Microsystems & Nanoengineering
Tesla-scale magnetic field measurement based on Sideband-overlap Zeeman spectroscopy using a functionalized MEMS vapor cell
Ju Guo, Yintao Ma, Dejiang Lu, Mingzhi Yu, Yanbin Wang, Ping Yang, Qijing Lin, Libo Zhao, Yuehua Chen
Abstract
Accurate measurement of strong magnetic fields in the Tesla range remains a persistent challenge due to calibration drift, nonlinearity, and spatial gradient sensitivity. Here, we present a compact magnetometry approach based on sideband-overlap Zeeman spectroscopy, enabled by a functionalized MEMS cesium vapor cell. The vapor cell features a dual-chamber glass–Si–glass structure with integrated microheaters on the optical window. A first-order electro-optic modulator produces optical sidebands aligned with the σ+ and $${{\rm{\sigma }}}^{-}$$ Zeeman-split components of the Cs D1 line under the hyperfine Paschen–Back regime. Magnetic field scanning from zero to Tesla-scale fields enables extraction of the frequency offset between reference and Zeeman-shifted spectra. This frequency shift is directly converted into magnetic field strength using Zeeman spectroscopy in the hyperfine Paschen–Back regime. The method resolves sixteen Zeeman transitions (eight $${{\rm{\sigma }}}^{+}$$ and eight $${{\rm{\sigma }}}^{-}$$ ), allowing measurement of a field strength of 0.6694921 T, with a single-shot resolution of 6.4 μT and a cross-transition repeatability of σB = 8.9 μT (corresponding to 13 ppm at 0.6695 T). In a millimeter-scale sensing volume, the system achieves sub-10 μT repeatability without requiring a uniform bias field. These results indicate that the microfabricated high-field magnetometer can serve as a compact and practical approach for Tesla-range field measurement and pave the way for chip-scale quantum devices.