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Optics Continuum

Observation of Strain in Ion-Implanted Diamond Substrate and Diamond Nanophotonic Structures

Ayan Majumder, Vivek K. Shukla, Anuj Bathla, Brajesh Yadav, Nanhey Singh, Padmnabh Rai, Kasturi Saha

Published Oct 13, 2026• 1 citation
Publisher
DOI
10.1364/optcon.613532

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Negatively charged nitrogen-vacancy (NV) centers and other color centers in diamonds have emerged as promising platforms for quantum communication, quantum information processing, and nanoscale sensing, owing to their long spin coherence times, fast spin control, and efficient photon coupling. Deterministic placement of individual color centers into nanophotonic structures is critical for scalable device integration, and ion implantation is the most viable technique. Nanofabrication processes, including diamond etching, are essential to realize these structures but can introduce crystal strain through lattice damage. In this work, we investigate the impact of ion implantation and nanofabrication-induced strain on the electronic spin levels of NV-centers. We demonstrate that the zero-field continuous-wave optically detected magnetic resonance (CW-ODMR) spectroscopy serves as a sensitive probe of local crystal strain. We report the presence of a shear strain feature in diamond substrates arising from the ion-implantation and nanofabrication processes, as evidenced by the asymmetric splitting black observed in the zero-field CW-ODMR spectrum of NV-centers.

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Negatively charged nitrogen-vacancy (NV) centers and other color centers in diamonds have emerged as promising platforms for quantum communication, quantum information processing, and nanoscale sensing, owing to their long spin coherence times, fast spin control, and efficient photon coupling. Deterministic placement of individual color centers into nanophotonic structures is critical for scalable device integration, and ion implantation is the most viable technique. Nanofabrication processes, including diamond etching, are essential to realize these structures but can introduce crystal strain through lattice damage. In this work, we investigate the impact of ion implantation and nanofabrication-induced strain on the electronic spin levels of NV-centers. We demonstrate that the zero-field continuous-wave optically detected magnetic resonance (CW-ODMR) spectroscopy serves as a sensitive probe of local crystal strain. We report the presence of a shear strain feature in diamond substrates arising from the ion-implantation and nanofabrication processes, as evidenced by the asymmetric splitting black observed in the zero-field CW-ODMR spectrum of NV-centers.
Negatively charged germanium vacancy centers (GeV) in diamond are a promising platform for quantum computing and quantum communication. However, these applications require the precise incorporation of GeV centers with good optical properties inside of nanophotonic structures. In this work, we demonstrate the highly efficient local creation of GeV centers in diamond via focused-ion-beam implantation, followed by high-temperature annealing. We report the successful creation of GeV centers over the depth range of 5.5 - 30 nm. Implantation at low fluence enables the creation of single GeV centers. The formation yield strongly depends on implantation energy and fluence, reaching up to 33% at energies of 35 and 70 keV. This method, therefore, enables the efficient creation of GeV centers within a small, well-defined local sample volume and offers a potential means of incorporating them into photonic structures.