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Advanced Quantum Technologies

Cover Feature: On‐Chip Cryogenic Level Meters for Magnetic Field Based on TiN Superconducting Microwave Resonators (Adv. Quantum Technol. 10/2026)

Shu‐Kun Ye, Zi‐Qing Huang, Yongqiang Xu, Yuan Kang, Rui Wu, Song‐Yan Deng, Bao‐Chuan Wang, Ranran Cai, Hai‐Ou Li, Xiang‐Xiang Song, Gang Cao, Guo‐Ping Guo

Published Oct 1, 2026• 0 citations
Publisher

Abstract

Under an external magnetic field, a high-quality TiN nanowire superconducting microwave resonator exhibits anisotropic frequency shifts as the field orientation rotates, mapping a peanut-like surface whose principal axes coincide with the device coordinate system. This enables precisely quantifying the field orientation relative to the resonator at cryogenic temperatures with a single device, a capability highly desirable for quantum information applications. More in article number e70464, Xiang-Xiang Song, Gang Cao, and co-workers.

DOI
10.1002/qute.70516

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Under an external magnetic field, a high-quality TiN nanowire superconducting microwave resonator exhibits anisotropic frequency shifts as the field orientation rotates, mapping a peanut-like surface whose principal axes coincide with the device coordinate system. This enables precisely quantifying the field orientation relative to the resonator at cryogenic temperatures with a single device, a capability highly desirable for quantum information applications. More in article number e70464, Xiang-Xiang Song, Gang Cao, and co-workers.
Superconducting resonators interfaced with paramagnetic spin ensembles are used to increase the sensitivity of electron spin resonance experiments and are key elements of microwave quantum memories. Certain spin systems that are promising for such quantum memories possess “sweet spots” at particular combinations of magnetic fields and frequencies, where spin coherence times or linewidths become particularly favorable. In order to be able to couple high-Q superconducting resonators to such specific spin transitions, it is necessary to be able to tune the resonator frequency under a constant magnetic field amplitude. Here, we demonstrate a high-quality, magnetic field resilient superconducting resonator, using a 3D vector magnet to continuously tune its resonance frequency by adjusting the orientation of the magnetic field. The resonator maintains a quality factor of >105 up to magnetic fields of 2.6 T, applied predominantly in the plane of the superconductor. We achieve a continuous tuning of up to 30 MHz by rotating the magnetic field vector, introducing a component of 5 mT perpendicular to the superconductor.
Superconducting qubits, though promising for both near-term problem-solving as well as the development of large-scale quantum computing systems, are limited in performance largely by materials-induced decoherence channels which are maximized at millikelvin temperatures, single photon powers, and microwave frequencies. Superconducting microwave resonators are ideal tools for measuring these materials losses due to their simplicity, well-understood behavior, and sensitivity to these same losses. In order to better understand and mitigate dominant qubit decoherence channels, accurate and precise characterization of superconducting microwave resonator performance is critical. In this paper, current measurement techniques for superconducting microwave resonators are discussed, including experimental set-up, error analysis, and cryogenic calibration of a vector network analyzer.
Cryogenic systems are essential to many modern scientific and technological applications, including MRI superconducting magnets, particle accelerators, astrophysical detectors and quantum computing platforms, all of which operate at temperatures well below 120 K. In this framework, accurate temperature monitoring is, therefore, critical. However, conventional Resistance Temperature Detectors (RTDs) suffer from significant limitations in cryogenic environments, such as wiring complexity, power dissipation, limited low-temperature operation and large footprint, which restrict their integration in increasingly complex cryogenic infrastructures. Superconducting devices offer a promising alternative due to their high sensitivity at low temperatures, low power dissipation and compatibility with integrated quantum technologies. Inspired by Microwave Kinetic Inductance Detectors (MKIDs), this work investigates superconducting microwave resonators as minimally invasive, frequency-multiplexed cryogenic thermometers operating below 12 K. In particular, strategies to tune and enhance temperature sensitivity are explored by studying the effects of the superconducting thin-film thickness and surface nanostructuring. The first part of the study examines NbTi(N) planar resonators with thicknesses ranging from 20 nm to 150 nm, where temperature sensing is based on the temperature dependence of the kinetic inductance. S-shaped split-ring resonators resonating near 1.1 GHz are inductively coupled to a coplanar transmission line and characterized under cryogenic conditions. A clear trade-off between temperature sensitivity and quality factor is observed: thinner films achieve higher sensitivity, up to approximately 19 MHz/K for 20 nm thick devices, while the quality factor, typically exceeding 10^4, is found to degrade when the thickness is reduced. This trade-off leads to an optimal temperature resolution, with sub-microkelvin noise-equivalent temperature (NET) values. In particular, a minimum NET of (0.53±0.09) µK/Hz^(1/2) at 4.2 K is achieved for a 100 nm thick resonator, which is also exploited to study low-frequency temperature fluctuations in liquid helium. In the second part, a possible approach to enhance the temperature sensitivity, through surface nanostructuring, is investigated. Arrays of nanogaps are patterned in high-current regions of a 1.3 GHz resonator, in order to locally suppress superconductivity, reduce the critical temperature of the film and, therefore, accentuate the slope of the temperature-sensitive curve. These weak-links are realized by partially etching a 100 nm NbTi film, to leave 20-30 nm thick remaining nanogaps. Measurements reveal a significant increase in temperature sensitivity, reaching values as high as up to (62±1) MHz/K, which correspond to one order-of-magnitude improvement over non-nanostructured devices. Although this enhancement comes with increased noise-equivalent temperature, the results demonstrate the feasibility of engineering superconducting weak links to improve RF cryogenic thermometry and provide a solid foundation for future optimization. In reason of the achieved results, such an approach could find successful applications for a sub-µK high-resolution cryogenic temperature monitoring, specifically for integrated quantum architectures, further benefiting from the frequency-multiplexing that naturally arises from the multiple allocation of different superconducting microwave resonators.
ABSTRACT \nSuperconducting resonators interfaced with paramagnetic spin ensembles are used to increase the sensitivity of electron spin resonance experiments and are key elements of microwave quantum memories. Certain spin systems that are promising for such quantum memories possess “sweet spots” at particular combinations of magnetic fields and frequencies, where spin coherence times or linewidths become particularly favorable. In order to be able to couple high-Q superconducting resonators to such specific spin transitions, it is necessary to be able to tune the resonator frequency under a constant magnetic field amplitude. Here, we demonstrate a high-quality, magnetic field resilient superconducting resonator, using a 3D vector magnet to continuously tune its resonance frequency by adjusting the orientation of the magnetic field. The resonator maintains a quality factor of >10^{5} up to magnetic fields of 2.6 T, applied predominantly in the plane of the superconductor. We achieve a continuous tuning of up to 30 MHz by rotating the magnetic field vector, introducing a component of 5 mT perpendicular to the superconductor.
ABSTRACT Precise control of the external magnetic field orientation with respect to quantum devices is of particular importance since the field orientation can significantly influence quantum states. Therefore, in situ calibration of rotational misalignment of the magnetic field at cryogenic temperatures, where quantum devices are usually operated, is essential, yet remains largely unexplored. Here, leveraging the advantages of low microwave loss and high critical field, we demonstrate that high‐quality TiN nanowire superconducting microwave resonators exhibit sensitive and anisotropic responses to varied magnetic fields, enabling three‐dimensional calibration of the field orientation using a single device. Based on a developed tensor model, we extract competitive out‐of‐plane orientation calibration uncertainty of . Our approach maps the magnetic field to a readily measurable scalar parameter, thereby providing a reliable, repeatable, and efficient method for precisely quantifying field orientation, a capability highly desirable in research fields such as condensed matter physics and quantum computation.