Post-fabrication frequency trimming of coplanar-waveguide resonators in circuit QED quantum processors
S. Vallés-Sanclemente, S. L. M. van der Meer, Matvey I. Finkel, Nandini Muthusubramanian, Marc Beekman, Hany A. Ali, Jorge Marques, Christos Zachariadis, H. M. Veen, Thijs Stavenga, Nadia Haider, L. DiCarlo
We present the use of a set of airbridges to trim the frequency of microwave coplanar-waveguide (CPW) resonators post-fabrication. This method is compatible with the fabrication steps of conventional CPW airbridges and crossovers and increases device yield by allowing compensation of design and fabrication uncertainty with 100 MHz range and 10 MHz resolution. We showcase two applications in circuit QED. The first is the elimination of frequency collisions between resonators intended to readout different transmons by frequency-division multiplexing. The second is frequency matching of readout and Purcell-filter resonator pairs. Combining this matching with transmon frequency trimming by laser annealing reliably achieves fast and high-fidelity readout across 17-transmon quantum processors.
We present the use of a set of airbridges to trim the frequency of microwave coplanar-waveguide (CPW) resonators post-fabrication. This method is compatible with the fabrication steps of conventional CPW airbridges and crossovers and increases device yield by allowing compensation of design and fabrication uncertainty with 100 MHz range and 10 MHz resolution. We showcase two applications in circuit QED. The first is the elimination of frequency collisions between resonators intended to readout different transmons by frequency-division multiplexing. The second is frequency matching of readout and Purcell-filter resonator pairs. Combining this matching with transmon frequency trimming by laser annealing reliably achieves fast and high-fidelity readout across 17-transmon quantum processors.
Abstract Dielectric losses are one of the key factors limiting the coherence of superconducting qubits. The impact of materials and fabrication steps on dielectric losses can be evaluated using coplanar waveguide (CPW) microwave resonators. Here, we report on superconducting CPW microwave resonators with internal quality factors systematically exceeding 5 × 106 at high powers and 2 × 106 (with the best value of 4.4 × 106) at low power. Such performance is demonstrated for 100-nm-thick aluminum resonators with 7–10.5 um center trace on high-resistivity silicon substrates commonly used in Josephson-junction based quantum circuit. We investigate internal quality factors of the resonators with both dry and wet aluminum etching, as well as deep and isotropic reactive ion etching of silicon substrate. Josephson junction compatible CPW resonators fabrication process with both airbridges and silicon substrate etching is proposed. Finally, we demonstrate the effect of airbridges’ positions and extra process steps on the overall dielectric losses. The best quality factors are obtained for the wet etched aluminum resonators and isotropically removed substrate with the proposed ultrasonic metal edge microcutting.
Abstract The coplanar waveguide (CPW) microwave resonators have been widely applied for solid-state quantum computation and single-photon detection. Based on the physical analysis for the high fidelity readouts of the qubit(s), in this paper we design and then fabricate accordingly the desired aluminum (Al) film quarter-wavelength resonators on sapphire substrates. The ultra-low temperature measurement results show that the linearity of the internal quality factor under the proper driving power is satisfied well for the high fidelity readouts of the qubit(s); and the phase- and amplitude fractional frequency noises are significantly less for avoiding the potential information false alarms of the detected qubit during the readouts. With the demonstrated qubit-resonator experimental parameters, we argue that the designed and fabricated quarter-wavelength CPW resonators, with optimized parameters, can be used to implement the desired weakly perturbing readout measurements of the solid-state qubits on-chip.
Coplanar Waveguides (CPW) are ideally suited for coherently interfacing resonators with superconducting qubits. However, integrating CPWs with circuit elements on quantum chips involves curvature and discontinuities of the central conductors and corresponding ground planes, which may generate undesired parasitic modes. Experiments have demonstrated that air-bridges can effectively suppress this unwanted effect. Nevertheless, as quantum processors increase in size, manual air-bridge placement on the chip layout becomes increasingly time-consuming and error-prone. Automation of this process is therefore highly desirable, especially when the center line (channel) of the CPWs is not pre-established. In this paper we propose a parametric EDA method for coplanar waveguide channel identification and air-bridge construction in quantum chips. Our approach applies to both separated and full-package air-bridges and scales efficiently, with running time linear in the number of points and quadratic in the number of arcs in the corresponding chip layout. We evaluate our approach on a set of open-source quantum chip layouts, generating air-bridges in times ranging from 0.05 to 0.5 seconds—a practical speedup of over 10,000 times compared to manual generation. Furthermore, We propose two original quantitative metrics, accuracy and overlap, and verify that our method yields reliable results, producing air-bridges in the required shapes and locations. We fabricate a 13-qubit chip using our method for air-bridge placement, and observe excellent performance with minimal microwave and flux crosstalk. This research enables rapid generation of air-bridges when CPW channels are not pre-specified, paving the way for more flexible, automated, and modular design of superconducting quantum EDA.
High quality on-chip microwave resonators have recently found prominent new applications in quantum optics and quantum information processing experiments with superconducting electronic circuits, a field now known as circuit quantum electrodynamics (QED). They are also used as single photon detectors and parametric amplifiers. Here we analyze the physical properties of coplanar waveguide resonators and their relation to the materials properties for use in circuit QED. We have designed and fabricated resonators with fundamental frequencies from 2 to 9 GHz and quality factors ranging from a few hundreds to a several hundred thousands controlled by appropriately designed input and output coupling capacitors. The microwave transmission spectra measured at temperatures of 20 mK are shown to be in good agreement with theoretical lumped element and distributed element transmission matrix models. In particular, the experimentally determined resonance frequencies, quality factors, and insertion losses are fully and consistently explained by the two models for all measured devices. The high level of control and flexibility in design renders these resonators ideal for storing and manipulating quantum electromagnetic fields in integrated superconducting electronic circuits.
In this paper, we present a novel design of a compact, double-fold half-wave superconducting coplanar waveguide resonator, specifically optimized for quantum readout. The geometry offers advantages in terms of scalability and allows for a more compact integration of qubits per unit area. The superconducting resonators are designed to operate within a fundamental frequency range of 1.9 GHz$-1.95GHz,utilizingbothgapandfingercouplingschemes.Thedevicesarefabricatedusingthinaluminumfilmsdepositedonhigh−resistivitysapphiresubstrates.Theproposedresonatorsexhibitqualityfactor(Q_{L})of2.9× 10^{5}$and 1.58 ×103for gap coupled and finger coupled, respectively, during experimental measurements. The simulated QLof single-folded meander line resonators are found to be 4.65 ×105and 258.42, for gap coupled and finger coupled, respectively, for comparison purpose at similar operating frequency. A comprehensive analysis of the microwave transmission spectra was conducted at cryogenic temperatures near 10 mK, across very high input drive powers ($-30dBmto-10dBm).Experimentalresultsshowagoodagreementwithsimulationsandtheequivalentlumpedcircuitmodel.Notably,theproposeddesignreducesthephysicalfootprintoftheresonatordevicesupto28.2\%comparedtoconventionalsingle−foldmeanderedstructures.TheresonatorsdemonstratestrongpotentialforintegratingqubitswithreadoutandcontrolbusesinquantuminformationprocessingwhichrequireaQ_{L}$between104−105. They also being well-suited for cryogenic detector applications that utilize microwave kinetic inductance detector (MKID) arrays in frequency multiplexing for different coupling schemes.
Superconducting quantum chips commonly utilize quarter-wavelength (λ/4) transmission line resonators as readout circuits. An analytical model for the accurate determination of resonance frequencies and coupling Q-factors of feedline-coupled superconducting resonators is introduced. The model leverages four-port microwave network analysis, integrating boundary conditions and conformal mapping techniques to compute even- and odd-mode impedances in edge-coupled coplanar waveguide (CPW) structures. Its versatility allows application to both planar and 3-D heterogeneous architectures, making it a powerful tool for resonator design. To validate the model, a test chip with λ/4 resonators of varying geometries is fabricated and measured in a cryogenic environment. Comparisons with finite element method (FEM) simulations and experimental measurements confirm the model's accuracy, with resonance frequencies and coupling Q-factors aligning closely across configurations. This proposed model facilitates the design of superconducting resonators in readout circuits for more effective, scalable, and adaptable quantum computing architectures.