IEEE/LEOS Summer Topical Meetings

Heterogeneous Integration of MEMS and Photonic Integrated Circuits for Chip-scale Atomic Spectrometers

Jeremi Januszewicz, A. P. McWilliams, S. Dyer, J. P. McGilligan, Paul F. Griffin, Erling Riis, Eugenio Di Gaetano, Marc Sorel, Kevin Francis Gallacher, Douglas J. Paul

Published Jul 21, 2025• 0 citations

Publisher

Abstract

An integrated MEMS cell on a photonic integrated circuit is demonstrated which can achieve saturated absorption spectroscopy that resolves sub-Doppler hyperfine splittings in two rubidium isotopes with Lorenzian linewidths from 25 to 40 MHz.

DOI: 10.1109/sum65312.2025.11121774

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