinductance based on stacked Josephson junctions

Paul Manset, José M. Palomo, A. Schmitt, Kyrylo Gerashchenko, R. Rousseau, Himanshu Patange, Patrick Abgrall B, Manuel Houzet, Emmanuel Flurin, S. Deléglise, T. Jacqmin, Léo Balembois

Published Apr 14, 2026• 0 citations
arXivHTMLPDF

Abstract

Superinductances are superconducting circuit elements that combine a large inductance with a low parasitic capacitance to ground, resulting in a characteristic impedance exceeding the resistance quantum $R_Q = h/(2e)^2 \simeq 6.45 \mathrm{k}Ω$. In recent years, these components have become key enablers for emerging quantum circuit architectures. However, achieving high characteristic impedance while maintaining scalability and fabrication robustness remains a major challenge. In this work, we present two fabrication techniques for realizing superinductances based on vertically stacked Josephson junctions. Using a multi-angle Manhattan (MAM) process and a zero-angle (ZA) evaporation technique -- in which junction stacks are connected pairwise using airbridges -- we fabricate one-dimensional chains of stacks that act as high-impedance superconducting transmission lines. Two-tone microwave spectroscopy reveals the expected $\sqrt{n}$ scaling of the impedance with the number of junctions per stack. The chain fabricated using the ZA process, with nine junctions per stack, achieves a characteristic impedance of $\sim 16 \mathrm{k}Ω$, a total inductance of $5.9 \mathrm{μH}$, and a maximum frequency-dependent impedance of $50 \mathrm{k}Ω$ at 1.4 GHz. Our results establish junction stacking as a scalable, robust, and flexible platform for next-generation quantum circuits requiring ultra-high impedance environments.

DOI
10.1103/8tg3-5jqr

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Superinductances are superconducting circuit elements that combine a large inductance with a low parasitic capacitance to ground, resulting in a characteristic impedance exceeding the resistance quantum RQ=h/(2e)2≃6.45kΩR_Q = h/(2e)^2 \simeq 6.45 \mathrm{k}ΩRQ​=h/(2e)2≃6.45kΩ. In recent years, these components have become key enablers for emerging quantum circuit architectures. However, achieving high characteristic impedance while maintaining scalability and fabrication robustness remains a major challenge. In this work, we present two fabrication techniques for realizing superinductances based on vertically stacked Josephson junctions. Using a multi-angle Manhattan (MAM) process and a zero-angle (ZA) evaporation technique -- in which junction stacks are connected pairwise using airbridges -- we fabricate one-dimensional chains of stacks that act as high-impedance superconducting transmission lines. Two-tone microwave spectroscopy reveals the expected n\sqrt{n}n​ scaling of the impedance with the number of junctions per stack. The chain fabricated using the ZA process, with nine junctions per stack, achieves a characteristic impedance of ∼16kΩ\sim 16 \mathrm{k}Ω∼16kΩ, a total inductance of 5.9μH5.9 \mathrm{μH}5.9μH, and a maximum frequency-dependent impedance of 50kΩ50 \mathrm{k}Ω50kΩ at 1.4 GHz. Our results establish junction stacking as a scalable, robust, and flexible platform for next-generation quantum circuits requiring ultra-high impedance environments.
Quantum mechanics reveals a world that defies classical determinism, where uncertainty, superposition, and fluctuations are fundamental aspects. Engineering devices that harness these quantum features requires not only precision, but also a deep understanding of how they interact with their surrounding environment. Superconducting circuits, which exploit macroscopic quantum coherence in low-loss superconducting materials, provide a scalable platform for implementing such systems. Among the critical elements in these circuits, superinductors—high-impedance, dissipation-free inductive components—play a central role by suppressing charge fluctuations. They allow quantum states to be delocalized in phase space, protect qubits from environmental noise, and facilitate access to phenomena such as dual Josephson physics and ultra-strong coupling regimes. This thesis explores two complementary implementations of high-impedance circuits: geometric superinductors, demonstrating that high impedance can be achieved beyond kinetic inductance, and Josephson junction chains, used to investigate both microwave mode properties and DC transport across the superconductor-to-insulator transition. Part I addresses geometric superinductors. Contrary to the common belief that high-impedance superconducting circuits require kinetic inductance, we demonstrate that purely geometric designs can achieve characteristic impedance exceeding the resistance quantum. By exploiting mutual coupling between adjacent turns, coil-based inductors achieve enhanced self-inductance, creating a reliable platform for qubits and resonators. Modeling, simulation, fabrication, and characterization confirm that these elements behave as superinductor. With low loss, high linearity, and minimal stray capacitance, these elements are reproducible, free of uncontrolled tunneling events, and capable of strong magnetic coupling. This establishes geometric superinductors as robust, single-wave-function superconducting devices suitable for hardware protected qubits and hybrid systems. Part II presents classical numerical simulations of a Quantum Phase Slip circuit to study dual Shapiro steps. The circuit consists of an ideal Quantum Phase Slip element embedded in a resistive-inductive environment with a parasitic capacitance. Part III extends the investigation of high characteristic-impedance circuit elements to one-dimensional Josephson junction chains, which act as a quantum simulator for many-body physics and the superconductor–insulator transition. Different devices are realized on both sides of the DC phase transition, showing either a supercurrent branch or Coulomb blockade at zero bias. The effect of the crossover on microwave modes, however, remains insufficiently investigated. Studying these modes provides insight into the interplay between disorder and phase-slip events. Small differences in circuit component sizes determine which side of the transition a device falls on, making these results relevant not only for fundamental understanding but also for the design of quantum devices, emphasizing the crucial role of the electromagnetic environment in stabilizing and controlling fragile quantum states. Together, these results illustrate how carefully engineered high characteristic-impedance elements provide a link between macroscopic circuits and the inherently uncertain quantum world, enabling experiments that probe, control, and ultimately exploit quantum fluctuations for applications in quantum information, metrology, solid state physics and beyond.
We have measured the plasma resonances of an array of Josephson junctions in the regime E(J)>>E(C), up to the ninth harmonic by incorporating it as part of a resonator capacitively coupled to a coplanar waveguide. From the characteristics of the resonances, we infer the successful implementation of a superinductance, an electrical element with a nondissipative impedance greater than the resistance quantum [R(Q)=h/(2e)(2) is approximately equal to 6.5 kΩ] at microwave frequencies. Such an element is crucial for preserving the quantum coherence in circuits exploiting large fluctuations of the superconducting phase. Our results show internal losses less than 20 ppm, self-resonant frequencies greater than 10 GHz, and phase-slip rates less than 1 mHz, enabling direct application of such arrays for quantum information and metrology. Arrays with a loop geometry also demonstrate a new manifestation of flux quantization in a dispersive analog of the Little-Parks effect.
In this article, we present an experimental study of microwave resonators made out of Josephson junctions. The junctions are embedded in a transmission line geometry so that they increase the inductance per length for the line. By comparing two devices with different input/output coupling strengths, we show that the coupling capacitors, however, add a significant amount to the total capacitance of the resonator. This makes the resonators with high coupling capacitance to act rather as lumped element resonators with inductance from the junctions and capacitance from the end sections. Based on a circuit analysis, we show that the input and output couplings of the resonator are limited to a maximum value of ωrZ0/4Zr, where ωr is the resonance frequency and Z0 and Zr are the characteristic impedances of the input/output lines and the resonator, respectively.
Superconducting quantum circuits rely on compact, low-loss inductive elements, strong anharmonicity, and robust flux biasing to realize coherent and controllable quantum bits. This thesis investigates how vertically stacked Josephson junction arrays can be employed to meet these requirements and enable compact flux qubits operated in the quarton regime. In the first part, stacked Al/AlOx/Al Josephson junctions are established as compact linear inductors. Their three-dimensional geometry reduces parasitic capacitance to ground while allowing multiple junctions to be integrated within a small footprint. A numerical modeling approach is used to quantify stray capacitances, Coulomb screening, and collective modes of extended stacked junction arrays. Cryogenic transport measurements confirm strongly underdamped junction dynamics with uniform junction characteristics, demonstrating their suitability as low-loss inductive elements in superconducting circuits. In the second part, these inductors are integrated into flux qubits operated in the quarton regime. In this regime, the qubit potential becomes nearly quartic around half-flux bias, resulting in positive anharmonicity and first-order insensitivity to flux noise at the operating point. Spectroscopy reveals qubit transition frequencies in the 3–5 GHz range and anharmonicities of 0.5–1.5 GHz, consistent with the expected quartic potential landscape. To distinguish intrinsic from externally induced decoherence, a persistent-current bias scheme is implemented, enabling stable and low-noise flux biasing over time scales of up to one week. A direct comparison between conventionally biased and persistently biased devices rules out external flux noise as the dominant coherence-limiting mechanism. High-resolution spectroscopy identifies avoided level crossings caused by microscopic two-level systems (TLS) in the amorphous tunnel barriers of the stacked junctions. A systematic cumulative analysis of splitting statistics across multiple devices shows that the spectral TLS density scales with the total tunnel-barrier area, while the array length determines the effective qubit–TLS coupling strength. The measured relaxation times follow scaling relations consistent with Fermi’s golden rule for a bath of weakly coupled TLS, demonstrating that TLS in the stacked junction arrays constitute the dominant intrinsic decoherence channel in quarton qubits. These results establish stacked Josephson junction arrays as compact superinductive elements and provide an understanding of coherence limitations in superconducting quantum circuits based on Josephson junction arrays, offering guidance for future device optimization.
Superconducting circuit devices require electrical interconnects between different circuit elements on the chip, for which conventional device architectures use a combination of two structural elements: \textit{airbridges} to connect non-adjacent elements in the base layer, and \textit{bandages} to connect the electrodes forming the Josephson junctions to the base layer. Bandages introduce unwanted parasitic material interfaces and increase the manufacturing complexity. Here, we overcome the limitations imposed by \emph{bandages} by establishing \textit{all} electrical interconnects with airbridges of varying size fabricated in a single step. The airbridges show a high yield and mechanical stability over a wide range of sizes from 0.5 μm0.5\,μ\mathrm{m}0.5μm to 4 μm4\,μ\mathrm{m}4μm in width and from 5 μm5\,μ\mathrm{m}5μm to 40 μm40\,μ\mathrm{m}40μm in length, and show low loss when integrated in coplanar waveguide resonators and transmon qubits. Measured relaxation times up to more than 250 μs250\,μ\mathrm{s}250μs in standard transmon geometries show that the process achieves high coherence while substantially easing and accelerating device fabrication.
Superinductors have become a crucial component in the superconducting circuit toolbox, playing a key role in the development of more robust qubits. Enhancing the performance of these devices can be achieved by suspending the superinductors from the substrate, thereby reducing stray capacitance. Here, we present a fabrication framework for constructing superconducting circuits with suspended superinductors in planar architectures. To validate the effectiveness of this process, we systematically characterize both resonators and qubits with suspended arrays of Josephson junctions, ultimately confirming the high quality of the superinductive elements. In addition, this process is broadly compatible with other types of superinductors and circuit designs. Our results not only pave the way for scalable superconducting architectures utilizing superinductors but also provide the primitive for future investigation of loss mechanisms associated with the device substrate.