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arXiv:1610.02474 · IEEE Transactions on Applied Superconductivity

High Quality Stepped-Impedance Resonators Suitable for Circuit-QED Measurement of Superconducting Artificial Atoms

Yirong Jin, Huiqiu Deng, Xueyi Guo, Yarui Zheng, Keqiang Huang, Luhui Ning, Dongning Zheng

Published Jan 1, 2017• 2 citations
arXivHTMLPDF

Abstract

High-quality factor coplanar resonators are critical elements in superconducting quantum circuits. We describe the design, fabrication, and measurement of stepped impedance resonators (SIRs), which are more compact in size than commonly used uniform impedance resonators (UIRs). With properly chosen impedance ratio, SIRs can be 27% shorter than UIRs. As a result, the area occupied by SIRs can be reduced. Two kinds of designs containing both SIRs and UIRs are fabricated and measured. The power dependence of the extracted internal quality factors (Qi ) for all the resonators showed that SIRs and UIRs have comparable performance with Qi around half-million under single-photon level excitation. These results indicate that SIRs could be used in superconducting quantum circuits. The reduced size of SIRs may also lead to reduced overall circuit area and increased integration level.

DOI
10.1109/tasc.2017.2663382

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High-quality factor coplanar resonators are critical elements in superconducting quantum circuits. We describe the design, fabrication, and measurement of stepped impedance resonators (SIRs), which are more compact in size than commonly used uniform impedance resonators (UIRs). With properly chosen impedance ratio, SIRs can be 27% shorter than UIRs. As a result, the area occupied by SIRs can be reduced. Two kinds of designs containing both SIRs and UIRs are fabricated and measured. The power dependence of the extracted internal quality factors (Qi ) for all the resonators showed that SIRs and UIRs have comparable performance with Qi around half-million under single-photon level excitation. These results indicate that SIRs could be used in superconducting quantum circuits. The reduced size of SIRs may also lead to reduced overall circuit area and increased integration level.
We report our development on design, fabrication and characterization of various superconducting resonators for quantum device applications. The resonators are developed mainly for superconducting qubit implementation in circuit QED structure, but future application will include photon detectors such as microwave kinetic inductance detectors. First we designed and fabricated half-wavelength coplanar waveguide resonators with niobium thin film on a high resistive silicon wafer, with the fundamental frequencies in the range of 1 to 8 GHz. The loaded quality factors are controlled by the coupling capacitors, and the lower bound of the intrinsic quality factor was measured down to 7 mK in the dilution refrigerator. We have also designed quarter-wavelength resonators and lumped LC resonators coupled to a transmission line, and characterized multiple resonators in a single transmission line. For the 3D transmon qubit application, we designed and fabricated a rectangular box resonator with superconducting aluminum. The intrinsic quality factor of the box resonator exceeds three million at 7 mK. We will also present basic results on the integration of a transmon qubit in the superconducting resonator.
High quality on-chip microwave resonators have recently found prominent new applications in quantum optics and quantum information processing experiments with superconducting electronic circuits, a field now known as circuit quantum electrodynamics (QED). They are also used as single photon detectors and parametric amplifiers. Here we analyze the physical properties of coplanar waveguide resonators and their relation to the materials properties for use in circuit QED. We have designed and fabricated resonators with fundamental frequencies from 2 to 9 GHz and quality factors ranging from a few hundreds to a several hundred thousands controlled by appropriately designed input and output coupling capacitors. The microwave transmission spectra measured at temperatures of 20 mK are shown to be in good agreement with theoretical lumped element and distributed element transmission matrix models. In particular, the experimentally determined resonance frequencies, quality factors, and insertion losses are fully and consistently explained by the two models for all measured devices. The high level of control and flexibility in design renders these resonators ideal for storing and manipulating quantum electromagnetic fields in integrated superconducting electronic circuits.
Tantalum (Ta) has recently received considerable attention in manufacturing robust superconducting quantum circuits. Ta offers low microwave loss, high kinetic inductance compared to aluminium (Al) and niobium (Nb), and good compatibility with complementary metal-oxide-semiconductor (CMOS) technology, which is essential for quantum computing applications. Here, we demonstrate the fabrication engineering of thickness-dependent high quality factor (high-Q_i) Ta superconducting microwave coplanar waveguide resonators. All films are deposited on high-resistivity silicon substrates at room temperature without additional substrate heating. Before Ta deposition, a niobium (Nb) seed layer is used to ensure a body-centred cubic lattice (α-Ta) formation. We further engineer the kinetic inductance (L_K) resonators by varying Ta film thicknesses. High L_K is a key advantage for applications because it facilitates the realisation of high-impedance, compact quantum circuits with enhanced coupling to qubits. The maximum internal quality factor Q_i of ~ 3.6 * 10^6 is achieved at the high power regime for 100 nm Ta, while the highest kinetic inductance is obtained to be 0.6 pH/sq for the thinnest film, which is 40 nm. This combination of high Q_i and high L_K highlights the potential of Ta microwave circuits for high-fidelity operations of compact quantum circuits.
We fabricate and characterize superconducting through-silicon vias and electrodes suitable for superconducting quantum processors. We measure internal quality factors of a million for test resonators excited at single-photon levels, on chips with superconducting vias used to stitch ground planes on the front and back sides of the chips. This resonator performance is on par with the state of the art for silicon-based planar solutions, despite the presence of vias. Via stitching of ground planes is an important enabling technology for increasing the physical size of quantum processor chips, and is a first step toward more complex quantum devices with three-dimensional integration.
In this paper, we present a novel design of a compact, double-fold half-wave superconducting coplanar waveguide resonator, specifically optimized for quantum readout. The geometry offers advantages in terms of scalability and allows for a more compact integration of qubits per unit area. The superconducting resonators are designed to operate within a fundamental frequency range of 1.9 GHz$-1.95GHz,utilizingbothgapandfingercouplingschemes.Thedevicesarefabricatedusingthinaluminumfilmsdepositedonhigh−resistivitysapphiresubstrates.Theproposedresonatorsexhibitqualityfactor(Q1.95 GHz, utilizing both gap and finger coupling schemes. The devices are fabricated using thin aluminum films deposited on high-resistivity sapphire substrates. The proposed resonators exhibit quality factor (Q1.95GHz,utilizingbothgapandfingercouplingschemes.Thedevicesarefabricatedusingthinaluminumfilmsdepositedonhigh−resistivitysapphiresubstrates.Theproposedresonatorsexhibitqualityfactor(Q_{L})of2.9×) of 2.9 ×)of2.9× 10^{5}$and 1.58 ×10310^{3}103for gap coupled and finger coupled, respectively, during experimental measurements. The simulated QL_{L}L​of single-folded meander line resonators are found to be 4.65 ×10510^{5}105and 258.42, for gap coupled and finger coupled, respectively, for comparison purpose at similar operating frequency. A comprehensive analysis of the microwave transmission spectra was conducted at cryogenic temperatures near 10 mK, across very high input drive powers ($-30dBmto30 dBm to30dBmto-10dBm).Experimentalresultsshowagoodagreementwithsimulationsandtheequivalentlumpedcircuitmodel.Notably,theproposeddesignreducesthephysicalfootprintoftheresonatordevicesupto28.210 dBm). Experimental results show a good agreement with simulations and the equivalent lumped circuit model. Notably, the proposed design reduces the physical footprint of the resonator devices up to 28.210dBm).Experimentalresultsshowagoodagreementwithsimulationsandtheequivalentlumpedcircuitmodel.Notably,theproposeddesignreducesthephysicalfootprintoftheresonatordevicesupto28.2\%comparedtoconventionalsingle−foldmeanderedstructures.TheresonatorsdemonstratestrongpotentialforintegratingqubitswithreadoutandcontrolbusesinquantuminformationprocessingwhichrequireaQcompared to conventional single-fold meandered structures. The resonators demonstrate strong potential for integrating qubits with readout and control buses in quantum information processing which require a Qcomparedtoconventionalsingle−foldmeanderedstructures.TheresonatorsdemonstratestrongpotentialforintegratingqubitswithreadoutandcontrolbusesinquantuminformationprocessingwhichrequireaQ_{L}$between10410^{4}104−-−10510^{5}105. They also being well-suited for cryogenic detector applications that utilize microwave kinetic inductance detector (MKID) arrays in frequency multiplexing for different coupling schemes.
We describe the fabrication and measurement of microwave coplanar waveguide resonators with internal quality factors above 107 at high microwave powers and over 106 at low powers, with the best low power results approaching 2×106, corresponding to ∼1 photon in the resonator. These quality factors are achieved by controllably producing very smooth and clean interfaces between the resonators’ aluminum metallization and the underlying single crystal sapphire substrate. Additionally, we describe a method for analyzing the resonator microwave response, with which we can directly determine the internal quality factor and frequency of a resonator embedded in an imperfect measurement circuit.