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Quantum sensing using entangled photons

Shigeki Takeuchi

Published Jan 1, 2026• 0 citations
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Abstract

In this talk, we will report our recent progress in quantum sensing using entangled photons, including quantum infrared spectroscopy (QIRS) and quantum optical coherence tomography (QOCT).
DOI
10.1364/cleo_fs.2026.fw2f.1

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This paper explores the use of photonic quantum sensing - specifically, quantum infrared spectroscopy (QIRS) - as a novel approach for inspecting devices fabricated on silicon wafers. By employing entangled photon pairs, QIRS enables infrared spectroscopy using solely a visible light source and a visible detector and is anticipated to realize substantial miniaturization and cost reduction in the future. We developed a QIRS system employing the sample as a reflector for the probe idler photons and successfully acquired the infrared reflection spectra from a single surface of a silicon wafer, demonstrating consistency with its refractive index. Furthermore, we successfully evaluated High Aspect Ratio Contact (HARC) pattern using QIRS, marking the first accurate infrared reflectivity assessment in semiconductor fabrication. This advancement paves the way for widespread practical applications.
In recent years, nonlinear quantum interferometry has been widely explored for applications like spectroscopy, optical coherence tomography, and imaging [1]. Quantum infrared spectroscopy (QIRS) uses quantum interference of generation processes of frequency-entangled visible-IR photon pairs to perform infrared spectroscopy using visible light sources and silicon-based detectors [2]. This technique utilizes a nonlinear quantum interferometer configuration where the generated IR photons pass through the sample, and the correlated visible photons are detected. The change in the detected visible photon flux with and without the sample helps extract the complex transmittance of the sample in the IR region.