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Evaluation of self-shunted NbN/TaN/NbN Josephson junctions for digital electronics

Pascal Febvre, Vratislav Michal, Romano Setzu, Jean-Claude Villégier

Published Aug 17, 2008• 0 citations
OpenAlex

Abstract

Intrinsically shunted Josephson junctions based on NbN superconducting material can exhibit RnIc products in the1-3 mV range at temperatures in the 4-10K range, while presenting non hysteretic current-voltage characteristics. For these reasons, they are a suitable alternative for digital electronics since they can be ultimately highly integrated, while operating at clock frequencies above 100 GHz. In this work, departing from some experimental data of Josephson junctions measured in different conditions, we will present the expected performances in terms of ultimate speed, bit-error-rate and temperature of operation that can be reached with such a technology, for a few breadboard digital circuits. Circuits using interface converters, Josephson transmission lines, shift registers and several flip-flop cells are investigated for this purpose. An analysis is done in order to compare the potentialities and drawbacks of this technology with its existing low-Tc and high-Tc counterparts. The emphasis will be put on the technological requirements that are necessary to be met in order to achieve a given performance.

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SNS Nb/Al-AlOx/Nb Josephson junctions have been recently developed with Al layer thicknesses 30- 100 nm , for which non-hysteretic I-V characteristics have been obtained by oxidation ranging from 150 to 200 Pa.s. The Stewart-McCumber parameter of the junctions can be lower or higher than unity, depending on the above-mentioned conditions. Typical Jc values of several tens of kA/cm2 and RnIc values up to 0.5-0.7 mV at 4.2 K have been obtained, suitable for digital applications. Two interesting features of this technology are: i) the absence of external shunt resistance that can allow higher integration and; ii) the reproducibility of technological parameters that is connected to a least dependence of the Josephson critical current on the barrier thickness. In this work, we will present a detailed analysis of speed and jitter that can be expected from basic digital circuits based on such a technology. This analysis is based on the accurate experimental extraction of typical quantities, like the Stewart-McCumber parameter or specific capacitance. In particular, the influence of the temperature of operation on the performance of elementary cells will be assessed. A comparisonwith similar cells based on externally-shunted Josephson junctions will be presented in order to evaluate the ranges of parameters for which this technology exhibits some clear advantages. In particular we will show the technological constraints that need to be met in order to build circuits that can compete with existing technologies

•Aug 17, 2008•0 citations

Single-flux-quantum circuits utilizing self-shunted NbN/TaN/NbN Josephson junctions grown on silicon substrates

Yulong Zhong, Lu Zhang, Junjie Xie +9 more

Abstract We report on the electrical properties of NbN/TaN/NbN Josephson junctions grown on thermally oxidized silicon substrates, along with the design and fabrication of superconducting single-flux-quantum (SFQ) circuits based on these NbN superconductor/normal metal/superconductor (SNS) junctions. The critical current density ( J c ) of the junctions was found to be relatively sensitive to the barrier thickness, decreasing from 108.0 ± 8.1 kA cm −2 for a 15 nm barrier to 12.8 ± 1.9 kA cm −2 for a 30 nm barrier. For a J c of approximately 24.5 ± 2.1 kA cm −2 and a barrier thickness of 25 nm, the NbN SNS junctions are self-shunted and exhibit nonhysteretic current–voltage ( I – V ) characteristics. Especially for junctions with diameter ( φ ) ranging from 0.8 to 1.6 μ m, their critical current ( I c ) falls within the range of 110–450 μ A, making them suitable for SFQ circuits. By considering the impact of excess current and incorporating it as an additional term in the conventional resistively and capacitively shunted junction model, the I – V curves of NbN SNS junctions can be precisely described, successfully minimizing the deviation between simulations and test results. The DC-SFQ and SFQ-DC interface circuits can both operate normally, and the bias margins of cell circuits such as Josephson transmission line, confluence buffer, D flip-flop, and splitter are greater than 40%. Compared to Nb superconductor/insulator/superconductor junctions, their self-shunting characteristics and relatively thick 25 nm barriers can also enhance the integration of circuits and increase the yield to complex circuits.

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[INVITED] Overdamped Josephson junctions for digital applications

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An interesting feature of Superconductor Normal metal Superconductor - Josephson junctions for digital applications is due to their non-hysteretic current-voltage characteristics in a broad temperature range below Tc. This allows to design Single-Flux-Quantum (SFQ) cells without the need of external shunts. Two advantages can be drawn from this property: first the SFQ cells can be more compact which leads to a more integrated solution towards nano-devices and more complex circuits; second the absence of electrical parasitic elements associated with the wiring of resistors external to the Josephson junctions increases the performance of SFQ circuits, in particular regarding the ultimate speed of operation. For this purpose Superconductor Normal metal Insulator-Superconductor Nb/Al-AlOx/Nb Josephson junctions have been recently developed at INRiM with aluminum layer thicknesses between 30 and 100 nm. They exhibit non-hysteretic current-voltage characteristics with RnIc values higher than 0.5 mV in a broad temperature range and optimal Stewart McCumber parameters at 4.2 K for RSFQ applications. The main features of obtained SNIS junctions regarding digital applications are presented.

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Josephson-Effect Mixers using Shunted Nb and NbN Tunnel Junctions

Robert J. Schoelkopf, Tom G. Phillips, Jonas Stasys Zmuidzinas +1 more

We present test results of a 100 GHz waveguide receiver using resistively-shunted Nb and NbN tunnel junctions. These junctions were fabricated with a process similar to that used previously with Nb junctions [1], which produces non-hysteretic devices with normal-state resistances of 30-50 Ohms, and IcRiz products of 0.5-0.75 mV. The best receiver temperature obtained to date with NbN is 270 K (DSB) with 6-7 dB of conversion loss. A receiver temperature of 390 K (DSB) was previously obtained with Nb junctions; these devices showed qualitative agreement with the predictions of the simple DC and RF current-biased RSJ model. The improvement in receiver performance is probably due to improved RF coupling of the junctions, and due to the higher IcRn products of NbN. However, these NbN devices display different pumped I-V curves and IF power curves than predicted by the RSJ model. We show that these effects can be caused by the strong interaction of the junction with the embedding circuit, and conclude that an accurate model of the impedance presented to the junction will have to be included in the RSJ simulations to compare with the observed performance. Fourth International Symposium on Space Terahertz Technology Page 443 Introduction We are studying the performance of Josephson-effect mixers using resistivelyshunted tunnel junctions in order to develop a better understanding of their behavior, the sources of noise and its limitation, and to determine how to optimize their performance. Also, we wish to compare the observed behavior and performance with the theoretical predictions of the so-called RSJ (resistively shunted junction) model, so that there will be a guide to the expected performance for different frequency regimes and device parameters. This work may be important as high-Tc SNS devices become available [P.A. Rosenthal and E.N. Grossman, these proceedings] with large Ic h?„ products, for they provide the possibility of using Josephson mixers at frequencies in the terahertz range, above the range where SIS mixers are currently available. In contrast, due to the extremely short coherence lengths of the high-Tc materials, junctions suitable for quasiparticle (SIS) mixers may not be feasible with these materials Device Fabrication We have applied the technique used for creating non-hysteretic Nb Josephson devices[1] to NbN/MgO/NbN tunnel junctions. First the junction tfilayer is fabricated, then the junction areas are patterned by electron-beam lithography and subsequently etched using reactive-ion etching (RJE) in the standard method [3]. After planarization of the etched area with evaporated SiO, a AuGe resistor is fabricated on top of the SiO, and the junction and resistor are then contacted with another layer of NbN. A photomicrograph of a completed Nb junction is shown in Figure la. Since the bottom of the etched trilayer lies under the resistor, it acts as a ground plane, and the resistor structure can be analyzed as a lossy transmission line. The impedance of this short microstrip structure is purely real, even up to frequencies comparable to the gap frequency of the superconductor, thus providing the desired broadband shunt. However, the section of Page 444 Fourth International Symposium on Space Terahertz Technology superconductor which contacts the junction and resistor creates a non-negligible parasitic capacitance when compared to the very small area tunnel junctions used, and therefore the area of this contact pad must be kept to a minimum. From a knowledge of the geometry and thickness of the insulator (Si0), we estimate this parasitic capacitance to be 7-8 fF. Shunting of the junction is necessary to reduce the McCumber beta parameter (Pc = 2eIcRN C Ih) of the unshunted tunnel junctions. Junctions with /3, values greater than one have hysteretic I-V curves [4], and their dynamics can be complicated, including the possibility of chaos. Reduction of 13, is accomplished by resistive shunting, which reduces /3 by the square of the ratio of the initial junction resistance to the final resistance of the parallel combination of the junction and the resistive shunt. However, this shunting has the undesirable effect of reducing the 1,Rn product of the junction. For the NbN junctions used, the critical current density was about 331cA/cm 2 , and the specific capacitance is estimated to be about 150/F 1 itm [5], giving an unshunted of about 12. Thus the optimal shunted junction for these parameters would have a shunt resistance of about one-fourth of R,„ and thus an IcR7, reduced from the unshunted value of 3.0 mV to 0.8 mV. In order to maintain high enough resistances for the final device, very small (0.3pm on a side) area junctions must be used, and the parasitic capacitance will be comparable to the junction capacitance. This further reduces the final IeR, product attainable. The I-V curve of a typical device is shown in Figure lb. This device had a critical current of 11 microamps and a normal state resistance of 39 Ohms, giving an IcR, product of 430 microvolts. The IV curve is nonhysteretic and follows the RSJ model. Mixer Modelling Mixer performance can be predicted using the RSJ model, in a method similar to that used by Taur[6], but extended to the case of finite junction capacitance. The

Softwaretechnik-Trends•Apr 1, 1993•1 citation

Shunted Josephson Junctions and Optimization of Niobium Integrated Matching Circuits

M. S. Shevchenko, Artemiy A. Atepalikhin, Fedor V. Khan +3 more

Josephson junctions (JJs) with non-hysteretic I-V characteristic and high critical parameters are required for many applications; in particular, they are needed to create tunable THz range oscillators. We fabricated and studied shunted superconductor-insulator-superconductor (SIS) Nb-AlOx-Nb tunnel junctions with an area of about 1μm2, estimated their parameters, and compared them with theoretical models. To assess the performance of shunted junctions in the terahertz range, their characteristics were studied under the influence of a high-frequency signal; the estimated value of the characteristic voltage for the shunted junction at a high frequency is about 1 mV. To improve the circuit parameters, a new type of the shunting based on application of NIS junctions was proposed, which reduces the influence of parasitic inductance, expands the frequency range of the generator, and decreases the size of the structure. The JJs with a new type of shunting have been fabricated and studied. The niobium integrated circuits intended for matching the superconducting oscillator and an SIS junction as a microwave detector were designed, fabricated, and tested. Such structures are required for studying the spectral characteristics and analyzing the operation of the oscillator. The developed circuits have demonstrated efficient operation at frequencies from 300 to 700 GHz; the experimental results are in good agreement with the simulated characteristics. The results obtained will be implemented for further development of the THz range oscillators.

IEEE Transactions on Applied Superconductivity•Nov 23, 2021•7 citations

Intrinsically shunted NbN/TaN/NbN Josephson junctions on Si substrates for large-scale integrated circuits applications

Kaixin Yan, Lu Zhang, Yulong Zhong +8 more

Abstract Superconducting circuits based on Josephson junctions have the potential to achieve high speed and ultra-low power consumption, but their integration is limited by the low controllability of Nb-based tunnel junction and the existence of shunt resistors. In this work, we report the fabrication of superconductor/normal metal/superconductor (SNS) Josephson junctions with high reproducibility on oxidized Si substrates. The junctions based on NbN/TaN/NbN trilayers measured at 4.2 K show excellent Josephson properties with a wide range of critical current ( I c ) from 227 to 2000 μ A. The variations of critical current density ( J c ) and characteristic voltage ( V c ) are respectively less than 7.1% and 7.5% in the 2 inch region. The standard deviation of I c is calculated to be less than 1.7% for Josephson arrays with the number of junctions up to 10 000 occupying an area of 0.34 mm 2 . The results provide a guarantee for the applications of NbN-SNS Josephson junctions in superconducting large-scale integrated circuits.

Superconductor Science and Technology•Feb 28, 2022•7 citations
Intrinsically shunted Josephson junctions based on NbN superconducting material can exhibit RnIc products in the1-3 mV range at temperatures in the 4-10K range, while presenting non hysteretic current-voltage characteristics. For these reasons, they are a suitable alternative for digital electronics since they can be ultimately highly integrated, while operating at clock frequencies above 100 GHz. In this work, departing from some experimental data of Josephson junctions measured in different conditions, we will present the expected performances in terms of ultimate speed, bit-error-rate and temperature of operation that can be reached with such a technology, for a few breadboard digital circuits. Circuits using interface converters, Josephson transmission lines, shift registers and several flip-flop cells are investigated for this purpose. An analysis is done in order to compare the potentialities and drawbacks of this technology with its existing low-Tc and high-Tc counterparts. The emphasis will be put on the technological requirements that are necessary to be met in order to achieve a given performance.
SNS Nb/Al-AlOx/Nb Josephson junctions have been recently developed with Al layer thicknesses 30- 100 nm , for which non-hysteretic I-V characteristics have been obtained by oxidation ranging from 150 to 200 Pa.s. The Stewart-McCumber parameter of the junctions can be lower or higher than unity, depending on the above-mentioned conditions. Typical Jc values of several tens of kA/cm2 and RnIc values up to 0.5-0.7 mV at 4.2 K have been obtained, suitable for digital applications. Two interesting features of this technology are: i) the absence of external shunt resistance that can allow higher integration and; ii) the reproducibility of technological parameters that is connected to a least dependence of the Josephson critical current on the barrier thickness. In this work, we will present a detailed analysis of speed and jitter that can be expected from basic digital circuits based on such a technology. This analysis is based on the accurate experimental extraction of typical quantities, like the Stewart-McCumber parameter or specific capacitance. In particular, the influence of the temperature of operation on the performance of elementary cells will be assessed. A comparisonwith similar cells based on externally-shunted Josephson junctions will be presented in order to evaluate the ranges of parameters for which this technology exhibits some clear advantages. In particular we will show the technological constraints that need to be met in order to build circuits that can compete with existing technologies
Abstract We report on the electrical properties of NbN/TaN/NbN Josephson junctions grown on thermally oxidized silicon substrates, along with the design and fabrication of superconducting single-flux-quantum (SFQ) circuits based on these NbN superconductor/normal metal/superconductor (SNS) junctions. The critical current density ( J c ) of the junctions was found to be relatively sensitive to the barrier thickness, decreasing from 108.0 ± 8.1 kA cm −2 for a 15 nm barrier to 12.8 ± 1.9 kA cm −2 for a 30 nm barrier. For a J c of approximately 24.5 ± 2.1 kA cm −2 and a barrier thickness of 25 nm, the NbN SNS junctions are self-shunted and exhibit nonhysteretic current–voltage ( I – V ) characteristics. Especially for junctions with diameter ( φ ) ranging from 0.8 to 1.6 μ m, their critical current ( I c ) falls within the range of 110–450 μ A, making them suitable for SFQ circuits. By considering the impact of excess current and incorporating it as an additional term in the conventional resistively and capacitively shunted junction model, the I – V curves of NbN SNS junctions can be precisely described, successfully minimizing the deviation between simulations and test results. The DC-SFQ and SFQ-DC interface circuits can both operate normally, and the bias margins of cell circuits such as Josephson transmission line, confluence buffer, D flip-flop, and splitter are greater than 40%. Compared to Nb superconductor/insulator/superconductor junctions, their self-shunting characteristics and relatively thick 25 nm barriers can also enhance the integration of circuits and increase the yield to complex circuits.
An interesting feature of Superconductor Normal metal Superconductor - Josephson junctions for digital applications is due to their non-hysteretic current-voltage characteristics in a broad temperature range below Tc. This allows to design Single-Flux-Quantum (SFQ) cells without the need of external shunts. Two advantages can be drawn from this property: first the SFQ cells can be more compact which leads to a more integrated solution towards nano-devices and more complex circuits; second the absence of electrical parasitic elements associated with the wiring of resistors external to the Josephson junctions increases the performance of SFQ circuits, in particular regarding the ultimate speed of operation. For this purpose Superconductor Normal metal Insulator-Superconductor Nb/Al-AlOx/Nb Josephson junctions have been recently developed at INRiM with aluminum layer thicknesses between 30 and 100 nm. They exhibit non-hysteretic current-voltage characteristics with RnIc values higher than 0.5 mV in a broad temperature range and optimal Stewart McCumber parameters at 4.2 K for RSFQ applications. The main features of obtained SNIS junctions regarding digital applications are presented.
We present test results of a 100 GHz waveguide receiver using resistively-shunted Nb and NbN tunnel junctions. These junctions were fabricated with a process similar to that used previously with Nb junctions [1], which produces non-hysteretic devices with normal-state resistances of 30-50 Ohms, and IcRiz products of 0.5-0.75 mV. The best receiver temperature obtained to date with NbN is 270 K (DSB) with 6-7 dB of conversion loss. A receiver temperature of 390 K (DSB) was previously obtained with Nb junctions; these devices showed qualitative agreement with the predictions of the simple DC and RF current-biased RSJ model. The improvement in receiver performance is probably due to improved RF coupling of the junctions, and due to the higher IcRn products of NbN. However, these NbN devices display different pumped I-V curves and IF power curves than predicted by the RSJ model. We show that these effects can be caused by the strong interaction of the junction with the embedding circuit, and conclude that an accurate model of the impedance presented to the junction will have to be included in the RSJ simulations to compare with the observed performance. Fourth International Symposium on Space Terahertz Technology Page 443 Introduction We are studying the performance of Josephson-effect mixers using resistivelyshunted tunnel junctions in order to develop a better understanding of their behavior, the sources of noise and its limitation, and to determine how to optimize their performance. Also, we wish to compare the observed behavior and performance with the theoretical predictions of the so-called RSJ (resistively shunted junction) model, so that there will be a guide to the expected performance for different frequency regimes and device parameters. This work may be important as high-Tc SNS devices become available [P.A. Rosenthal and E.N. Grossman, these proceedings] with large Ic h?„ products, for they provide the possibility of using Josephson mixers at frequencies in the terahertz range, above the range where SIS mixers are currently available. In contrast, due to the extremely short coherence lengths of the high-Tc materials, junctions suitable for quasiparticle (SIS) mixers may not be feasible with these materials Device Fabrication We have applied the technique used for creating non-hysteretic Nb Josephson devices[1] to NbN/MgO/NbN tunnel junctions. First the junction tfilayer is fabricated, then the junction areas are patterned by electron-beam lithography and subsequently etched using reactive-ion etching (RJE) in the standard method [3]. After planarization of the etched area with evaporated SiO, a AuGe resistor is fabricated on top of the SiO, and the junction and resistor are then contacted with another layer of NbN. A photomicrograph of a completed Nb junction is shown in Figure la. Since the bottom of the etched trilayer lies under the resistor, it acts as a ground plane, and the resistor structure can be analyzed as a lossy transmission line. The impedance of this short microstrip structure is purely real, even up to frequencies comparable to the gap frequency of the superconductor, thus providing the desired broadband shunt. However, the section of Page 444 Fourth International Symposium on Space Terahertz Technology superconductor which contacts the junction and resistor creates a non-negligible parasitic capacitance when compared to the very small area tunnel junctions used, and therefore the area of this contact pad must be kept to a minimum. From a knowledge of the geometry and thickness of the insulator (Si0), we estimate this parasitic capacitance to be 7-8 fF. Shunting of the junction is necessary to reduce the McCumber beta parameter (Pc = 2eIcRN C Ih) of the unshunted tunnel junctions. Junctions with /3, values greater than one have hysteretic I-V curves [4], and their dynamics can be complicated, including the possibility of chaos. Reduction of 13, is accomplished by resistive shunting, which reduces /3 by the square of the ratio of the initial junction resistance to the final resistance of the parallel combination of the junction and the resistive shunt. However, this shunting has the undesirable effect of reducing the 1,Rn product of the junction. For the NbN junctions used, the critical current density was about 331cA/cm 2 , and the specific capacitance is estimated to be about 150/F 1 itm [5], giving an unshunted of about 12. Thus the optimal shunted junction for these parameters would have a shunt resistance of about one-fourth of R,„ and thus an IcR7, reduced from the unshunted value of 3.0 mV to 0.8 mV. In order to maintain high enough resistances for the final device, very small (0.3pm on a side) area junctions must be used, and the parasitic capacitance will be comparable to the junction capacitance. This further reduces the final IeR, product attainable. The I-V curve of a typical device is shown in Figure lb. This device had a critical current of 11 microamps and a normal state resistance of 39 Ohms, giving an IcR, product of 430 microvolts. The IV curve is nonhysteretic and follows the RSJ model. Mixer Modelling Mixer performance can be predicted using the RSJ model, in a method similar to that used by Taur[6], but extended to the case of finite junction capacitance. The
Josephson junctions (JJs) with non-hysteretic I-V characteristic and high critical parameters are required for many applications; in particular, they are needed to create tunable THz range oscillators. We fabricated and studied shunted superconductor-insulator-superconductor (SIS) Nb-AlOx-Nb tunnel junctions with an area of about 1μm2, estimated their parameters, and compared them with theoretical models. To assess the performance of shunted junctions in the terahertz range, their characteristics were studied under the influence of a high-frequency signal; the estimated value of the characteristic voltage for the shunted junction at a high frequency is about 1 mV. To improve the circuit parameters, a new type of the shunting based on application of NIS junctions was proposed, which reduces the influence of parasitic inductance, expands the frequency range of the generator, and decreases the size of the structure. The JJs with a new type of shunting have been fabricated and studied. The niobium integrated circuits intended for matching the superconducting oscillator and an SIS junction as a microwave detector were designed, fabricated, and tested. Such structures are required for studying the spectral characteristics and analyzing the operation of the oscillator. The developed circuits have demonstrated efficient operation at frequencies from 300 to 700 GHz; the experimental results are in good agreement with the simulated characteristics. The results obtained will be implemented for further development of the THz range oscillators.
Abstract Superconducting circuits based on Josephson junctions have the potential to achieve high speed and ultra-low power consumption, but their integration is limited by the low controllability of Nb-based tunnel junction and the existence of shunt resistors. In this work, we report the fabrication of superconductor/normal metal/superconductor (SNS) Josephson junctions with high reproducibility on oxidized Si substrates. The junctions based on NbN/TaN/NbN trilayers measured at 4.2 K show excellent Josephson properties with a wide range of critical current ( I c ) from 227 to 2000 μ A. The variations of critical current density ( J c ) and characteristic voltage ( V c ) are respectively less than 7.1% and 7.5% in the 2 inch region. The standard deviation of I c is calculated to be less than 1.7% for Josephson arrays with the number of junctions up to 10 000 occupying an area of 0.34 mm 2 . The results provide a guarantee for the applications of NbN-SNS Josephson junctions in superconducting large-scale integrated circuits.