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Smart Photonic and Optoelectronic Integrated Circuits

Integrated quantum photonics in 3C-SiCOI platforms

Andrew W. O. Poon, Qianni Zhang, Jiantao Wang

Published Mar 19, 2025• 0 citations
Publisher

Abstract

3C-silicon carbide-on-insulator (3C-SiCOI) is an emerging photonic platform for integrated quantum photonics due to its moderate second- and third-order optical nonlinearities, wide bandgap energy, and compatibility with silicon complementary metal-oxide-semiconductor technologies. In this work, we report our progress in photon-pair generation and quantum state manipulation on the 3C-SiCOI platform. We demonstrate the generation of photon pairs through the spontaneous parametric down-conversion process using modal phase-matching in an elliptical microring resonator on this platform. We will present the design principle and recent progress of our experimental work.

DOI
10.1117/12.3040491

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3C-silicon carbide-on-insulator (3C-SiCOI) is an emerging photonic platform for integrated quantum photonics due to its moderate second- and third-order optical nonlinearities, wide bandgap energy, and compatibility with silicon complementary metal-oxide-semiconductor technologies. In this work, we report our progress in photon-pair generation and quantum state manipulation on the 3C-SiCOI platform. We demonstrate the generation of photon pairs through the spontaneous parametric down-conversion process using modal phase-matching in an elliptical microring resonator on this platform. We will present the design principle and recent progress of our experimental work.
Abstract Silicon carbide (SiC) polytypes are emerging for integrated nonlinear and quantum photonics due to their wide-bandgap energies, second-order optic nonlinearity and process compatibility with complementary metal-oxide-semiconductor technologies. Among polytypes, 3C-SiC is the only one epitaxially grown on wafer-scale silicon substrates. However, on-chip nonlinear and quantum light sources leveraging the second-order nonlinearity of 3C-SiC have not been reported to our knowledge. Here, we design and fabricate an elliptical microring on 3C-SiC. We demonstrate a nonlinear light source with a second-harmonic generation efficiency of 17.4±0.2%W−117.4\pm 0.2 \% {W}^{-1}17.4±0.2%W−1 17.4 ± 0.2 % W − 1 and difference-frequency generation with a signal-idler bandwidth of 97 nm. We demonstrate a spontaneous parametric down-conversion source with a photon-pair generation rate of 4.8 MHz and a coincidence-to-accidental ratio of 3361±843361\pm 843361±84 3361 ± 84 . We measure a low heralded single-photon second-order coherence gH(2)=0.0007{g}_{H}^{\left(2\right)}=0.0007gH(2)​=0.0007 g H 2 = 0.0007 . We observe time-bin entanglement with a visibility of 86.0±2.4%86.0\pm 2.4 \%86.0±2.4% 86.0 ± 2.4 % using this source. Our work paves a way toward SiC-based on-chip nonlinear and quantum photonic circuits.
4H silicon carbide, as a silicon-based nonlinear optical material platform, exhibits a large bandgap energy, a wide transparent window and moderate second- and third-order optical nonlinearities. The availability of chip-based visible-wavelength nonlinear and quantum light sources pave the way for quantum communications as well as bio-, atomic-, and molecular-related nonlinear and quantum photonic devices and applications on a chip. Microring resonators on the 4H-SiC- on-insulator platform are ideal for efficiently generating nonlinear and quantum light sources integrated with large-scale photonic integrated circuits. In this work, we report our progress in demonstrating such quantum light sources in the visible/near-infrared wavelengths through spontaneous parametric down-conversion in 4H-SiCOI microring resonators utilizing the type-II phase matching.
Photonic quantum information processing and communication demand highly integrated device platforms, which can offer high-fidelity control of quantum states and seamless interface with fiber-optic networks simultaneously. Exploiting the unique quantum emitter characteristics compatible with photonic transduction, combined with the outstanding nonlinear optical properties of silicon carbide (SiC), we propose and numerically investigate a single-crystal cubic SiC-on-insulator (3C-SiCOI) platform toward multi-functional integrated quantum photonic circuit. Benchmarking with the state-of-the-art demonstrations on individual components, we have systematically engineered and optimized device specifications and functions, including state control via cavity quantum electrodynamics and frequency conversion between quantum emission and telecommunication wavelengths, while also considering the manufacturing aspects. This work will provide concrete guidelines and quantitative design considerations for realizing future SiCOI integrated photonic circuitry toward quantum information applications.
The demand for integrated photonic chips combining the generation and manipulation of quantum states of light is steadily increasing, driven by the need for compact and scalable platforms for quantum information technologies. While photonic circuits with diverse functionalities are being developed in different single material platforms, it has become crucial to realize hybrid photonic circuits that harness the advantages of multiple materials while mitigating their respective weaknesses, resulting in enhanced capabilities. Here, we demonstrate a hybrid III-V/Silicon quantum photonic device combining the strong second-order nonlinearity and direct bandgap of the III-V semiconductor platform with the high maturity and CMOS compatibility of the silicon photonic platform. Our device embeds the spontaneous parametric down-conversion (SPDC) of photon pairs into an AlGaAs source and their vertical routing to an adhesively-bonded silicon-on-insulator circuitry, within an evanescent coupling scheme managing both polarization states. This enables the on-chip generation of broadband (> 40 nm) telecom photons by type 0 and type 2 SPDC from the hybrid device, at room temperature and with internal pair generation rates exceeding 10510^5105 s−1s^{-1}s−1 for both types, while the pump beam is strongly rejected. Two-photon interference with 92% visibility (and up to 99% upon 5 nm spectral filtering) proves the high energy-time entanglement quality of the produced quantum state, thereby enabling a wide range of quantum information applications on-chip, within an hybrid architecture compliant with electrical pumping and merging the assets of two mature and highly complementary platforms in view of out-of-the-lab deployment of quantum technologies.
Entangled photon sources are fundamental building blocks for quantum communication and quantum networks. Recently, silicon carbide emerged as a promising material for integrated quantum devices since it is CMOS compatible with favorable mechanical, electrical and photonic properties. In this work, we report the progress on the entangled photon pair generation at the telecom wavelength (1550 nm), which is achieved by implementing the spontaneous four-wave mixing process in a compact silicon carbide microring resonator. We will present the design principle, experimental set-up, and results of this work.