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Tunable superconducting microwave resonator for quantum transduction

Hana K. Warner, Shima Rajabali, Seunghyun Park, Nayely Rolon-Gomez, Donald M. Witt, Amir Yacoby, Marko Lončar

Published Sep 22, 2025• 0 citations
Publisher

Abstract

This work presents a superconducting microwave resonator that is both frequency tunable and compatible with photolithography. This design is well-suited for integration with electro-optic devices. We demonstrate tuning ranges exceeding 500 MHz, using a bulk permanent magnet, and 100 MHz, using planar coils, under moderate magnetic fields (below 5 mT).

DOI
10.1051/epjconf/202533506012/pdf

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This work presents a superconducting microwave resonator that is both frequency tunable and compatible with photolithography. This design is well-suited for integration with electro-optic devices. We demonstrate tuning ranges exceeding 500 MHz, using a bulk permanent magnet, and 100 MHz, using planar coils, under moderate magnetic fields (below 5 mT).
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In this licentiate thesis design, fabrication, and measurements of tunable superconducting microwave transmission line resonators are described. The resonators are of quarter wavelength type were the tuning is achieved by changing one of the boundary conditions of the resonator through a tunable impedance. As tunable impedance the Josephson inductance in form of SQUIDs is used. The Josephson inductance can then be tuned by applying a magnetic field to the SQUID loop. A tuning range of 750 MHz for a 5 GHz resonator is achieved, and as a figure of merit it can be tuned over 200 line widths. The purpose of the tunable resonators is to use them for dynamic coupling of superconducting quantum bits, this requires that the resonators can be tuned fast on the timescale of the resonator-qubit coupling. To measure tuning speeds faster then the ring up time of the resonators a method that measures the leakage of energy out of a detuned resonator was developed. With this method a frequency shift of the energy stored in the resonator can be measured. A detuning of 330 MHz in less than 10 ns is demonstrated for a 4.5 GHz resonator with a quality factor of 104^44. Working in the few photon limit indicates that the devices can be used to change the frequency of individual photons, this is however still to be demonstrated. As a part of this work the dressed states of a superconducting charge qubit was also studied.
We present fast tunable superconducting microwave resonators fabricated from planar NbN\mathrm{Nb}\mathrm{N}NbN on a sapphire substrate. The $3\ensuremath{\lambda}/4$ wavelength resonators are tuning fork shaped and tuned by passing a dc current that controls the kinetic inductance of the tuning fork prongs. The $\ensuremath{\lambda}/4$ section from the open end operates as an integrated impedance converter that creates a nearly perfect short for microwave currents at the dc terminal coupling points, thus preventing microwave energy leakage through the dc lines. We measure an internal quality factor Qint>105{Q}_{\mathrm{int}}>{10}^{5}Qint​>105 over the entire tuning range. We demonstrate a tuning range of greater than $3\mathrm{%}$ and tuning response times as short as 20 ns for the maximum achievable detuning. Because of the quasifractal design, the resonators are resilient to magnetic fields of up to 0.5 T.