Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Log inSign up
Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Blog
Job Board
Q3AS

© 2026 Aqora Quantum S.A.S.

TermsPrivacyLegal Notice

arXiv:2501.03343 · IEEE Transactions on Applied Superconductivity

Characterization of Flux Trapping in and Fabrication of Large-Scale Superconductor Circuits Using AC-Biased Shift Registers With 108 500 Josephson Junctions

Evan B. Golden, Neel Parmar, Vasili K. Semenov, Sergey K. Tolpygo

Published Jan 22, 2025• 6 citations
arXivHTMLPDF

Abstract

A variety of superconductor integrated circuits composed of six ac-powered SFQ shift registers with a total of 27078 bits and 108500 Josephson junctions (JJs) per 5 mm × 5 mm chip have been designed, fabricated, and tested to characterize flux trapping, fabrication process yield, and parameter spread. The six 4513-bit registers in the circuits have a common single-phase ac clock and individual input/output drivers, allowing for their parallel testing. We have investigated flux trapping in the circuits with various geometry, size, distance between moats in active ground planes (GPs), and containing up to three additional ‘dummy’ GPs, using multiple cooldowns through the critical temperature with various cooling rates and residual magnetic fields up to ∼ 1.2 µT. For the slit-type and square moats arrayed along the sides of the register cells, we have found a negligible effect of flux sequestered in the moats on the operating margins of the registers, and a negligible probability of detrimental flux trapping outside of the moats. Circuits with 0.3-µm-wide slit moats occupying less than 2% of the circuit area were fully operational in 100% of cooldowns, supporting the viability of a very large-scale integration of superconductor digital circuits. We have also found a strong enhancement of flux trapping outside the moats in circuits with closely spaced GPs and determined a critical distance,${{{\boldsymbol{t}}}_{\boldsymbol{c}}} \approx $0.6 µm, between them. The presence of two or more GPs spaced below thetcrendered the circuits nonoperational in 100% of cooldowns. We have measured 30 chips with over 3M JJs and determined individual cell operating margins in 138 registers to characterize the fabrication-related parameter spread and detect fabrication defects and flux-trapping events. By finding outlier bit-cells in the statistical distribution of the individual cell margins, we detected about one fabrication defect per million JJs, in most cases causing magnetic flux trapping in the affected cell.The circuits have been fabricated in the SFQ5ee fabrication process at MIT Lincoln Laboratory (MIT LL).

DOI
10.1109/tasc.2025.3530390

Related papers

Characterization of Adiabatic Quantum-Flux-Parametrons in the MIT LL SFQ5ee+ Process

Sergey K. Tolpygo, Evan B. Golden, Christopher Lawrence Ayala +4 more

Adiabatic quantum-flux-parametron (AQFP) superconductor logic is a proven energy-efficient digital technology for various applications. To address the scalability challenges of this technology, we investigated AQFP shift registers with the AQFP footprint area reduced by 25% with respect to prior work and with the >2× denser overall circuit designs obtained by eliminating the previously used free space between the AQFPs. We also investigated AQFP cells with different designs of flux trapping moats in the superconducting ground plane as well as compact AQFP cells that took advantage of the smaller feature sizes available in the new fabrication process, SFQ5ee+, at MIT Lincoln Laboratory (MIT LL). This new process features nine planarized Nb layers with a 0.25 μm minimum linewidth. The fabricated circuits were tested in a liquid He immersion probe and a commercial closed-cycle cryocooler using a controlled cooling rate through the superconducting critical temperature,Tc. Using multiple thermal cycles, we investigated flux trapping in the dense AQFP shift registers as well as in the registers using the old (sparse) AQFP designs at two levels of the residual magnetic field, about 0.53 μT and about 1.2 μT. The sparse designs demonstrated 95% to almost 100% probability of operation after the cooldown and very wide operation margins, although the flux trapping probability was increasing with circuit complexities. The margins were similarly wide in the newer dense designs, but flux trapping probability that rendered the registers nonoperational was significantly, by an order of magnitude, higher in these denser circuits and was also very sensitive to the moats' shape and location. Our findings indicate that AQFP circuits are amendable to increasing the scale of integration and further densification, but a careful moat design and optimization are required to reduce flux trapping effects in the dense AQFP circuits.

arXiv:2411.04045•IEEE Transactions on Applied Superconductivity•Jan 6, 2025•6 citations

AC-Biased Shift Registers as Fabrication Process Benchmark Circuits and Flux Trapping Diagnostic Tool

Vasili K. Semenov, Yuri A. Polyakov, Sergey K. Tolpygo

We develop an ac-biased shift register introduced in our previous work (V. K. Semenov et al., IEEE Trans. Appl. Supercond., vol. 25, no. 3, 1301507, June 2015) into a benchmark circuit for evaluation of superconductor electronics fabrication technology. The developed testing technique allows for extracting margins of all individual cells in the shift register, which in turn makes it possible to estimate statistical distribution of Josephson junctions (JJs) in the circuit. We applied this approach to successfully test registers having 8-, 16-, 36-, and 202 thousand cells and, respectively, about 33-, 65-, 144-, and 809 thousand JJs. The circuits were fabricated at MIT Lincoln Laboratory, using a fully planarized process, 0.4-μm inductor linewidth and 1.33 × 106cm-2junction density. They are presently the largest operational superconducting SFQ circuits ever made. The developed technique distinguishes between “hard” defects (fabrication-related) and “soft” defects (measurement-related) and locates them in the circuit. The “soft” defects are specific to superconducting circuits and caused by magnetic flux trapping either inside the active cells or in the dedicated flux-trapping moats near the cells. The number and distribution of “soft” defects depend on the ambient magnetic field and vary with thermal cycling even if done in the same magnetic environment.

arXiv:1701.03837•IEEE Transactions on Applied Superconductivity•Feb 15, 2017•57 citations

Extraction and Simulation of the Impact of Flux Trapping in Moats of AC-Biased Shift Registers

Scott Meninger, Sergey K. Tolpygo

Moats in superconducting ground planes are used to trap magnetic flux away from sensitive parts of superconductor integrated circuits. We simulate the effect of magnetic flux trapped in moats on the operating margins of ac-biased SFQ shift registers (ShReg) with two ground planes for various congruent moat geometries, moat sizes, locations in the ShReg cells, number and polarity of the trapped of fluxons. Using inductance extractor InductEx, we extract mutual couplings between the moats and the ShReg inductors and include them in the refined netlist. Then, we use JoSim to simulate the circuit operation and find the threshold ac clock amplitude above which the register starts to operate correctly. The relative change in this threshold is used to characterize the influence of flux trapping on the circuit operation. Monte-Carlo simulations are used to investigate the effect of the circuit parameter variations on the statistics of the threshold, using the standard deviation of the Josephson junction critical current and of the circuit inductance extracted from the fabrication process control monitors. The obtained distributions are compared with the independently measured distributions of the threshold amplitude for the individual cells of ac-biased shift registers with 108,500 Josephson junctions. The results show that flux trapping in properly designed moats have a very small effect on the operation margins of the large-scale shift registers whereas the main contribution to the cell-to-cell variation of the threshold comes from the variation of the junctions' critical currents.

arXiv:2411.02749•Nov 5, 2024•0 citations

Extraction and Simulation of the Impact of Flux Trapping in Moats on AC-Biased Shift Registers

Scott Meninger, Sergey K. Tolpygo

Moats in superconducting ground planes are used to trap magnetic flux away from sensitive parts of superconductor integrated circuits. We simulate the effect of magnetic flux trapped in moats on the operating margins of ac-biased SFQ shift registers (ShReg) with two ground planes for various congruent moat geometries, moat sizes, locations in the ShReg cells, number and polarity of the trapped fluxons. Using inductance extractor InductEx, we extract mutual couplings between the moats and the ShReg inductors and include them in the refined netlist. Then we use JoSim to simulate the circuit operation and find the threshold ac clock amplitude above which the register starts to operate correctly. The relative change in this threshold is used to characterize the influence of flux trapping on the circuit operation. Monte-Carlo simulations are used to investigate the effect of the circuit parameter variations on the statistics of the threshold, using the standard deviation of the Josephson junction critical current and of the circuit inductance extracted from the fabrication process control monitors. The obtained distributions are compared with the independently measured distributions of the threshold amplitude for the individual cells of an ac-biased shift registers with 108,500 Josephson junctions. The results show that flux trapping in properly designed moats has a very small effect on the operation margins of the large-scale shift registers, whereas the main contribution to the cell-to-cell variation of the threshold comes from the variation of the junctions’ critical currents.

IEEE Transactions on Applied Superconductivity•Jan 15, 2025•2 citations

Increasing integration scale of superconductor electronics beyond one million Josephson junctions

Sergey K. Tolpygo, Vasili K. Semenov

Abstract We review the existing fabrication processes for superconductor digital electronics and describe approaches to increasing the scale of integration of superconducting digital circuits from the current level of about one million Josephson junctions (JJs) on a 1-cm 2 chip toward ten million JJs per chip. We present designs of ac-clocked Single Flux Quantum (SFQ) shift registers, convenient benchmarking circuits, in a 250-nm-linewidth superconductor electronics fabrication process developed recently at MIT Lincoln Laboratory (MIT LL). For shift registers using resistively shunted JJs with Josephson critical current density, J c of 100 μA/μm 2 , we achieved a record-high circuit density of 4.2·10 6 JJs per cm 2 , a factor of three higher than the previous record obtained in the MIT LL 350-nm-linewidth SFQ5ee process. Using self-shunted JJs with J c of 600 μA/μm 2 , we increased this record circuit density to 7.4·10 6 JJs per cm 2 .

Journal of Physics Conference Series•Jun 1, 2020•35 citations

Reproducible operating margins on a 72 800-device digital superconducting chip

Quentin Herr, Joshua Osborne, M. J. A. Stoutimore +6 more

Abstract We report the design and test of reciprocal quantum logic shift-register yield vehicles consisting of up to 72 800 Josephson junction devices per die, the largest digital superconducting circuits ever reported. Multiple physical layout styles were matched to the MIT Lincoln Laboratory foundry, which supports processes with both four and eight metal layers and minimum feature size of 0.5 μ m. The largest individual circuits with 40 400 junctions indicate large operating margins of ±20% on ac clock amplitude. In one case the data were reproducible to the accuracy of the measurement, ±1% across five thermal cycles using only the rudimentary precautions of passive mu-metal magnetic shielding and a controlled cool-down rate of 3 mK s −1 in the test fixture. We conclude that with proper mitigation techniques, flux-trapping is no longer a limiting consideration for very-large-scale-integration of superconductor digital logic.

arXiv:1510.01220•Superconductor Science and Technology•Oct 28, 2015•31 citations
A variety of superconductor integrated circuits composed of six ac-powered SFQ shift registers with a total of 27078 bits and 108500 Josephson junctions (JJs) per 5 mm × 5 mm chip have been designed, fabricated, and tested to characterize flux trapping, fabrication process yield, and parameter spread. The six 4513-bit registers in the circuits have a common single-phase ac clock and individual input/output drivers, allowing for their parallel testing. We have investigated flux trapping in the circuits with various geometry, size, distance between moats in active ground planes (GPs), and containing up to three additional ‘dummy’ GPs, using multiple cooldowns through the critical temperature with various cooling rates and residual magnetic fields up to ∼ 1.2 µT. For the slit-type and square moats arrayed along the sides of the register cells, we have found a negligible effect of flux sequestered in the moats on the operating margins of the registers, and a negligible probability of detrimental flux trapping outside of the moats. Circuits with 0.3-µm-wide slit moats occupying less than 2% of the circuit area were fully operational in 100% of cooldowns, supporting the viability of a very large-scale integration of superconductor digital circuits. We have also found a strong enhancement of flux trapping outside the moats in circuits with closely spaced GPs and determined a critical distance,tc≈{{{\boldsymbol{t}}}_{\boldsymbol{c}}} \approx tc​≈0.6 µm, between them. The presence of two or more GPs spaced below thetcrendered the circuits nonoperational in 100% of cooldowns. We have measured 30 chips with over 3M JJs and determined individual cell operating margins in 138 registers to characterize the fabrication-related parameter spread and detect fabrication defects and flux-trapping events. By finding outlier bit-cells in the statistical distribution of the individual cell margins, we detected about one fabrication defect per million JJs, in most cases causing magnetic flux trapping in the affected cell.The circuits have been fabricated in the SFQ5ee fabrication process at MIT Lincoln Laboratory (MIT LL).
Adiabatic quantum-flux-parametron (AQFP) superconductor logic is a proven energy-efficient digital technology for various applications. To address the scalability challenges of this technology, we investigated AQFP shift registers with the AQFP footprint area reduced by 25% with respect to prior work and with the >2× denser overall circuit designs obtained by eliminating the previously used free space between the AQFPs. We also investigated AQFP cells with different designs of flux trapping moats in the superconducting ground plane as well as compact AQFP cells that took advantage of the smaller feature sizes available in the new fabrication process, SFQ5ee+, at MIT Lincoln Laboratory (MIT LL). This new process features nine planarized Nb layers with a 0.25 μm minimum linewidth. The fabricated circuits were tested in a liquid He immersion probe and a commercial closed-cycle cryocooler using a controlled cooling rate through the superconducting critical temperature,Tc. Using multiple thermal cycles, we investigated flux trapping in the dense AQFP shift registers as well as in the registers using the old (sparse) AQFP designs at two levels of the residual magnetic field, about 0.53 μT and about 1.2 μT. The sparse designs demonstrated 95% to almost 100% probability of operation after the cooldown and very wide operation margins, although the flux trapping probability was increasing with circuit complexities. The margins were similarly wide in the newer dense designs, but flux trapping probability that rendered the registers nonoperational was significantly, by an order of magnitude, higher in these denser circuits and was also very sensitive to the moats' shape and location. Our findings indicate that AQFP circuits are amendable to increasing the scale of integration and further densification, but a careful moat design and optimization are required to reduce flux trapping effects in the dense AQFP circuits.
We develop an ac-biased shift register introduced in our previous work (V. K. Semenov et al., IEEE Trans. Appl. Supercond., vol. 25, no. 3, 1301507, June 2015) into a benchmark circuit for evaluation of superconductor electronics fabrication technology. The developed testing technique allows for extracting margins of all individual cells in the shift register, which in turn makes it possible to estimate statistical distribution of Josephson junctions (JJs) in the circuit. We applied this approach to successfully test registers having 8-, 16-, 36-, and 202 thousand cells and, respectively, about 33-, 65-, 144-, and 809 thousand JJs. The circuits were fabricated at MIT Lincoln Laboratory, using a fully planarized process, 0.4-μm inductor linewidth and 1.33 × 106cm-2junction density. They are presently the largest operational superconducting SFQ circuits ever made. The developed technique distinguishes between “hard” defects (fabrication-related) and “soft” defects (measurement-related) and locates them in the circuit. The “soft” defects are specific to superconducting circuits and caused by magnetic flux trapping either inside the active cells or in the dedicated flux-trapping moats near the cells. The number and distribution of “soft” defects depend on the ambient magnetic field and vary with thermal cycling even if done in the same magnetic environment.
Moats in superconducting ground planes are used to trap magnetic flux away from sensitive parts of superconductor integrated circuits. We simulate the effect of magnetic flux trapped in moats on the operating margins of ac-biased SFQ shift registers (ShReg) with two ground planes for various congruent moat geometries, moat sizes, locations in the ShReg cells, number and polarity of the trapped of fluxons. Using inductance extractor InductEx, we extract mutual couplings between the moats and the ShReg inductors and include them in the refined netlist. Then, we use JoSim to simulate the circuit operation and find the threshold ac clock amplitude above which the register starts to operate correctly. The relative change in this threshold is used to characterize the influence of flux trapping on the circuit operation. Monte-Carlo simulations are used to investigate the effect of the circuit parameter variations on the statistics of the threshold, using the standard deviation of the Josephson junction critical current and of the circuit inductance extracted from the fabrication process control monitors. The obtained distributions are compared with the independently measured distributions of the threshold amplitude for the individual cells of ac-biased shift registers with 108,500 Josephson junctions. The results show that flux trapping in properly designed moats have a very small effect on the operation margins of the large-scale shift registers whereas the main contribution to the cell-to-cell variation of the threshold comes from the variation of the junctions' critical currents.
Moats in superconducting ground planes are used to trap magnetic flux away from sensitive parts of superconductor integrated circuits. We simulate the effect of magnetic flux trapped in moats on the operating margins of ac-biased SFQ shift registers (ShReg) with two ground planes for various congruent moat geometries, moat sizes, locations in the ShReg cells, number and polarity of the trapped fluxons. Using inductance extractor InductEx, we extract mutual couplings between the moats and the ShReg inductors and include them in the refined netlist. Then we use JoSim to simulate the circuit operation and find the threshold ac clock amplitude above which the register starts to operate correctly. The relative change in this threshold is used to characterize the influence of flux trapping on the circuit operation. Monte-Carlo simulations are used to investigate the effect of the circuit parameter variations on the statistics of the threshold, using the standard deviation of the Josephson junction critical current and of the circuit inductance extracted from the fabrication process control monitors. The obtained distributions are compared with the independently measured distributions of the threshold amplitude for the individual cells of an ac-biased shift registers with 108,500 Josephson junctions. The results show that flux trapping in properly designed moats has a very small effect on the operation margins of the large-scale shift registers, whereas the main contribution to the cell-to-cell variation of the threshold comes from the variation of the junctions’ critical currents.
Abstract We review the existing fabrication processes for superconductor digital electronics and describe approaches to increasing the scale of integration of superconducting digital circuits from the current level of about one million Josephson junctions (JJs) on a 1-cm 2 chip toward ten million JJs per chip. We present designs of ac-clocked Single Flux Quantum (SFQ) shift registers, convenient benchmarking circuits, in a 250-nm-linewidth superconductor electronics fabrication process developed recently at MIT Lincoln Laboratory (MIT LL). For shift registers using resistively shunted JJs with Josephson critical current density, J c of 100 μA/μm 2 , we achieved a record-high circuit density of 4.2·10 6 JJs per cm 2 , a factor of three higher than the previous record obtained in the MIT LL 350-nm-linewidth SFQ5ee process. Using self-shunted JJs with J c of 600 μA/μm 2 , we increased this record circuit density to 7.4·10 6 JJs per cm 2 .
Abstract We report the design and test of reciprocal quantum logic shift-register yield vehicles consisting of up to 72 800 Josephson junction devices per die, the largest digital superconducting circuits ever reported. Multiple physical layout styles were matched to the MIT Lincoln Laboratory foundry, which supports processes with both four and eight metal layers and minimum feature size of 0.5 μ m. The largest individual circuits with 40 400 junctions indicate large operating margins of ±20% on ac clock amplitude. In one case the data were reproducible to the accuracy of the measurement, ±1% across five thermal cycles using only the rudimentary precautions of passive mu-metal magnetic shielding and a controlled cool-down rate of 3 mK s −1 in the test fixture. We conclude that with proper mitigation techniques, flux-trapping is no longer a limiting consideration for very-large-scale-integration of superconductor digital logic.