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arXiv:2301.00400

High-resistivity niobium nitride films for unity-efficiency SMSPDs at telecom wavelengths and beyond

Philipp I. Zolotov, S. Svyatodukh, Alexander V. Divochiy, Vitaliy Seleznev, Gregory N Gol'tsman

Published Jan 1, 2023• 1 citation
arXivHTMLPDF

Abstract

The sensitive element of superconducting single-photon detectors made in the form of a microstrip promise to resolve significant limitations caused by their typical design. However, attention should be paid to the problem of deterioration of the detection efficiency of devices with an increase of the width of the superconducting strip from nano- to microscale. This article demonstrates a possibility of achieving highly saturated detection efficiency of superconducting microstrip single-photon detectors by using high-resistivity niobium nitride films. The approach opens the way for employing fundamentally improved experimental devices.

DOI
10.48550/arxiv.2301.00400

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The sensitive element of superconducting single-photon detectors made in the form of a microstrip promise to resolve significant limitations caused by their typical design. However, attention should be paid to the problem of deterioration of the detection efficiency of devices with an increase of the width of the superconducting strip from nano- to microscale. This article demonstrates a possibility of achieving highly saturated detection efficiency of superconducting microstrip single-photon detectors by using high-resistivity niobium nitride films. The approach opens the way for employing fundamentally improved experimental devices.
Incorporating a micrometer scale strip as the sensitive element in superconducting single-photon detectors can lead to significant improvements in their speed, footprint, and fabrication yield. However, the current application of microstrips has resulted in a decline in the detectors' intrinsic detection efficiency. We address this issue through the utilization of niobium nitride films with high values of resistance per square. Notably, the films used in our study possess an important characteristic of retaining high critical temperature values, which enables the devices to operate in conventional closed-cycle cryostats.
Generally, a superconducting nanowire single-photon detector (SNSPD) is composed of wires with a typical width of ∼ 100 nm . Recent studies have found that superconducting strips with a micrometer-scale width can also detect single photons. Compared with the SNSPD covering the same area, the superconducting microstrip single-photon detector (SMSPD) has smaller kinetic inductance, higher working current, and lower requirements in fabrication accuracy, providing potential applications in the development of ultralarge active area detectors. However, the study of SMSPD is still in its infancy, and the realization of its high-performance and practical use remains an open question. This study demonstrates a NbN SMSPD with a nearly saturated system detection efficiency (SDE) of ∼ 92.2 % at a dark count rate of ∼ 200 cps , a polarization sensitivity of ∼ 1.03 , and a minimum timing jitter of ∼ 48 ps at the telecom wavelength of 1550 nm when coupled with a single-mode fiber and operated at 0.84 K. Furthermore, the detector’s SDE is over 70% when operated at a 2.1 K closed-cycle cryocooler.
Superconducting microstrips single-photon detectors (SMSPDs) are a novel type of single-photon sensor based on superconducting thin films patterned into micrometer-scale strip widths. Compared with superconducting nanowire single-photon detectors (SNSPDs), SMSPDs not only substantially lower the fabrication dependence on high-precision electron-beam lithography, but also exhibit lower kinetic inductance, higher bias current, and weaker polarization sensitivity. These advantages pave a new route toward superconducting single-photon detection systems with large active areas and low dark-count rates. Because of their performance, SMSPDs exhibit tremendous application potential in cutting-edge fields such as quantum communication, LiDAR, dark-matter searches, and high-energy particle detection. Accordingly, this paper provides a systematic review of recent advances in SMSPD research, covering the underlying physical mechanisms, material systems, geometrical design, readout circuitry, and application domains. Firstly, this review elaborates on the photon response mechanism of SMSPDs and clarifies its correlation with vortex dynamics. Secondly, this review categorizes the superconducting materials used for SMSPD fabrication and analyzes the influences of characteristic thin-film parameters on device performance. Furthermore, this work concludes the evolution and optimization strategies of geometrical design and readout circuit schemes for SMSPDs, and presents the current application status. Finally, we offer perspectives on its future development trajectory. This review provides a foundation in physical mechanisms and design guidance for the development of large active area SMSPDs with high efficiency and low dark counts.
Superconducting microstrip single photon detectors (SMSPDs) are increasingly attracting the interest of the scientific community as a new platform for large area detectors with unprecedented advantaged in terms of fabrication. However, while their operativity at the telecommunication wavelength was achieved, working beyond 1.55 µm is challenging. Here, we experimentally demonstrate single-photon operation of NbRe microstrips at wavelengths of 1.55 and 2 µm. The devices are structured as pairs of parallel microstrips with widths ranging from 1.4 to 2.2 μm and lengths from 5 to 10 μm. This innovative design may assure large sensitive areas, without affecting the kinetic inductance, namely the time performance of the detectors. The results are discussed in the framework of the hot-spot two-temperature model.
At the present time, ultrahigh performance superconducting nanowire single-photon detectors are the key elements in a variety of devices from biological research to quantum communications and computing. Accurate tuning of superconducting material properties is a powerful resource for fabricating single-photon detectors with desired properties. Here, we report on the major theoretical relations between ultrathin niobium nitride (NbN) film properties and superconducting nanowire single-photon detector characteristics, as well as the dependence of ultrathin NbN film properties on reactive magnetron sputtering recipes. Based on this study, we formulate the exact requirements for ultrathin NbN films for ultrahigh performance superconducting nanowire single-photon detectors. Then, we experimentally studied the properties of ultrathin NbN films (morphology, crystalline structure, critical temperature, and sheet resistance) on silicon, sapphire, silicon dioxide, and silicon nitride substrates sputtered with various recipes. We demonstrate ultrathin NbN films (obtained with more than 100 films deposition) with a wide range of critical temperature from 2.5 to 12.1 K and sheet resistance from 285 to 2000 Ω/sq and report a sheet resistance evolution of more than 40% within two years. Finally, we found out that one should use ultrathin NbN films with a specific critical temperature near 9.5 K and a sheet resistance of about 350 Ω/sq for ultrahigh performance state-of-the-art superconducting nanowire single-photon detectors at 1550 nm wavelength.
Superconducting microstrip single-photon detectors (SMSPDs) with near-infrared sensitivity have significant advantages in terms of high quantum efficiency and low dark counts in a large active area. Hole-patterned superconductor microstrips have been reported for fast and efficient single-photon detection. In this work, we fabricated and characterized hole-patterned microstrips with different hole diameters on 5 nm thick MoSi films and an area of 500 × 500 μm2. We observed that the count rate curves of detectors 2 and 3 with holes tend to saturate slightly, whereas those of detector 1 without holes do not. Furthermore, the dark count is similar between detector 1 without holes and detector 2 with small holes and much lower than that of detector 3 with large holes. These experiments indicate that a proper hole is beneficial for efficiency without increasing the dark count rate.