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arXiv:1305.4281 · Journal of Applied Physics

Operation of a titanium nitride superconducting microresonator detector in the nonlinear regime

Loren J. Swenson, Peter K. Day, Byeong Ho Eom, Henry George LeDuc, Nuria Llombart, Christopher M. McKenney, Omid Noroozian, Jonas Stasys Zmuidzinas

Published Mar 8, 2013• 110 citations
arXivHTMLPDF

Abstract

If driven sufficiently strongly, superconducting microresonators exhibit nonlinear behavior including response bifurcation. This behavior can arise from a variety of physical mechanisms including heating effects, grain boundaries or weak links, vortex penetration, or through the intrinsic nonlinearity of the kinetic inductance. Although microresonators used for photon detection are usually driven fairly hard in order to optimize their sensitivity, most experiments to date have not explored detector performance beyond the onset of bifurcation. Here, we present measurements of a lumped-element superconducting microresonator designed for use as a far-infrared detector and operated deep into the nonlinear regime. The 1 GHz resonator was fabricated from a 22 nm thick titanium nitride film with a critical temperature of 2 K and a normal-state resistivity of 100 μΩ cm. We measured the response of the device when illuminated with 6.4 pW optical loading using microwave readout powers that ranged from the low-power, linear regime to 18 dB beyond the onset of bifurcation. Over this entire range, the nonlinear behavior is well described by a nonlinear kinetic inductance. The best noise-equivalent power of 2×10−16 W/Hz1/2 at 10 Hz was measured at the highest readout power, and represents a ∼10 fold improvement compared with operating below the onset of bifurcation.

DOI
10.1063/1.4794808

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•Oct 1, 2019•0 citations
If driven sufficiently strongly, superconducting microresonators exhibit nonlinear behavior including response bifurcation. This behavior can arise from a variety of physical mechanisms including heating effects, grain boundaries or weak links, vortex penetration, or through the intrinsic nonlinearity of the kinetic inductance. Although microresonators used for photon detection are usually driven fairly hard in order to optimize their sensitivity, most experiments to date have not explored detector performance beyond the onset of bifurcation. Here, we present measurements of a lumped-element superconducting microresonator designed for use as a far-infrared detector and operated deep into the nonlinear regime. The 1 GHz resonator was fabricated from a 22 nm thick titanium nitride film with a critical temperature of 2 K and a normal-state resistivity of 100 μΩ cm. We measured the response of the device when illuminated with 6.4 pW optical loading using microwave readout powers that ranged from the low-power, linear regime to 18 dB beyond the onset of bifurcation. Over this entire range, the nonlinear behavior is well described by a nonlinear kinetic inductance. The best noise-equivalent power of 2×10−16 W/Hz1/2 at 10 Hz was measured at the highest readout power, and represents a ∼10 fold improvement compared with operating below the onset of bifurcation.
Titanium nitride (TiNx) films are ideal for use in superconducting microresonator detectors for the following reasons: (a) the critical temperature varies with composition (0<Tc<5 K); (b) the normal-state resistivity is large, ρn∼100 μΩ cm, facilitating efficient photon absorption and providing a large kinetic inductance and detector responsivity; and (c) TiN films are very hard and mechanically robust. Resonators using reactively sputtered TiN films show remarkably low loss (Qi>107) and have noise properties similar to resonators made using other materials, while the quasiparticle lifetimes are reasonably long, 10–200 μs. TiN microresonators should therefore reach sensitivities well below 10−19 W Hz−1/2.
Nonlinear resonators of superconducting thin-film kinetic inductance have attracted considerable research interest in the fields of detectors, qubits, parametric amplifiers, and more. By tuning the deposition parameters, niobium titanium nitride (NbTiN) films (∼12 nm in thickness) present high resistivity(∼2000 μΩ cm) and large sheet kinetic inductance (∼0.7 nH/□). We designed resonators with NbTiN micronwire as the inductor and aluminum as the capacitor, which result in a high internal quality factor and a Kerr nonlinearity of a few hertz. The radio frequency response of the resonators demonstrates nonlinear behavior similar to that of the cubic Duffing oscillator, including frequency shift and hysteresis region. The kinetic inductance resonator is a promising candidate for high saturation power parametric amplifiers.
Microwave kinetic inductance detectors (MKIDs) promise high sensitivity, combined with device simplicity and intrinsic multiplexibility. We have measured the response and noise equivalent power (NEP) of an all-aluminium, antenna coupled MKID at 1.54 THz, both as a function of radiation power and as a function of readout power. Eight optical filters and a box-in-box configuration at the bath temperature, allow a large range of optical powers by varying the temperature of a black body source. In the range of 80 aW-700 fW the detector is photon-noise limited, with an optical efficiency of 48±8% for one polarisation, which is limited by the antenna design. At lower optical powers we reveal a saturation level in the NEP of 3.8×10-19W/Hz1/2, competitive with other detectors for this purpose and the lowest optical NEP so far for MKIDs. The noise over the entire power range is limited by photon- and generation-recombination noise, the fundamental noise sources for these detectors.
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Microwave kinetic inductance detectors (MKID) are superconducting broadband direct detectors. If a superconducting thin film patterned into a resonator is illuminated with photons, Cooper pairs break up and the kinetic inductance of the film changes. This shifts the resonance frequency downwards and the dissipation of the resonator increases, which can be detected in the phase and amplitude of a transmitted signal. \n \nIn this thesis, a waveguide coupled MKID is designed and simulated. 350 GHz radiation is coupled into a copper waveguide via a horn antenna. A waveguide probe leads the signal onto a 9 µm silicon membrane where it is absorbed in a 40 nm superconducting aluminum film which is the inductive part of a superconducting resonator. The capacitor of the resonator is made of niobium. Two versions of the device are developed, a transmission line resonator and a lumped element resonator design. The new design will enable an accurate understanding of the optical sensitivity of MKIDs and allow comparison of different resonator materials. Since two different resonator types are used, the direct comparison of transmission line and lumped resonators will also be possible. \n \nA measurement setup is developed including an ADR cryostat to cool MKID devices down to below 40 mK. An analog readout system using either a vector network analyzer or an IQ mixer is designed and built. The necessary software to control the ADR, the temperature monitoring, the readout signal generation and detection and the signal acquisition of the setup is also developed. \n \nThe waveguide coupled MKID design is fabricated in our in-house microfabrication laboratory and measured in the new setup. In my measurements, the devices do not show a resonance feature. The VNA and DC measurements are analyzed to determine a plausible hypothesis of the failure. The devices are diagnosed for critical issues during fabrication which will be addressed in a future iteration. \n \nTo verify the measurement setup, a test device of the IRAM NIKA 2 MKID camera is measured and the complete analysis pipeline is exercised. The quasi-particle lifetime in the aluminum thin films is measured and a dark and optical noise equivalent power are determined. The results are within the uncertainty comparable to measurements of IRAM themselves. \n \nA test chip designed in my master thesis that contains eight NbTiN resonators is measured in the new setup and non-linear effects under strong readout power are studied. Parametric amplification and oscillation of a resonator are shown qualitatively.