Optimization of simultaneous measurement of magnetic field and temperature measurement by silicon vacancy quantum sensor using simultaneous resonance
Tanaka Tomoaki, Yamazaki Yuichi, Kojima Kazutoshi, Ohshima Takeshi
Abstract
Background and Purpose Silicon vacancies (VSi) in silicon carbide (SiC) have attracted great attention because we can measure magnetic field and temperature in some devices by fabricating VSi in the devices1,2. Simultaneous measurement of magnetic field and temperature using SiC-VSi quantum sensor requires simultaneous Optically Detected Magnetic Resonance (ODMR) measurement of the ground and excited states. However, the ODMR contrast (= sensitivity) of the excited state is about one order of magnitude smaller than that of the ground state. So, the temperature measurement is time-consuming. To solve this problem, we have proposed and demonstrated a new temperature measurement method, Simultaneous Resonance (SR) ODMR, which based on the modulation of the ODMR contrast of the ground state by simultaneous resonance of the ground and excited states3. This method converts part of the contrast of the ground state into that of the excited state. In order to perform magnetic field and temperature measurements with high sensitivity, it is necessary to optimize the RF power ratio which is related to the contrast ratio between the ground and excited states to minimize the measurement time. Therefore, the purpose of our study is to optimize the power ratio of the RF using the simultaneous measurement by SR ODMR. Methods and Results VSi dots were fabricated on p-type 4H-SiC epitaxial thin film (5.6 µm) using a particle beam writing (ion species: He, Energy: 0.5 MeV, irradiation dose: 3×105 /dots). The size and depth of the dots are 5×5 µm2 and ~1 µm, respectively. Three signal generators were used for the measurements, one fixed at the resonance frequency of the ground state (70 MHz) for SR, and the others swept near those of the ground and excited states (20-170, 300-600 MHz) for the ground state and SR ODMR measurements, respectively. Figure 1 shows the spectra of ground and SR excited states by ODMR simultaneous measurements. Signal intensities indicated by red and blue arrows are observed. The former is a resonance of the ground state, and the latter is that of the excited states. We can find that another dip indicated by green arrow around 500 MHz exists. The sweep condition indicates that this frequency corresponds to 70 MHz of the ground state measurement. This suggests that the resonance of the ground state occurs in both the ground state and SR ODMR measurements. As a result of their competition, the dip appears at around the 500 MHz on the SR ODMR side. We measured the changing of ODMR contrast of the ground and excited states when we change the RF power of signal generators. The signal intensity was almost the same at the RF power ratio of 1:9 for SR and ground state ODMR. At this condition, the contrast of SR is more than four times that of traditional excited state measurement. This suggests that we achieved faster measurement than conventional simultaneous ground and excited states measurement.