Superconducting qubits are a leading platform for scalable quantum computation. This platform offers high gate speeds and can make use of readily scalable complementary metal-oxide semiconductor (CMOS) fabrication techniques. However, superconducting qubits are susceptible to a variety of losses that arise in systems with superconductors, such as due to ubiquitous two-level systems, quasiparticles, and more. Designing fabrication processes to mitigate and manage these loss sources is critical to achieving scalable quantum computation. However, many of these loss sources are set during fabrication processing, of which there can be many different steps, each with its own parameter space. Exploring this space with qubits would be prohibitively time-consuming. Coplanar waveguide resonators provide a suitable proxy system for minimizing loss while costing less time and money to fabricate and measure. In this thesis, we explore the results of such an optimization performed on niobium resonators. Niobium is a widely used material platform for superconducting qubit circuits. We report highly consistent state-of-the-art resonator quality factors, with clear improvements over the previous fabrication recipe, and correlate the observed improvements to the internal quality factors with microstructural changes induced by hydrofluoric acid treatment, photoresist stripping, and choice of sputter deposition conditions. Additionally, we provide a detailed description of our fab process to ensure reproducibility in other lab facilities. Finally, we address some intriguing anomalies uncovered in temperature-dependent quality factors of the niobium resonators and show a correlation of the quality factors with compressive film stress.
Superconducting qubits are a leading platform for scalable quantum computation. This platform offers high gate speeds and can make use of readily scalable complementary metal-oxide semiconductor (CMOS) fabrication techniques. However, superconducting qubits are susceptible to a variety of losses that arise in systems with superconductors, such as due to ubiquitous two-level systems, quasiparticles, and more. Designing fabrication processes to mitigate and manage these loss sources is critical to achieving scalable quantum computation. However, many of these loss sources are set during fabrication processing, of which there can be many different steps, each with its own parameter space. Exploring this space with qubits would be prohibitively time-consuming. Coplanar waveguide resonators provide a suitable proxy system for minimizing loss while costing less time and money to fabricate and measure. In this thesis, we explore the results of such an optimization performed on niobium resonators. Niobium is a widely used material platform for superconducting qubit circuits. We report highly consistent state-of-the-art resonator quality factors, with clear improvements over the previous fabrication recipe, and correlate the observed improvements to the internal quality factors with microstructural changes induced by hydrofluoric acid treatment, photoresist stripping, and choice of sputter deposition conditions. Additionally, we provide a detailed description of our fab process to ensure reproducibility in other lab facilities. Finally, we address some intriguing anomalies uncovered in temperature-dependent quality factors of the niobium resonators and show a correlation of the quality factors with compressive film stress.
Superconducting coplanar waveguide resonators are essential components in quantum processors, where their internal quality factor (Qi) constrains qubit coherence and readout fidelity. In niobium devices, microwave losses at millikelvin temperatures are strongly influenced by two-level systems (TLS) associated with the complex NbOx surface oxide. To mitigate these losses, we investigate a surface-engineering approach in which Nb films are capped in situ with a thin tantalum layer to suppress Nb2O5 formation and replace the native NbOx interface with a Ta-based oxide.
We fabricate Nb/Ta bilayer and reference Nb resonators on high-resistivity silicon using identical DC sputtering and wet etching conditions, and characterize their performance at millikelvin temperatures. Fresh Ta-encapsulated devices exhibit internal quality factors up to 2.4 x 10^6 in the near-single-photon regime, with power dependence consistent with reduced TLS-related loss at the metal-air interface. A control Nb device fabricated under the same process shows comparatively lower Q_TLS, consistent with the beneficial effect of the Ta capping layer. Furthermore, ageing tests performed on Nb/Ta resonators after six months reveal a moderate reduction in Q_TLS relative to their initial values, yet the performance remains superior to newly fabricated Nb-only devices. These results suggest that thin Ta encapsulation enhances interface quality and contributes to improved temporal stability while remaining compatible with Nb-based fabrication workflows.
Niobium and aluminum have been widely used to realize superconducting resonators and qubits. However, the native oxide at the metal air interface limits the devices results. This layer is highly disordered, and it induces losses limiting the performances of the resonators or qubits. Recently, tantalum led to great improvement in qubit relaxation time. This improvement has been attributed to a thinner and less disordered oxide layer compared to Nb and Al. This study is aimed to limit the formation of the oxide layer, by the introduction of novel superconducting materials such as rhenium or by encapsulating the Nb surface with other superconducting materials such as Ta, Al, Re or other non-superconducting materials such as Au. To better understand the results, we are realizing these studies on coplanar waveguide resonators where the relation between surface losses and quality factor is clear. We are also analyzing different fabrication techniques to completely characterize our devices, linking material properties to the performances. In this work we are also varying the participation ratio of the devices in order to extract with higher fidelity and precision the losses introduced by the involved interfaces.
While significant strides have been made to increase the coherence time of superconducting qubits, further advancements are essential for realizing scalable quantum computing. Decoherence is often a result of loss and noise stemming from two-level systems and excess quasiparticles, arising due to material defects, fabrication processes, and ambient exposure, particularly at surfaces and interfaces. Our recent efforts to mitigate these decoherence mechanisms have employed a variety of strategies, including low-loss surface encapsulation materials, advanced substrate preparation techniques, modifications to metal film growth, and the development of novel fabrication processes. The structural and chemical properties of materials, surfaces, and interfaces are studied using scanning probe microscopy, electron microscopy, photoelectron spectroscopy, mass spectrometry, and X-ray diffraction, which is correlated to device performance metrics, including superconducting resonator internal quality factor and qubit T1 time. This information is used to identify and understand material sources of loss and their origins in the device fabrication process. Through multi-institution efforts within SQMS we have identified the loss mechanism of interstitial hydrogen in niobium-based devices and shown how standard fabrication processes introduce these hydrides, developing strategies to mitigate their formation.1 Furthermore, we have characterized the metal-substrate interface, including the loss of niobium-silicides formed at that interface, and developed silicon surface treatments that reduce atomic scale roughness and oxygen content at the metal-substrate and Josephson junction interfaces.2-4 By developing the connection between materials properties and the overall performance of superconducting quantum circuitry, we can develop fabrication strategies to mitigate material losses, thus supporting the ongoing efforts to enhance coherence time in superconducting quantum devices. 1. Torres-Castanedo, C. G.*, Goronzy, D. P.*, et al., Adv. Funct. Mater., 2401365 (2024) 2. Lu, X., et al., Phys. Rev. Materials 6, 064402 (2022) 3. Berti, G., Appl. Phys. Lett. 122, 192605 (2023) 4. Kopas, C. J., Goronzy, D. P., et al., arXiv:2408.02863 (2024)
Superconducting quantum circuits (SQC) are one of the most promising hardware platforms for quantum computing, yet their performance is currently limited by the presence of various structural defects inside the circuit’s structure. Despite impressive progress in the past decade, a precise understanding of the origin of these defects from various fabrication processes and their impact on coherence is still lacking. In this study, we performed a comprehensive investigation on the microstructure, superconductivity, and resonator quality factor of Nb films deposited by high-power impulse magnetron sputtering (HiPIMS) and direct current (DC) magnetron sputtering. A suite of characterization techniques, including electron microscopy with spectroscopy, secondary ion mass spectrometry, magneto-optical microscopy, and pump-probe reflectivity spectroscopy is used. We reveal that niobium (Nb) resonators fabricated using HiPIMS exhibit a smaller average grain size, thicker surface oxide with larger thickness variations (rougher surface), and a thicker amorphous Nb/Si interface layer compared to samples deposited by DC sputtering. We identified that the amorphous Nb oxides (mainly located at the Nb surface and along the grain boundaries) and Nb-Si amorphous layers (at the Nb/Si interface) are major and potential sources of two-level system (TLS), while off-stochiometric oxides and suboxides of Nb close to the surface, crystalline defects (i.e., dislocations at GB, point defects introduced during deposition) are main contributors of non-TLS sources. Our findings clarify the relationship between different defects and coherence loss mechanisms, highlighting the importance of material microstructure control on performance optimization in SQC.
In this master's thesis, I present the design, fabrication, and characterisation of superconducting microwave resonators. These resonators are quarter-wavelength coplanar waveguide resonators, operating at resonance frequencies between 4 GHz and 8 GHz. This kind of resonator is a key component in several applications, ranging from quantum computation devices to parametric amplifiers. Minimising the losses (achieving high internal quality factors) in these resonators is important to maximise performance of the applications they are used for. During the thesis work, we have studied several possible changes to improve the resonator quality.\n\nFabrication of the resonators was done in the Nanofabrication Laboratory at Chalmers University of Technology, and consist of the following steps: cleaning a sapphire or silicon wafer, depositing a layer of superconducting niobium, photolithography, and etching the waveguide. We then measured the resonators in a cryogen-free dilution refrigerator, at a temperature of 10 mK. The measurements consisted of a power sweep, in order to quantify the quality factor at high and low excitation powers. As an example, the first resonator we fabricated had a quality factor of 4.3 x 10^4 at high power (about 10^5 photons in the resonator), and quality factor of 3.7 x 10^4 at the single-photon level.\n\nWe then investigated different loss mechanisms that we expect to negatively affect the quality factor, and how to reduce this loss. Firstly, to reduce radiation losses and magnetic vortex losses, we reduced the lateral dimensions of the resonator. Secondly, as two-level system (TLS) losses are believed to mainly reside at the surfaces of the materials and interfaces between them, we etched into the substrate to selectively move a part of the TLS away from the resonator. We also studied the effect of the meandering of the resonator on the quality factor, as well as using two different etching gasses.\n\nBy gathering all this data, we were then able to compare the different combinations to see the effect of the changing parameters. In conclusion, the reduced lateral dimensions and the removal of part of the substrate indeed reduce the losses, as expected from the theory. We also found interesting behaviour with regards to the meandering, namely that having a meandered structure negatively affects the quality factor.\n\nCombining all results, we can give a guideline for the fabrication of resonators in the future, which gave us a quality factor up to 4.9 x 10^5 at high excitation power, and 3.0 x 10^5 at the single photon level.
Superconducting coplanar waveguide (CPW) microwave resonators in quantum circuits are the best components for reading and changing the state of artificial atoms because of their excellent coupling to quantum systems. This coupling forms the basis of the developing circuit quantum electrodynamic architecture. In quantum processors, oscillators are used to store and transmit quantum information using microwave-frequency wave packets. However, the presence of amorphous thin-film defects is deleterious and can result in an irrevocable loss of coherent information with uncontrolled degrees of freedom. Although there has been extensive research into techniques to reduce the coherent loss of such devices, the precise structure of amorphous dielectric layers on surfaces and interfaces and their associated loss mechanism are being actively studied. In particular, planar superconducting resonators are very sensitive to defects on their surfaces, such as two-level systems in oxidized metals and nonequilibrium quasiparticles, making these devices suitable probes for the different loss mechanisms. In this work, we present the design, fabrication, and characterization of Nb CPW resonators with different surface treatments with self-assembled monolayers (SAMs), which mitigate the growth of oxides in superconducting circuits. We demonstrate SAM-passivated resonators having internal quality factors of greater than 10 6 at a single-photon excitation power (measured at 100 mK), which were probed using scanning electron microscopy, X-ray photoelectron spectroscopy, and transmission electron microscopy to demonstrate the efficiency of our surface treatment. Finally, we compared the improvements in the experimental quality factors to those obtained by numerical simulation.