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arXiv:2604.12287 · IEEE Transactions on Applied Superconductivity

In Situ Interferometric Spatial Mapping of a Microwave Kinetic Inductance Detector Array

Chris Albert, R. Basu Thakur, Farzad Faramarzi, Byeong Ho Eom, Sumit Dahal, Andrew Bear, R. M. J. Janssen, Henry George LeDuc, Thomas R. Stevenson, Peter Day

Published Mar 26, 2026• 0 citations
arXivHTMLPDF

Abstract

We present a method of spatially mapping microwave kinetic inductance detector (MKID) arrays, in a dark setup. MKIDs are superconducting natively multiplexed resonators which enable kilopixel arrays, such as for the proposed Probe far-Infrared Mission for Astrophysics (PRIMA). In such telescope applications one must map the spatial location of each MKID with their individual resonance frequencies. Traditional LED arrays or beam-mapping methods become increasingly difficult as pixel spacing decreases, e.g., 900$\mu$m separated MKIDs in the spectrometer module of PRIMA. Our new mapping technique uses a cryogenic interferometer in reflection mode. As on-resonance signals reflect from an MKID, they accrue a phase proportional to the path-length, exactly corresponding to their physical distance on the feedline. Specifically, we use a superconducting transmission line that has nonlinear kinetic inductance. The slow-wave structure of this nonlinear device is designed to have a signal speed of 0.64% the speed of light, enabling a compact system. Current biasing this line allows for varying the wave speed and ensuring that the phase measured is periodic within a nulling interferometric mode. Using this setup, we measure a length ordering that reflects the bimodal MKID distribution of a 44 pixel array of MKIDs designed for PRIMA which contains the same spacing as the final kilopixel array design.

DOI
10.1109/tasc.2026.3678198

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We present a method of spatially mapping microwave kinetic inductance detector (MKID) arrays, in a dark setup. MKIDs are superconducting natively multiplexed resonators which enable kilopixel arrays, such as for the proposed Probe far-Infrared Mission for Astrophysics (PRIMA). In such telescope applications one must map the spatial location of each MKID with their individual resonance frequencies. Traditional LED arrays or beam-mapping methods become increasingly difficult as pixel spacing decreases, e.g., 900μ\muμm separated MKIDs in the spectrometer module of PRIMA. Our new mapping technique uses a cryogenic interferometer in reflection mode. As on-resonance signals reflect from an MKID, they accrue a phase proportional to the path-length, exactly corresponding to their physical distance on the feedline. Specifically, we use a superconducting transmission line that has nonlinear kinetic inductance. The slow-wave structure of this nonlinear device is designed to have a signal speed of 0.64% the speed of light, enabling a compact system. Current biasing this line allows for varying the wave speed and ensuring that the phase measured is periodic within a nulling interferometric mode. Using this setup, we measure a length ordering that reflects the bimodal MKID distribution of a 44 pixel array of MKIDs designed for PRIMA which contains the same spacing as the final kilopixel array design.
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Superconducting microwave resonators have the potential to revolutionize submillimeter and far-infrared astronomy, and with it our understanding of the universe. The field of low-temperature detector technology has reached a point where extremely sensitive devices like transition-edge sensors are now capable of detecting radiation limited by the background noise of the universe. However, the size of these detector arrays are limited to only a few thousand pixels. This is because of the cost and complexity of fabricating large-scale arrays of these detectors that can reach up to 10 lithographic levels on chip, and the complicated SQUID-based multiplexing circuitry and wiring for readout of each detector. In order to make substantial progress, next- generation ground-based telescopes such as CCAT or future space telescopes require focal planes with large-scale detector arrays of 104–106 pixels. Arrays using microwave kinetic inductance detectors (MKID) are a potential solution. These arrays can be easily made with a single layer of superconducting metal film deposited on a silicon substrate and pattered using conventional optical lithography. Furthermore, MKIDs are inherently multiplexable in the frequency domain, allowing ∼ 103 detectors to be read out using a single coaxial transmission line and cryogenic amplifier, drastically reducing cost and complexity. An MKID uses the change in the microwave surface impedance of a superconducting thin-film microresonator to detect photons. Absorption of photons in the superconductor breaks Cooper pairs into quasiparticles, changing the complex surface impedance, which results in a perturbation of resonator frequency and quality factor. For excitation and readout, the resonator is weakly coupled to a transmission line. The complex amplitude of a microwave probe signal tuned on-resonance and transmitted on the feedline past the resonator is perturbed as photons are absorbed in the superconductor. The perturbation can be detected using a cryogenic amplifier and subsequent homodyne mixing at room temperature. In an array of MKIDs, all the resonators are coupled to a shared feedline and are tuned to slightly different frequencies. They can be read out simultaneously using a comb of frequencies generated and measured using digital techniques. This thesis documents an effort to demonstrate the basic operation of ∼ 256 pixel arrays of lumped-element MKIDs made from superconducting TiNx on silicon. The resonators are designed and simulated for optimum operation. Various properties of the resonators and arrays are measured and compared to theoretical expectations. A particularly exciting observation is the extremely high quality factors (∼ 3 × 107) of our TiNx resonators which is essential for ultra-high sensitivity. The arrays are tightly packed both in space and in frequency which is desirable for larger full-size arrays. However, this can cause a serious problem in terms of microwave crosstalk between neighboring pixels. We show that by properly designing the resonator geometry, crosstalk can be eliminated; this is supported by our measurement results. We also tackle the problem of excess frequency noise in MKIDs. Intrinsic noise in the form of an excess resonance frequency jitter exists in planar superconducting resonators that are made on dielectric substrates. We conclusively show that this noise is due to fluctuations of the resonator capacitance. In turn, the capacitance fluctuations are thought to be driven by two-level system (TLS) fluctuators in a thin layer on the surface of the device. With a modified resonator design we demonstrate with measurements that this noise can be substantially reduced. An optimized version of this resonator was designed for the multiwavelength submillimeter kinetic inductance camera (MUSIC) instrument for the Caltech Submillimeter Observatory.
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We present the design and optical characterization of a novel highly compact three-dimensional microwave kinetic inductance detector (3D-MKID). At short wavelengths, such as the far- and mid-infrared, the pixel density of MKID arrays is often limited by the size and geometry of each resonator’s capacitor. Sending the non-optically active component of the resonator into the third dimension minimizes the footprint of each pixel, allowing much higher array densities to be achieved. In our 3D-MKID design, we compactify the resonator by conformally coating deep-etched holes in the silicon substrate with superconducting films formed by atomic layer deposition. The resulting geometry consists of three-dimensional coaxial transmission lines, which are then connected to a meandered absorber on the substrate surface. An array of these resonators are capacitively coupled to a microstrip feedline. We present the characterization of a prototype 3D-MKID array and compare it to simulate resonator properties. We additionally describe the detector sensitivity performance when illuminated by a far-infrared blackbody source.
Microwave Kinetic Inductance Detector (MKID) arrays are currently being developed and deployed for astronomical applications in the visible and near infrared and for sub-millimetre astronomy. One of the main challenges of MKIDs is that large arrays would exhibit a pixel yield, defined as the percentage of individually distinguishable pixels to the total number of pixels, of 75 80 %.1 Imperfections arising during the fabrication can induce an uncontrolled shift in the resonance frequency of individual resonators which end up resonating at the same frequency of a different resonator. This makes a number of pixels indistinguishable and therefore unusable for imaging. This paper proposes an approach to individually re-tune the colliding resonators in order to remove the degeneracy and increase the number of MKIDs with unique resonant frequencies. The frequency re-tuning is achieved through a DC bias of the resonator since the kinetic inductance of a superconducting thin film is current dependent and its dependence is non linear. Even though this approach has been already proposed,2 our innovative pixel design may solve two issues previously described in literature such as non-negligible electromagnetic losses to the DC bias line, and the multiplexibility of multiple resonators on a single feed-line.
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