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IEEE Transactions on Applied Superconductivity

Aluminum Air Bridges for Integrated Superconducting Quantum Circuits

L. Kaczmarek, M. Schmelz, E. Mutsenik, A. Sultanov, Katja Peiselt, G. Oelsner, Ronny Stolz

Published Sep 2, 2026• 0 citations
Publisher
DOI
10.1109/tasc.2026.3730518

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Proper grounding between different ground planes in coplanar superconducting qubit circuits is important to avoid spurious resonances which increase decoherence. Here, the authors present a possible solution to suppress such undesired modes using superconducting aluminum air-bridges which have been fabricated on top of aluminum coplanar waveguide transmission lines. 3D electromagnetic simulations were done to guide the design of the air-bridges such that the input reflection (S11) of the bridges was kept at a minimum level. A fabrication method based on optical lithography techniques was developed and it resulted in air-bridges with a height of approximately 10 μm and lengths of up to 500 μm. The method can be generalized to arbitrary length air-bridge with heights even exceeding 15 μm.
Air-bridges play a crucial role in the performance of microwave circuits integrated with superconducting quantum bits, and their mechanical stability is important for reliable operation. This study is devoted to the technological issues that lead to air-bridge instability. We propose an optimized bridge geometry designed to improve the mechanical properties. Through systematic testing, we established that bridges incorporating this novel geometry achieved complete stability for lengths up to 170μm in our technological processes. The findings provide insight into the problem and a practical solution for technologists facing the challenges of the air-bridge stability. The implementation of our technology has the potential to improve significantly the mechanical robustness of air-bridges in multi-qubit circuits for quantum computations.