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arXiv:cond-mat/9805349 · Applied Physics Letters

Josephson junctions defined by a nanoplough

B. Irmer, Robert H. Blick, Friedrich Christian Simmel, W. Gödel, Heribert Lorenz, J. P. Kotthaus

Published Oct 5, 1998• 58 citations
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Abstract

We define superconducting constrictions by ploughing a deposited Aluminum film with a scanning probe microscope. The microscope tip is modified by electron-beam deposition to form a nanoplough of diamond-like hardness which allows the definition of highly transparent Josephson junctions. Additionally, a dc superconducting quantum interference device is fabricated in order to verify the junction’s behavior. The devices are easily integrated in mesoscopic devices as local radiation sources and can be used as tunable on-chip millimeter-wave sources.

DOI
10.1063/1.122364

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We define superconducting constrictions by ploughing a deposited Aluminum film with a scanning probe microscope. The microscope tip is modified by electron-beam deposition to form a nanoplough of diamond-like hardness which allows the definition of highly transparent Josephson junctions. Additionally, a dc superconducting quantum interference device is fabricated in order to verify the junction’s behavior. The devices are easily integrated in mesoscopic devices as local radiation sources and can be used as tunable on-chip millimeter-wave sources.
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Josephson junction spectroscopy is a powerful local microwave spectroscopy technique that has promising potential as a diagnostic tool to probe the microscopic origins of noise in superconducting qubits. We present advancements toward realizing Josephson junction spectroscopy in a scanning geometry, where the Josephson junction is formed between a superconducting sample and a high capacitance superconducting STM tip. Data from planar Nb-based Josephson junction devices first demonstrate the benefits of including a high capacitance shunt across the junction, which decreases linewidth and improves performance at elevated temperatures. We show how an equivalent circuit can be implemented by utilizing a planarized STM tip with local prominences, which are fabricated via electron beam lithography and reactive ion etching, followed by coating with a superconducting layer. Differential conductance measurements on a superconducting NbN surface demonstrate the ability of these high capacitance tips to decrease both thermal noise and P(E)-broadening in comparison to typical wire tips.
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Spectroscopy is a powerful tool to probe physical, chemical, and biological systems. Recent advances in microfabrication have introduced novel, intriguing mesoscopic quantum systems including superconductor-semiconductor hybrid devices and topologically nontrivial electric circuits. A sensitive, general-purpose spectrometer to probe the energy levels of these systems is lacking. We propose an on-chip absorption spectrometer functioning well into the millimeter wave band which is based on a voltage-biased superconducting quantum interference device. We demonstrate the capabilities of the spectrometer by coupling it to a variety of superconducting systems, probing phenomena such as quasiparticle and plasma excitations. We perform spectroscopy of a microscopic tunable nonlinear resonator in the 40--50-GHz range and measure transitions to highly excited states. The Josephson junction spectrometer, with outstanding frequency range, sensitivity, and coupling strength will enable new experiments in linear and nonlinear spectroscopy of novel mesoscopic systems.
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The performance of superconducting electronic devices such as superconducting quantum bits (qubits) and superconducting quantum interference devices (SQUIDs) strongly relies on high-quality Josephson junctions (JJ) and their integration into surrounding circuit elements. Therefore, a corresponding fabrication technology should allow for the fabrication of all required elements including the JJs, inductances, capacitances and waveguides. For a long time, shadow evaporation technique was the state of the art for the implementation of sub-μ m sized JJs based on aluminum for qubits of high coherence times. Although, the use of a single lithographic step represents a major advantage of this technique. However, shadowing effects limit sample size, device complexity, and thus scalability of the circuitry. To overcome these limitations and to meet the demands of next generation scalable quantum circuits, in this work we introduce our cross -type JJ aluminum technology, where JJs are defined by the overlap of two narrow perpendicular stripes. We discuss the technological challenges, with a focus on our newly developed dry etching process for patterning of the aluminum thin film. Compared to a lift-off based process, this advanced wafer-scale fabrication technology offers a high integration density and the required design flexibility. We will present first results on cross -type aluminum JJs.