Microwave Kinetic Inductance Detector (MKID) arrays are currently being developed and deployed for astronomical applications in the visible and near infrared and for sub-millimetre astronomy. One of the main challenges of MKIDs is that large arrays would exhibit a pixel yield, defined as the percentage of individually distinguishable pixels to the total number of pixels, of 75 80 %.1 Imperfections arising during the fabrication can induce an uncontrolled shift in the resonance frequency of individual resonators which end up resonating at the same frequency of a different resonator. This makes a number of pixels indistinguishable and therefore unusable for imaging. This paper proposes an approach to individually re-tune the colliding resonators in order to remove the degeneracy and increase the number of MKIDs with unique resonant frequencies. The frequency re-tuning is achieved through a DC bias of the resonator since the kinetic inductance of a superconducting thin film is current dependent and its dependence is non linear. Even though this approach has been already proposed,2 our innovative pixel design may solve two issues previously described in literature such as non-negligible electromagnetic losses to the DC bias line, and the multiplexibility of multiple resonators on a single feed-line.
Microwave Kinetic Inductance Detector (MKID) arrays are currently being developed and deployed for astronomical applications in the visible and near infrared and for sub-millimetre astronomy. One of the main challenges of MKIDs is that large arrays would exhibit a pixel yield, defined as the percentage of individually distinguishable pixels to the total number of pixels, of 75 80 %.1 Imperfections arising during the fabrication can induce an uncontrolled shift in the resonance frequency of individual resonators which end up resonating at the same frequency of a different resonator. This makes a number of pixels indistinguishable and therefore unusable for imaging. This paper proposes an approach to individually re-tune the colliding resonators in order to remove the degeneracy and increase the number of MKIDs with unique resonant frequencies. The frequency re-tuning is achieved through a DC bias of the resonator since the kinetic inductance of a superconducting thin film is current dependent and its dependence is non linear. Even though this approach has been already proposed,2 our innovative pixel design may solve two issues previously described in literature such as non-negligible electromagnetic losses to the DC bias line, and the multiplexibility of multiple resonators on a single feed-line.
We present results from completely lithographic antenna-coupled Microwave Kinetic Inductance detectors (MKIDs). MKIDs are superconducting resonators with resonant frequency and quality-factor which are highly sensitive to changes in the density of the quasiparticle population which occurs when photons above the superconducting gap energy are absorbed. The resonators are coupled to submm light through on-chip phased-array slot antennas. Each planar antenna consists of an array of N long slots which are fed along their length at M points. The resulting N*M feed points are combined in-phase using a binary summing tree made of low-loss superconducting microstrip lines. Due to its large size, the resulting planar antenna produces a narrow beam pattern and can therefore be used without additional optical coupling elements such as feedhorns or substrate lenses. The output of the antenna is a single superconducting thin-film microstrip line which can be efficiently coupled to one (or more) kinetic inductance coplanar waveguide resonators to produce a single (or multi-color) pixel in an imaging focal plane array, using in-line lumped element lithographic band-pass filters. Such highly integrated architectures can be easily fabricated on a single substrate, and many detectors can be frequency multiplexed through coupling to a single feedline. Microwave readout provides a lot of bandwidth per detector, allowing a large number of pixels to be read using a single cryogenic microwave amplifier and warm readout electronics.
Superconducting microwave resonators have the potential to revolutionize submillimeter and far-infrared astronomy, and with it our understanding of the universe. The field of low-temperature detector technology has reached a point where extremely sensitive devices like transition-edge sensors are now capable of detecting radiation limited by the background noise of the universe. However, the size of these detector arrays are limited to only a few thousand pixels. This is because of the cost and complexity of fabricating large-scale arrays of these detectors that can reach up to 10 lithographic levels on chip, and the complicated SQUID-based multiplexing circuitry and wiring for readout of each detector. In order to make substantial progress, next- generation ground-based telescopes such as CCAT or future space telescopes require focal planes with large-scale detector arrays of 104–106 pixels. Arrays using microwave kinetic inductance detectors (MKID) are a potential solution. These arrays can be easily made with a single layer of superconducting metal film deposited on a silicon substrate and pattered using conventional optical lithography. Furthermore, MKIDs are inherently multiplexable in the frequency domain, allowing ∼ 103 detectors to be read out using a single coaxial transmission line and cryogenic amplifier, drastically reducing cost and complexity. An MKID uses the change in the microwave surface impedance of a superconducting thin-film microresonator to detect photons. Absorption of photons in the superconductor breaks Cooper pairs into quasiparticles, changing the complex surface impedance, which results in a perturbation of resonator frequency and quality factor. For excitation and readout, the resonator is weakly coupled to a transmission line. The complex amplitude of a microwave probe signal tuned on-resonance and transmitted on the feedline past the resonator is perturbed as photons are absorbed in the superconductor. The perturbation can be detected using a cryogenic amplifier and subsequent homodyne mixing at room temperature. In an array of MKIDs, all the resonators are coupled to a shared feedline and are tuned to slightly different frequencies. They can be read out simultaneously using a comb of frequencies generated and measured using digital techniques. This thesis documents an effort to demonstrate the basic operation of ∼ 256 pixel arrays of lumped-element MKIDs made from superconducting TiNx on silicon. The resonators are designed and simulated for optimum operation. Various properties of the resonators and arrays are measured and compared to theoretical expectations. A particularly exciting observation is the extremely high quality factors (∼ 3 × 107) of our TiNx resonators which is essential for ultra-high sensitivity. The arrays are tightly packed both in space and in frequency which is desirable for larger full-size arrays. However, this can cause a serious problem in terms of microwave crosstalk between neighboring pixels. We show that by properly designing the resonator geometry, crosstalk can be eliminated; this is supported by our measurement results. We also tackle the problem of excess frequency noise in MKIDs. Intrinsic noise in the form of an excess resonance frequency jitter exists in planar superconducting resonators that are made on dielectric substrates. We conclusively show that this noise is due to fluctuations of the resonator capacitance. In turn, the capacitance fluctuations are thought to be driven by two-level system (TLS) fluctuators in a thin layer on the surface of the device. With a modified resonator design we demonstrate with measurements that this noise can be substantially reduced. An optimized version of this resonator was designed for the multiwavelength submillimeter kinetic inductance camera (MUSIC) instrument for the Caltech Submillimeter Observatory.
We present a method of spatially mapping microwave kinetic inductance detector (MKID) arrays, in a dark setup. MKIDs are superconducting natively multiplexed resonators which enable kilopixel arrays, such as for the proposed Probe far-Infrared Mission for Astrophysics (PRIMA). In such telescope applications one must map the spatial location of each MKID with their individual resonance frequencies. Traditional LED arrays or beam-mapping methods become increasingly difficult as pixel spacing decreases, e.g., 900μm separated MKIDs in the spectrometer module of PRIMA. Our new mapping technique uses a cryogenic interferometer in reflection mode. As on-resonance signals reflect from an MKID, they accrue a phase proportional to the path-length, exactly corresponding to their physical distance on the feedline. Specifically, we use a superconducting transmission line that has nonlinear kinetic inductance. The slow-wave structure of this nonlinear device is designed to have a signal speed of 0.64% the speed of light, enabling a compact system. Current biasing this line allows for varying the wave speed and ensuring that the phase measured is periodic within a nulling interferometric mode. Using this setup, we measure a length ordering that reflects the bimodal MKID distribution of a 44 pixel array of MKIDs designed for PRIMA which contains the same spacing as the final kilopixel array design.
Spectroscopic observations of a large number of galaxies in the far-infrared are critical in the study of galaxy evolution. These observations are difficult at the moment, because of the lack of good far-infrared (FIR) detector technology. Microwave Kinetic Inductance Detectors (MKIDs) are showing promising results to fill this void. A common MKID design is the antenna-coupled coplanar waveguide (CPW) resonator patterned in a superconducting film. These resonators are extremely sensitive to changes in the Cooper pair density. FIR photons are energetic enough to break Cooper pairs. This means a superconducting resonator can be used as a pixel for a FIR camera. The inherent multiplexing advantage of MKIDs means they can easily be fabricated in arrays of up to 5000 pixels. By putting such an array in the SAFARI instrument on the cooled SPICA telescope a blind spectroscopic survey that can detect Milky Way sized galaxies out to redshift z = 2 will be possible. However, to achieve background limited performance on a cooled telescope like SPICA the sensivity of MKIDs needs to be improved by at least an order of magnitude. This project aims to investigate if this can be achieved by reducing the width of the CPW to much below what has typically been made using optical lithography (> 1 ?m). CPW resonators with a central line width as narrow as 300 nm were made in NbTiN using electron beam lithography and reactive ion etching. Using this fabrication method NbTiN resonators with a central line width varying between 0.3 ?m and 3 ?m were made. These resonators were used to do a systematic study of the width dependence of the kinetic inductance fraction, quality factor, responsivity, read-out power, noise and NEP. It is shown that the width dependence of all these properties does not change down to 300 nm. Encouraged by these results two prototype submicron pixel arrays were made in aluminum. These showed sensitivities comparable to resonators with a few micron wide CPW. The main reason for this lack of sensitivity improvement is the lower maximum read-out power of submicron wide aluminum resonators. Based on these results power handling seems a key issue that will determine if submicron resonators are a viable route to improve the MKIDs sensitivity. These results of this project indicate that aluminum has a different width dependence of its power handling compared to NbTiN. Therefore, a systematic study of submicron resonators in aluminum, which focuses on the power handling, is required.
Microwave kinetic inductance detector (MKID) provides a way to build large ground-based sub-mm instruments such as NIKA and A-MKID. For such instruments, therefore, it is important to understand and characterize the response to ensure good linearity and calibration over a wide dynamic range. We propose to use the MKID readout frequency response to determine the MKID responsivity to an input optical source power. A signal can be measured in a KID as a change in the phase of the readout signal with respect to the KID resonant circle. Fundamentally, this phase change is due to a shift in the KID resonance frequency, in turn due to a radiation induced change in the quasiparticle number in the superconducting resonator. We show that the shift in resonant frequency can be determined from the phase shift by using KID phase versus frequency dependence using a previously measured resonant frequency. Working in this calculated resonant frequency, we gain near linearity and constant calibration to a constant optical signal applied in a wide range of operating points on the resonance and readout powers. This calibration method has three particular advantages: first, it is fast enough to be used to calibrate large arrays, with pixel counts in the thousands of pixels; second, it is based on data that are already necessary to determine KID positions; third, it can be done without applying any optical source in front of the array.
We have fabricated 2024 pixel microwave kinetic inductance detector (MKID) arrays in the ultraviolet/optical/ near-IR (UVOIR) regime that are currently in use in astronomical instruments. In order to make MKIDs desirable for novel instruments, larger arrays with nearly perfect yield need to be fabricated. As array size increases, however, the percent yield often decreases due to frequency collisions in the readout. The per-pixel performance must also be improved, namely, the energy resolution. We are investigating ways to reduce frequency collisions and to improve the per-pixel performance of our devices through new superconducting material systems and fabrication techniques. There are two main routes that we are currently exploring. First, we are attempting to create more uniform titanium nitride films through the use of atomic layer deposition rather than the more traditional sputtering method. In addition, we are experimenting with completely new material systems for MKIDs, such as platinum silicide.