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AIP Advances

Kinetic inductance compact resonator with NbTiN micronwires

Ming Yang, Xiaoliang He, Wanpeng Gao, Junfeng Chen, Yu Wu, XiaoNi Wang, Gang Mu, Wei Peng, Zhirong Lin

Published Aug 1, 2024• 5 citations
Publisher

Abstract

Nonlinear resonators of superconducting thin-film kinetic inductance have attracted considerable research interest in the fields of detectors, qubits, parametric amplifiers, and more. By tuning the deposition parameters, niobium titanium nitride (NbTiN) films (∼12 nm in thickness) present high resistivity(∼2000 μΩ cm) and large sheet kinetic inductance (∼0.7 nH/□). We designed resonators with NbTiN micronwire as the inductor and aluminum as the capacitor, which result in a high internal quality factor and a Kerr nonlinearity of a few hertz. The radio frequency response of the resonators demonstrates nonlinear behavior similar to that of the cubic Duffing oscillator, including frequency shift and hysteresis region. The kinetic inductance resonator is a promising candidate for high saturation power parametric amplifiers.

DOI
10.1063/5.0220296

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Superconductor Science and Technology•Sep 18, 2024•4 citations
Nonlinear resonators of superconducting thin-film kinetic inductance have attracted considerable research interest in the fields of detectors, qubits, parametric amplifiers, and more. By tuning the deposition parameters, niobium titanium nitride (NbTiN) films (∼12 nm in thickness) present high resistivity(∼2000 μΩ cm) and large sheet kinetic inductance (∼0.7 nH/□). We designed resonators with NbTiN micronwire as the inductor and aluminum as the capacitor, which result in a high internal quality factor and a Kerr nonlinearity of a few hertz. The radio frequency response of the resonators demonstrates nonlinear behavior similar to that of the cubic Duffing oscillator, including frequency shift and hysteresis region. The kinetic inductance resonator is a promising candidate for high saturation power parametric amplifiers.
We examine the DC and radio frequency (RF) response of superconducting transmission line resonators comprised of very thin NbTiN films, <12 nm in thickness, in the high-temperature limit, where the photon energy is less than the thermal energy. The resonant frequencies of these superconducting resonators show a significant nonlinear response as a function of RF input power, which can approach a frequency shift of Δf=−0.15% in a −20 dB span in the thinnest film. The strong nonlinear response allows these very thin film resonators to serve as high kinetic inductance parametric amplifiers.
Niobium nitride (NbN\mathrm{Nb}\mathrm{N}NbN) is a particularly promising material for quantum technology applications, as it shows the degree of reproducibility necessary for large-scale superconducting circuits. We demonstrate that resonators based on NbN\mathrm{Nb}\mathrm{N}NbN thin films present a one-photon internal quality factor above 105{10}^{5}105 maintaining a high impedance (larger than $2\mathrm{k}\mathrm{\ensuremath{\Omega}}$), with a footprint of approximately $50\ifmmode\times\else\texttimes\fi{}100\phantom{\rule{0.2em}{0ex}}\text{\ensuremath{\mu}}{\mathrm{m}}^{2}$ and a Kerr nonlinearity of few tenths of a hertz. These quality factors, mostly limited by losses induced by the coupling to two-level systems, have been maintained for kinetic inductances ranging from tenths to hundreds of picoHenry per square. We also demonstrate minimal variations in the performance of the resonators during multiple cooldowns over more than nine months. Our work proves the versatility of niobium nitride high-kinetic-inductance resonators, opening perspectives towards the fabrication of compact, high-impedance, and high-quality multimode circuits, with sizable interactions.
We have designed, fabricated, and tested a frequency-tunable high-Q superconducting resonator made from a niobium titanium nitride film. The frequency tunability is achieved by injecting a DC through a current-directing circuit into the nonlinear inductor whose kinetic inductance is current-dependent. We have demonstrated continuous tuning of the resonance frequency in a 180 MHz frequency range around 4.5 GHz while maintaining the high internal quality factor Qi > 180 000. This device may serve as a tunable filter and find applications in superconducting quantum computing and measurement. It also provides a useful tool to study the nonlinear response of a superconductor. In addition, it may be developed into techniques for measurement of the complex impedance of a superconductor at its transition temperature and for readout of transition-edge sensors.
We have developed a kinetic inductance travelling-wave amplifier toward the THz-band operation. In this paper, we discuss the nonlinear kinetic inductance of single-crystal niobium titanium nitride (NbTiN) thin film in response to the application of current to the film. In our calculation, it is found that single-crystal NbTiN films have a large current variation in the kinetic inductance compared with that of polycrystalline NbTiN films. To evaluate the nonlinearity, we fabricated a superconducting coplanar waveguide with a 0.2-m line length and measured the transmittance. We observed a variation of the electrical length of the line caused by the modulation of the kinetic inductance as a function of the value of the current applied to the strip.
Frequency-tunable microwave resonators are in great demand especially in hybrid systems where precise frequency alignment of resonances is required. Here, we present frequency-tunable high-Q superconducting resonators fabricated from thin niobium nitride and niobium titanium nitride films. The resonant frequency is tuned by applying a magnetic field perpendicular to the hole structures in the resonator's inductor wire, whose kinetic inductance is modified by wirelessly induced DC supercurrents. A continuous in situ frequency tuning of over 300 MHz is achieved for a 10 GHz resonator with a moderate magnetic field of 1.2 mT. The planar resonator design and the noncontact tuning scheme greatly ease the fabrication complexity and can be widely applied in many hybrid systems for coupling microwave modes with other forms of excitations such as optical photons, phonons, magnons, and spins.
Abstract Low microwave loss and regulatable kinetic inductance are two key characteristics of superconducting films to manufacture high-performance quantum devices. Epitaxial titanium nitride (TiN) thin films have been found to exhibit significant advantages in these two aspects. In this paper, we investigated into the dielectric loss and kinetic inductance of epitaxial TiN films, which were prepared on both silicon and sapphire substrates with different temperatures. Crystal structure, surface morphology, and superconducting properties were characterized systematically. The radio-frequency response of microwave resonators made of TiN films was studied at low temperatures to extract the information of kinetic inductance and quality factor. We obtained the highest internal quality factor up to 1.6 × 10 6 at single photon regime and achieved a regulation of kinetic inductance exceeding 16 times by altering the substrate and the sputtering temperature of the TiN films. This work not only provides an essential foundation for the precise design and preparation of low-loss TiN resonators for superconducting quantum bits, but also demonstrates TiN film as an excellent material platform with both low microwave loss and high kinetic inductance that can be applied in other fields such as microwave kinetic inductance detectors.