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arXiv:cond-mat/0111350 · Physica C Superconductivity

Niobium and niobium nitride SQUIDs based on anodized nanobridges made with an atomic force microscope

Marc Faucher, T. Fournier, B. Pannetier, C. Thirion, Wolfgang Wernsdorfer, J.C. Villégier, Vincent Bouchiat

Published Mar 1, 2002• 51 citations
arXivHTMLPDF
DOI
10.1016/s0921-4534(01)01168-6

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The authors present a fabrication technique of superconducting single photon detectors made by local oxidation of niobium nitride ultrathin films. Narrow superconducting meander lines are obtained by direct writing of insulating niobium oxynitride lines through the films using voltage-biased tip of an atomic force microscope. Due to the 30nm resolution of the lithographic technique, the filling factor of the meander line can be made substantially higher than detector of similar geometry made by electron beam lithography, thus leading to increased quantum efficiency. Single photon detection regime of these devices is demonstrated at 4.2K.
SQUIDs employing short (\sim 1 \mu) ultra thin weak link sections of "granular" niobium and niobium nitride have been prepared on cylindrical quartz substrates by rf and rf reactive sputtering, photolithography and anodization. These SQUIDs have demonstrated near ideal intrinsic noise characteristics when biased at 20 MHz. Niobium nitride devices have operated with this nearly intrinsic noise at temperatures up to 12.5 K. Current-phase relation and flux entry versus applied flux were measured on one niobium SQUID. Results indicate a nearly [if not exactly] sinusoidal current-phase relation from Tcto almost a degree below Tcand flux entry noise in good agreement with the intrinsic flux noise theory. Biasing these devices at 9.2 GHz gives a degraded response which can be related to relaxation effects in the weak links. Thermal noise switching between the superconducting and dissipative states was also observed at 9.2 GHz and could be fit by a simple model.