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arXiv:1706.04169 · AIP Advances

Characterization of low loss microstrip resonators as a building block for circuit QED in a 3D waveguide

D. Zoepfl, P. R. Muppalla, C. M. F. Schneider, S. Kasemann, Stefan Partel, Gerhard Kirchmair

Published Aug 1, 2017• 17 citations
arXivHTMLPDF

Abstract

Here we present the microwave characterization of microstrip resonators, made from aluminum and niobium, inside a 3D microwave waveguide. In the low temperature, low power limit internal quality factors of up to one million were reached. We found a good agreement to models predicting conductive losses and losses to two level systems for increasing temperature. The setup presented here is appealing for testing materials and structures, as it is free of wire bonds and offers a well controlled microwave environment. In combination with transmon qubits, these resonators serve as a building block for a novel circuit QED architecture inside a rectangular waveguide.

DOI
10.1063/1.4992070

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Here we present the microwave characterization of microstrip resonators, made from aluminum and niobium, inside a 3D microwave waveguide. In the low temperature, low power limit internal quality factors of up to one million were reached. We found a good agreement to models predicting conductive losses and losses to two level systems for increasing temperature. The setup presented here is appealing for testing materials and structures, as it is free of wire bonds and offers a well controlled microwave environment. In combination with transmon qubits, these resonators serve as a building block for a novel circuit QED architecture inside a rectangular waveguide.
Low-loss waveguides are required for quantum communication at distances beyond the chip-scale for any low-temperature solid-state implementation of quantum information processors. We measure and analyze the attenuation constant of commercially available microwave-frequency waveguides down to millikelvin temperatures and single photon levels. More specifically, we characterize the frequency-dependent loss of a range of coaxial and rectangular microwave waveguides down to $0.005\ \mbox{dB}/\mbox{m}$ using a resonant-cavity technique. We study the loss tangent and relative permittivity of commonly used dielectric waveguide materials by measurements of the internal quality factors and their comparison with established loss models. The results of our characterization are relevant for accurately predicting the signal levels at the input of cryogenic devices, for reducing the loss in any detection chain, and for estimating the heat load induced by signal dissipation in cryogenic systems.
We report our development on design, fabrication and characterization of various superconducting resonators for quantum device applications. The resonators are developed mainly for superconducting qubit implementation in circuit QED structure, but future application will include photon detectors such as microwave kinetic inductance detectors. First we designed and fabricated half-wavelength coplanar waveguide resonators with niobium thin film on a high resistive silicon wafer, with the fundamental frequencies in the range of 1 to 8 GHz. The loaded quality factors are controlled by the coupling capacitors, and the lower bound of the intrinsic quality factor was measured down to 7 mK in the dilution refrigerator. We have also designed quarter-wavelength resonators and lumped LC resonators coupled to a transmission line, and characterized multiple resonators in a single transmission line. For the 3D transmon qubit application, we designed and fabricated a rectangular box resonator with superconducting aluminum. The intrinsic quality factor of the box resonator exceeds three million at 7 mK. We will also present basic results on the integration of a transmon qubit in the superconducting resonator.
We report our setup and measurement results of the quality factor Q of superconducting microwave resonators at mK temperature in a dilution refrigerator. The power dependence of the superconducting resonators' Q was measured down to the single photon level. Measurements were performed on two types of microwave resonators. First, a half-wavelength coplanar waveguide (CPW) resonator made of niobium film on an oxidized high-resistivity silicon substrate was measured. Then a rectangular box resonator made of machined superconducting aluminum alloy was measured. While the CPW chip resonator's Q value showed noticeable decrease at low microwave power, the box resonator's Q showed little power dependence. This setup is intended to perform characterization of various microwave resonators, which will serve as key components in superconducting qubit in circuit QED architecture.
High quality on-chip microwave resonators have recently found prominent new applications in quantum optics and quantum information processing experiments with superconducting electronic circuits, a field now known as circuit quantum electrodynamics (QED). They are also used as single photon detectors and parametric amplifiers. Here we analyze the physical properties of coplanar waveguide resonators and their relation to the materials properties for use in circuit QED. We have designed and fabricated resonators with fundamental frequencies from 2 to 9 GHz and quality factors ranging from a few hundreds to a several hundred thousands controlled by appropriately designed input and output coupling capacitors. The microwave transmission spectra measured at temperatures of 20 mK are shown to be in good agreement with theoretical lumped element and distributed element transmission matrix models. In particular, the experimentally determined resonance frequencies, quality factors, and insertion losses are fully and consistently explained by the two models for all measured devices. The high level of control and flexibility in design renders these resonators ideal for storing and manipulating quantum electromagnetic fields in integrated superconducting electronic circuits.
We describe the fabrication and measurement of microwave coplanar waveguide resonators with internal quality factors above 107 at high microwave powers and over 106 at low powers, with the best low power results approaching 2×106, corresponding to ∼1 photon in the resonator. These quality factors are achieved by controllably producing very smooth and clean interfaces between the resonators’ aluminum metallization and the underlying single crystal sapphire substrate. Additionally, we describe a method for analyzing the resonator microwave response, with which we can directly determine the internal quality factor and frequency of a resonator embedded in an imperfect measurement circuit.
The high critical magnetic field and relatively high critical temperature of niobium nitride (NbN) make it a promising material candidate for applications in superconducting quantum technology. However, NbN-based devices and circuits are sensitive to decoherence sources such as two-level system (TLS) defects. Here, we numerically and experimentally investigate NbN superconducting microwave coplanar waveguide resonator arrays, with a 100 nm thickness, capacitively coupled to a common coplanar waveguide on a silicon chip. We observe that the resonators' internal quality factor (Qi) decreases from Qi ~ 1.07*10^6 in a high power regime (< nph > = 27000) to Qi ~ 1.36 *10^5 in single photon regime at temperature T = 100 mK. Data from this study is consistent with the TLS theory, which describes the TLS interactions in resonator substrates and interfaces. Moreover, we study the temperature dependence internal quality factor and frequency tuning of the coplanar waveguide resonators to characterise the quasiparticle density of NbN. We observe that the increase in kinetic inductance at higher temperatures is the main reason for the frequency shift. Finally, we measure the resonators' resonance frequency and internal quality factor at single photon regime in response to in-plane magnetic fields B||. We verify that Qi stays well above 10^4 up to B|| = 240 mT in the photon number < nph > = 1.8 at T = 100 mK. Our results may pave the way for realising robust microwave superconducting circuits for circuit quantum electrodynamics (cQED) at high magnetic fields necessary for fault-tolerant quantum computing, and ultrasensitive quantum sensing.