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Hybrid quantum computing strategies for end-to-end atomistic modeling of etch chemistry: Ab initio calculations and machine learning

Gopal R. Iyer, Saravanapriyan Sriraman, John S. Drewery, Alex Paterson

Published Feb 27, 2026• 0 citations
Publisher

Abstract

Advances in quantum computing algorithms and hardware are unlocking novel solutions to numerous classically intractable problems in the physical and computational sciences. In the context of chemical screening of precursors for etch processes in integrated circuit fabrication, it is shown in this work that two critical simulation tasks—(1) generating high-accuracy ab initio chemistry data, and (2) training molecular dynamics potentials—can both be reliably performed using present-day hybrid quantum–classical approaches, namely, variational quantum eigensolvers (VQEs) and variational quantum learning models (VQLMs). First, an adaptive-VQE approach is employed to demonstrate the accuracy of quantum algorithms for bond dissociation curves and to provide a heuristic demonstration of computational scaling behavior relative to brute-force classical methods. Next, a VQLM is trained to develop a quantum machine learning–based interatomic potential to probe the chemical influence of F atoms on the dissociation of the Si–Si bond, a well-studied and highly important reaction motif in etch chemistry. It is then shown that the VQLM—following appropriate hyperparameter optimization—achieves comparable performance with the underlying ab initio training data. Through this work, we illustrate how quantum computing approaches may provide valuable tools for research and development in the semiconductor fabrication industry as the technology matures.

DOI
10.1116/5.0300706

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Advances in quantum computing algorithms and hardware are unlocking novel solutions to numerous classically intractable problems in the physical and computational sciences. In the context of chemical screening of precursors for etch processes in integrated circuit fabrication, it is shown in this work that two critical simulation tasks—(1) generating high-accuracy ab initio chemistry data, and (2) training molecular dynamics potentials—can both be reliably performed using present-day hybrid quantum–classical approaches, namely, variational quantum eigensolvers (VQEs) and variational quantum learning models (VQLMs). First, an adaptive-VQE approach is employed to demonstrate the accuracy of quantum algorithms for bond dissociation curves and to provide a heuristic demonstration of computational scaling behavior relative to brute-force classical methods. Next, a VQLM is trained to develop a quantum machine learning–based interatomic potential to probe the chemical influence of F atoms on the dissociation of the Si–Si bond, a well-studied and highly important reaction motif in etch chemistry. It is then shown that the VQLM—following appropriate hyperparameter optimization—achieves comparable performance with the underlying ab initio training data. Through this work, we illustrate how quantum computing approaches may provide valuable tools for research and development in the semiconductor fabrication industry as the technology matures.
Accurate prediction of molecular structures and properties is vital for chemistry; materials science, and drug discovery, yet classical electronic-structure methods often fail for strongly correlated systems, large basis sets, and complex potential-energy landscapes. Quantum technology encompassing quantum computing, quantum machine learning, and hybrid quantum classical strategies offers a fundamentally new paradigm by encoding many-electron wave functions directly on qubits and exploiting superposition and entanglement to explore exponentially large Hilbert spaces. This review synthesizes recent algorithmic and hardware advances relevant to molecular modelling, including the Variational Quantum Eigensolver (VQE), Quantum Phase Estimation (QPE), quantum unitary coupled-cluster (q-UCC) families, equation-of-motion and subspace methods for excited states, tensor-network hybrids, and quantum kernel and variational QML approaches. We examine noise-aware hybrid workflows, error-mitigation techniques, symmetry-preserving ansätze, and operator-factorization methods that reduce measurement and gate overhead. Representative applications are discussed: ground- and excited-state energy prediction, potential-energy surface mapping, geometry and transition-state optimization, spectroscopic property estimation (IR, UV–Vis, NMR, EPR), and reaction-dynamics scenarios where non-adiabatic effects and conical intersections dominate. Resource estimates and scaling analyses clarify current NISQ limitations qubit counts, circuit depth, shot complexity and delineate the roadmap to fault-tolerant QPE for chemical accuracy. We compare quantum approaches with classical baselines (DFT, CCSD (T), multireference methods), identifying domains where quantum methods already show promise (strong correlation, multi-reference dissociation, spin-state ordering) and where classical methods remain competitive. Finally, we highlight near-term industrial opportunities in drug design, catalysis, CO2 capture, and energy materials, and outline critical research directions: algorithmic reductions in measurement/precision cost, hardware improvements in fidelity and connectivity, scalable ansatz design, and integrated software stacks for reproducible hybrid simulations. Together, these developments indicate that while practical, large-scale quantum advantage for general chemistry remains future work, quantum technologies are rapidly maturing into powerful tools for targeted molecular problems that are intractable with existing classical techniques.
The advancements in classical computational components such as CPUs and GPUs have had a reverberating impact on the democratization of computational power available, with the field of computational chemistry reaping significant benefits from the propulsion of the limits of systems studied. The accurate prediction of chemical properties and reaction dynamics through computational simulation is now a centerpiece of modern chemical research, significantly accelerating discoveries research areas of materials science and drug development, as well as industrially relevant processes such as the emission of aldehydes from soft foams, flame retardants and pyrolysis and the carbonylation of epoxides. These achievements of computational chemistry still are overshadowed in the face of fundamental bottlenecks where classical methods remain constrained by the exponential scaling when treating large and/or strongly correlated quantum many-body systems. This innate computational complexity often constitutes chemically accurate calculations based on first principles impractical, or plain impossible, for systems beyond modest sizes. Quantum computing offers a potential pathway around these limitations, originally formally formulated by David Deutsch as a tool for simulating quantum systems, with the first quantum algorithms indicating speed-ups compared to classical counterparts arising from Peter Shor and Lov Grover for the prime factorization of an integer number and unstructured search respectively. Relying on fundamental theorems by Claude Shannon, it has been demonstrated that through the use of error-correcting codes fault-tolerant quantum computers are able to safeguard information against noise and decoherence, strongly indicating towards exponential speedups in solving central computational chemistry problems, such as determining ground state energies or reaction pathways of chemical systems. Substantial strides in experimental quantum computing over the past decade, including proof-of-principle demonstrations of quantum error correction, mean to bring full-scale fault-tolerant quantum computing within the grasp of humanity. The breakthroughs needed to attain scalable, error-corrected quantum computation with capabilities exceeding those of classical methods in real-world scenarios is likely still some years away. While striving to address the engineering challenges standing in the way of achieving fault tolerant quantum computing, substantial effort has been focused toward developing and benchmarking hybrid algorithms tailored for the Noisy Intermediate- Scale Quantum (NISQ) devices, available now to researchers. These hybrid quantum-classical algorithms, with the most notable being the Variational Quantum Eigensolver (VQE), allow the probing of quantum computing’s utility in computational chemistry even in the face of significant hardware noise and limited coherence times. The work presented in this thesis introduces several key additions the VQE framework, geared especially towards to NISQ hardware, where the mindful use of available resources is imperative. First, the implementation of the Conjugate Model Search optimizer is described, an optimization method that integrates simple models that are surrogate to the original function, combined with conjugate gradient optimization to navigate effectively parameter landscapes typical of variational algorithms, prone to noise. Second, this thesis contains the proposal and extensive study of a hyperparameter tuning procedure employing genetic algorithms, allowing for comprehensive simulation benchmarks that augment the robustness and efficiency of VQE implementations with respect to convergence time through real wall-time models of quantum processors. Continuing, a bridge is presented between quantum simulation and quantum chemistry, through qubit-to-fermion mappings of existing quantum gates, further enabling the direct and accurate modeling of chemical systems on trapped atom quantum hardware with the added arsenal provided by techniques designed for qubit architectures. Additionally, experimental data contained in this thesis include detailed benchmarking data collected from state-of-the-art trapped ion quantum processors available at the Johannes Gutenberg Universität Mainz, demonstrating the actual viability and performance of various methodologies for extracting results. Lastly, the state of VQE is examined, as it served as a springboard for a plethora of advancements in the development of quantum computing hardware, as well as the direction the field of simulation of computational quantum chemistry via quantum devices is headed towards in the coming years.
Hybrid artificial intelligence–quantum (AI–Q) models arise at the intersection of two rapidly advancing computational paradigms, promising unprecedented capabilities for real-time molecular structure prediction. In classical computational chemistry, the accurate determination of ground-state energies and optimized geometries relies on ab initio methods such as density functional theory (DFT) and coupled-cluster approaches, which, while highly precise, exhibit steep polynomial or exponential scaling with system size. Conversely, deep neural networks (DNNs) have demonstrated remarkable success in learning potential energy surfaces (PES) from large datasets, achieving rapid inference but sometimes lacking the ultimate chemical accuracy required for predictive applications in drug discovery or materials design. On the other hand, variational quantum eigensolvers (VQEs) leverage the intrinsic parallelism of quantum hardware to approximate electronic structure problems, yet they remain constrained by qubit coherence times, gate fidelities, and circuit depth limitations inherent to noisy intermediate-scale quantum (NISQ) devices.
Abstract: This study explores the implementation of hybrid quantum-classical algorithms in the realm of drug discovery and molecular simulation, with an emphasis on optimizing molecular interaction prediction. The integration of quantum computing paradigms, particularly the Variational Quantum Eigensolver (VQE), with classical machine learning techniques is evaluated for its efficacy in simulating molecular systems. Key results demonstrate superior accuracy in predicting binding affinities and reaction energetics using the hybrid models compared to traditional methods. The findings offer significant implications for accelerating the drug development pipeline, particularly in early-stage candidate screening. Keywords: Hybrid computing, Quantum simulation, Molecular interaction, Drug discovery, Variational Quantum Eigensolver, Quantum-classical integration
Accurate and scalable methods for computational quantum chemistry can accelerate research and development in many fields, ranging from drug discovery to advanced material design. Solving the electronic Schrodinger equation is the core problem of computational chemistry. However, the combinatorial complexity of this problem makes it intractable to find exact solutions, except for very small systems. The idea of quantum computing originated from this computational challenge in simulating quantum-mechanics. We propose an end-to-end quantum chemistry pipeline based on the variational quantum eigensolver (VQE) algorithm and integrated with both HPC-based simulators and a trapped-ion quantum computer. Our platform orchestrates hundreds of simulation jobs on compute resources to efficiently complete a set of ab initio chemistry experiments with a wide range of parameterization. Per- and poly-fluoroalkyl substances (PFAS) are a large family of human-made chemicals that pose a major environmental and health issue globally. Our simulations includes breaking a Carbon-Fluorine bond in trifluoroacetic acid (TFA), a common PFAS chemical. This is a common pathway towards destruction and removal of PFAS. Molecules are modeled on both a quantum simulator and a trapped-ion quantum computer, specifically IonQ Aria. Using basic error mitigation techniques, the 11-qubit TFA model (56 entangling gates) on IonQ Aria yields near-quantitative results with milli-Hartree accuracy. Our novel results show the current state and future projections for quantum computing in solving the electronic structure problem, push the boundaries for the VQE algorithm and quantum computers, and facilitates development of quantum chemistry workflows.
Accurate and efficient prediction of electronic wavefunctions is central to ab initio molecular dynamics (AIMD) and electronic structure theory. However, conventional ab initio methods require self-consistent optimization of electronic states at every nuclear configuration, leading to prohibitive computational costs, especially for large or strongly correlated systems. Here, we introduce a quantum-centric machine learning (QCML) model-a hybrid quantum-classical framework that integrates parameterized quantum circuits (PQCs) with Transformer-based machine learning to directly predict molecular wavefunctions and quantum observables. By pretraining the Transformer on a diverse dataset of molecules and ansatz types and subsequently fine-tuning it for specific systems, QCML learns transferable mappings between molecular descriptors and PQC parameters, eliminating the need for iterative variational optimization. The pretrained model achieves chemical accuracy in potential energy surfaces, atomic forces, and dipole moments across multiple molecules and ansatzes, and enables efficient AIMD simulations with infrared spectra prediction. This work establishes a scalable and transferable quantum-centric machine learning paradigm, bridging variational quantum algorithms and modern deep learning for next-generation molecular simulation and quantum chemistry applications.