arXiv:1809.03932 · Physical Review Applied

Magnetic-Field-Resilient Superconducting Coplanar-Waveguide Resonators for Hybrid Circuit Quantum Electrodynamics Experiments

J.G. Kroll, Francesco Borsoi, Kian L. van der Enden, W. Uilhoorn, Damaz de Jong, Marina Quintero‐Pérez, David J. van Woerkom, Alessandro Bruno, Sébastien Plissard, Diana Car, Erik P. A. M. Bakkers, Maja C. Cassidy, Leo P. Kouwenhoven

Published Jun 24, 2019• 116 citations

arXiv HTML PDF

Abstract

Superconducting coplanar waveguide resonators that can operate in strong magnetic fields are important for a variety of high-frequency superconducting devices. Magnetic fields degrade resonator performance by creating Abrikosov vortices that cause resistive losses and frequency fluctuations, or suppress the superconductivity entirely. To mitigate these effects, the authors investigate how device geometry and lithographically defined artificial defects can control vortex dynamics. These techniques allow the resonators to retain single-photon quality factors of about 10${}^{5}$ at ${B}_{\ensuremath{\parallel}}$ \ensuremath{\simeq} 6 T, for fast charge readout of a gate-defined double quantum dot at ${B}_{\ensuremath{\parallel}}$ = 1 T.

DOI: 10.1103/physrevapplied.11.064053

Related papers

Improving the performance of superconducting microwave resonators in magnetic fields

Daniel Bothner, T. Gaber, M. Kemmler +2 more

arXiv:1101.3185Applied Physics LettersMar 7, 201163 citations

Characterizing Niobium Nitride-Based Superconducting Coplanar Waveguide Resonators for Microwave Hybrid Circuit Quantum Electrodynamics

Paniz Foshat, Paul Baity, Sergey Danilin +8 more

IEEE Transactions on Applied SuperconductivityJan 22, 202510 citations

Losses in magnetic field resilient coplanar stripline resonators

Ivo P. C. Cools, Rodrigo Lopez Baez, Vittorio Buccheri +4 more

Journal of Physics D Applied PhysicsMay 30, 20253 citations

Coplanar waveguide resonators for circuit quantum electrodynamics

M. Göppl, A. Fragner, Matthias Baur +7 more

arXiv:0807.4094Journal of Applied PhysicsDec 1, 2008370 citations

Magnetic field resilient high kinetic inductance superconducting niobium nitride coplanar waveguide resonators

Cécile Xinqing Yu, Simon Zihlmann, Gonzalo Troncoso Fernández-Bada +4 more

arXiv:2012.04366Applied Physics LettersFeb 1, 202159 citations

Magnetic hysteresis effects in superconducting coplanar microwave resonators

Daniel Bothner, T. Gaber, M. Kemmler +4 more

arXiv:1202.5963Physical Review BJul 20, 201269 citations

arXiv:1809.03932 · Physical Review Applied

Magnetic-Field-Resilient Superconducting Coplanar-Waveguide Resonators for Hybrid Circuit Quantum Electrodynamics Experiments

Published Jun 24, 2019• 116 citations

arXiv HTML PDF

Abstract

{}^{5}

{B}_{\ensuremath{\parallel}}

\ensuremath{\simeq} 6 T, for fast charge readout of a gate-defined double quantum dot at

{B}_{\ensuremath{\parallel}}

= 1 T.

DOI: 10.1103/physrevapplied.11.064053

Related papers

Improving the performance of superconducting microwave resonators in magnetic fields

Daniel Bothner, T. Gaber, M. Kemmler +2 more

The operation of superconducting coplanar waveguide cavities, as used for circuit quantum electrodynamics and kinetic inductance detectors, in perpendicular magnetic fields normally leads to a reduction of the device performance due to energy dissipating Abrikosov vortices. We experimentally investigate the vortex induced energy losses in such Nb resonators with different spatial distributions of micropatterned pinning sites (antidots) by transmission spectroscopy measurements at 4.2 K. In comparison to resonators without antidots we find a significant reduction of vortex induced losses and thus increased quality factors over a broad range of frequencies and applied powers in moderate fields.The operation of superconducting coplanar waveguide cavities, as used for circuit quantum electrodynamics and kinetic inductance detectors, in perpendicular magnetic fields normally leads to a reduction of the device performance due to energy dissipating Abrikosov vortices. We experimentally investigate the vortex induced energy losses in such Nb resonators with different spatial distributions of micropatterned pinning sites (antidots) by transmission spectroscopy measurements at 4.2 K. In comparison to resonators without antidots we find a significant reduction of vortex induced losses and thus increased quality factors over a broad range of frequencies and applied powers in moderate fields.

arXiv:1101.3185Applied Physics LettersMar 7, 201163 citations

Characterizing Niobium Nitride-Based Superconducting Coplanar Waveguide Resonators for Microwave Hybrid Circuit Quantum Electrodynamics

Paniz Foshat, Paul Baity, Sergey Danilin +8 more

The high critical magnetic field and relatively high critical temperature of niobium nitride (NbN) make it a promising material for applications in superconducting quantum technology. However, NbN-based superconducting circuits are sensitive to decoherence sources such as two-level system (TLS) defects. Here, we numerically and experimentally investigate NbN superconducting microwave coplanar waveguide resonator arrays with a 100 nm thickness, capacitively coupled to a common coplanar waveguide on a silicon chip. We observe that the resonators' internal quality factor ( $Q_{i}$ ) decreases from $Q_{i}\sim 1.07\times 10^{6}$ in a high power regime to $Q_{i}\sim 1.36\times 10^{5}$ in the single photon regime. Data from this study is consistent with the TLS theory, which describes the TLS interactions in resonator substrates and interfaces. Moreover, we study the temperature ( $T$ ) dependence of $Q_{i}$ and resonance frequency $f_{r}$ of coplanar waveguide resonators to characterize the quasiparticle density. We observe that the increase in kinetic inductance at higher temperatures is the main reason for the frequency shift. Finally, we measure $f_{r}$ and $Q_{i}$ in response to in-plane magnetic fields ( $B_{||}$ ). We verify that $Q_{i}$ stays well above $10^{4}$ up to $B_{||}$ = 240 mT in the photon number $< \! n_{ph} \! >$ = 1.8 at $T$ = 100 mK. Our results could enable the development of robust microwave superconducting circuits for circuit quantum electrodynamics at high magnetic fields required for hybrid superconducting-semiconducting quantum circuits.The high critical magnetic field and relatively high critical temperature of niobium nitride (NbN) make it a promising material for applications in superconducting quantum technology. However, NbN-based superconducting circuits are sensitive to decoherence sources such as two-level system (TLS) defects. Here, we numerically and experimentally investigate NbN superconducting microwave coplanar waveguide resonator arrays with a 100 nm thickness, capacitively coupled to a common coplanar waveguide on a silicon chip. We observe that the resonators' internal quality factor ($Q_{i}$) decreases from$Q_{i}\sim 1.07\times 10^{6}$in a high power regime to$Q_{i}\sim 1.36\times 10^{5}$in the single photon regime. Data from this study is consistent with the TLS theory, which describes the TLS interactions in resonator substrates and interfaces. Moreover, we study the temperature ($T$) dependence of$Q_{i}$and resonance frequency$f_{r}$of coplanar waveguide resonators to characterize the quasiparticle density. We observe that the increase in kinetic inductance at higher temperatures is the main reason for the frequency shift. Finally, we measure$f_{r}$and$Q_{i}$in response to in-plane magnetic fields ($B_{||}$). We verify that$Q_{i}$stays well above$10^{4}$up to$B_{||}$= 240 mT in the photon number$< \! n_{ph} \! >$= 1.8 at$T$= 100 mK. Our results could enable the development of robust microwave superconducting circuits for circuit quantum electrodynamics at high magnetic fields required for hybrid superconducting-semiconducting quantum circuits.

IEEE Transactions on Applied SuperconductivityJan 22, 202510 citations

Losses in magnetic field resilient coplanar stripline resonators

Ivo P. C. Cools, Rodrigo Lopez Baez, Vittorio Buccheri +4 more

Abstract Coplanar waveguide (CPW) resonators have shown considerable success in circuit quantum electrodynamics research. However, their susceptibility to an external magnetic field limits their general functionality. In addition, electrical voltage gating for devices coupled to a CPW resonator necessitates alterations to the ground plane, changing the resonator characteristics. To avoid these problems, we fabricated and measured quarter wavelength differentially driven coplanar stripline (CPS) resonators made of NbTiN. We measured multiple devices with varying geometrical parameters in these novel resonators and analyse changes in their internal quality factor and two-level system losses. Furthermore, we establish the resilience of the resonators to an applied magnetic field by tracking the resonance frequency shift, without optimisation of the resonator geometry. Due to their flexible design and high magnetic field resilience, CPS resonators are particularly well-suited to study superconductor-semiconductor heterophysics where voltage gating or a magnetic field are necessary.Abstract Coplanar waveguide (CPW) resonators have shown considerable success in circuit quantum electrodynamics research. However, their susceptibility to an external magnetic field limits their general functionality. In addition, electrical voltage gating for devices coupled to a CPW resonator necessitates alterations to the ground plane, changing the resonator characteristics. To avoid these problems, we fabricated and measured quarter wavelength differentially driven coplanar stripline (CPS) resonators made of NbTiN. We measured multiple devices with varying geometrical parameters in these novel resonators and analyse changes in their internal quality factor and two-level system losses. Furthermore, we establish the resilience of the resonators to an applied magnetic field by tracking the resonance frequency shift, without optimisation of the resonator geometry. Due to their flexible design and high magnetic field resilience, CPS resonators are particularly well-suited to study superconductor-semiconductor heterophysics where voltage gating or a magnetic field are necessary.

Journal of Physics D Applied PhysicsMay 30, 20253 citations

Coplanar waveguide resonators for circuit quantum electrodynamics

M. Göppl, A. Fragner, Matthias Baur +7 more

High quality on-chip microwave resonators have recently found prominent new applications in quantum optics and quantum information processing experiments with superconducting electronic circuits, a field now known as circuit quantum electrodynamics (QED). They are also used as single photon detectors and parametric amplifiers. Here we analyze the physical properties of coplanar waveguide resonators and their relation to the materials properties for use in circuit QED. We have designed and fabricated resonators with fundamental frequencies from 2 to 9 GHz and quality factors ranging from a few hundreds to a several hundred thousands controlled by appropriately designed input and output coupling capacitors. The microwave transmission spectra measured at temperatures of 20 mK are shown to be in good agreement with theoretical lumped element and distributed element transmission matrix models. In particular, the experimentally determined resonance frequencies, quality factors, and insertion losses are fully and consistently explained by the two models for all measured devices. The high level of control and flexibility in design renders these resonators ideal for storing and manipulating quantum electromagnetic fields in integrated superconducting electronic circuits.High quality on-chip microwave resonators have recently found prominent new applications in quantum optics and quantum information processing experiments with superconducting electronic circuits, a field now known as circuit quantum electrodynamics (QED). They are also used as single photon detectors and parametric amplifiers. Here we analyze the physical properties of coplanar waveguide resonators and their relation to the materials properties for use in circuit QED. We have designed and fabricated resonators with fundamental frequencies from 2 to 9 GHz and quality factors ranging from a few hundreds to a several hundred thousands controlled by appropriately designed input and output coupling capacitors. The microwave transmission spectra measured at temperatures of 20 mK are shown to be in good agreement with theoretical lumped element and distributed element transmission matrix models. In particular, the experimentally determined resonance frequencies, quality factors, and insertion losses are fully and consistently explained by the two models for all measured devices. The high level of control and flexibility in design renders these resonators ideal for storing and manipulating quantum electromagnetic fields in integrated superconducting electronic circuits.

arXiv:0807.4094Journal of Applied PhysicsDec 1, 2008370 citations

Magnetic field resilient high kinetic inductance superconducting niobium nitride coplanar waveguide resonators

Cécile Xinqing Yu, Simon Zihlmann, Gonzalo Troncoso Fernández-Bada +4 more

We characterize niobium nitride (NbN) λ/2 coplanar waveguide resonators, which were fabricated from a 10-nm-thick film on silicon dioxide grown by sputter deposition. For films grown at 180 °C, we report a superconducting critical temperature of 7.4 K associated with a normal square resistance of 1 kΩ, leading to a kinetic inductance of 192 pH/◻. We fabricated resonators with a characteristic impedance up to 4.1 kΩ and internal quality factors Qi>104 in the single photon regime at zero magnetic field. Moreover, in the many photon regime, the resonators present a high magnetic field resilience with Qi>104 in a 6 T in-plane magnetic field and in a 300 mT out-of-plane magnetic field. These findings make such resonators a compelling choice for circuit quantum electrodynamics experiments involving quantum systems with small electric dipole moments operated in finite magnetic fields.We characterize niobium nitride (NbN) λ/2 coplanar waveguide resonators, which were fabricated from a 10-nm-thick film on silicon dioxide grown by sputter deposition. For films grown at 180 °C, we report a superconducting critical temperature of 7.4 K associated with a normal square resistance of 1 kΩ, leading to a kinetic inductance of 192 pH/◻. We fabricated resonators with a characteristic impedance up to 4.1 kΩ and internal quality factors Qi>104 in the single photon regime at zero magnetic field. Moreover, in the many photon regime, the resonators present a high magnetic field resilience with Qi>104 in a 6 T in-plane magnetic field and in a 300 mT out-of-plane magnetic field. These findings make such resonators a compelling choice for circuit quantum electrodynamics experiments involving quantum systems with small electric dipole moments operated in finite magnetic fields.

arXiv:2012.04366Applied Physics LettersFeb 1, 202159 citations

Magnetic hysteresis effects in superconducting coplanar microwave resonators

Daniel Bothner, T. Gaber, M. Kemmler +4 more

We performed transmission spectroscopy experiments on coplanar half-wavelength niobium resonators at temperature $T=4.2\phantom{\rule{0.16em}{0ex}}$ K. We observe not only a strong dependence of the quality factor $Q$ and the resonance frequency ${f}_{\mathrm{res}}$ on an externally applied magnetic field but also on the magnetic history of our resonators, i.e., on the spatial distribution of trapped Abrikosov vortices in the device. This is valid for a broad range of frequencies and angles between the resonator plane and the magnetic field direction and holds for resonators with and without antidots near the edges of the center conductor and the ground planes. In a detailed analysis, we show that characteristic features of the experimental data can only be reproduced by calculations if we assume a highly inhomogeneous rf current density and a flux density gradient with maxima at the edges of the superconductor. We furthermore demonstrate that the hysteretic behavior of the resonator properties can be used to considerably reduce the vortex-induced losses and to fine-tune the resonance frequency by the proper way of cycling to a desired magnetic field value.We performed transmission spectroscopy experiments on coplanar half-wavelength niobium resonators at temperature $T=4.2\phantom{\rule{0.16em}{0ex}}$K. We observe not only a strong dependence of the quality factor $Q$ and the resonance frequency ${f}_{\mathrm{res}}$ on an externally applied magnetic field but also on the magnetic history of our resonators, i.e., on the spatial distribution of trapped Abrikosov vortices in the device. This is valid for a broad range of frequencies and angles between the resonator plane and the magnetic field direction and holds for resonators with and without antidots near the edges of the center conductor and the ground planes. In a detailed analysis, we show that characteristic features of the experimental data can only be reproduced by calculations if we assume a highly inhomogeneous rf current density and a flux density gradient with maxima at the edges of the superconductor. We furthermore demonstrate that the hysteretic behavior of the resonator properties can be used to considerably reduce the vortex-induced losses and to fine-tune the resonance frequency by the proper way of cycling to a desired magnetic field value.

arXiv:1202.5963Physical Review BJul 20, 201269 citations

{}^{5}

{B}_{\ensuremath{\parallel}}

\ensuremath{\simeq} 6 T, for fast charge readout of a gate-defined double quantum dot at

{B}_{\ensuremath{\parallel}}

= 1 T.

Q_{i}

) decreases from

Q_{i}\sim 1.07\times 10^{6}

in a high power regime to

Q_{i}\sim 1.36\times 10^{5}

in the single photon regime. Data from this study is consistent with the TLS theory, which describes the TLS interactions in resonator substrates and interfaces. Moreover, we study the temperature (

T

) dependence of

Q_{i}

and resonance frequency

f_{r}

of coplanar waveguide resonators to characterize the quasiparticle density. We observe that the increase in kinetic inductance at higher temperatures is the main reason for the frequency shift. Finally, we measure

f_{r}

and

Q_{i}

in response to in-plane magnetic fields (

B_{||}

). We verify that

Q_{i}

stays well above

10^{4}

up to

B_{||}

= 240 mT in the photon number

< \! n_{ph} \! >

= 1.8 at

T

= 100 mK. Our results could enable the development of robust microwave superconducting circuits for circuit quantum electrodynamics at high magnetic fields required for hybrid superconducting-semiconducting quantum circuits.

We performed transmission spectroscopy experiments on coplanar half-wavelength niobium resonators at temperature

T=4.2\phantom{\rule{0.16em}{0ex}}

K. We observe not only a strong dependence of the quality factor

Q

and the resonance frequency

{f}_{\mathrm{res}}

on an externally applied magnetic field but also on the magnetic history of our resonators, i.e., on the spatial distribution of trapped Abrikosov vortices in the device. This is valid for a broad range of frequencies and angles between the resonator plane and the magnetic field direction and holds for resonators with and without antidots near the edges of the center conductor and the ground planes. In a detailed analysis, we show that characteristic features of the experimental data can only be reproduced by calculations if we assume a highly inhomogeneous rf current density and a flux density gradient with maxima at the edges of the superconductor. We furthermore demonstrate that the hysteretic behavior of the resonator properties can be used to considerably reduce the vortex-induced losses and to fine-tune the resonance frequency by the proper way of cycling to a desired magnetic field value.