Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Log inSign up
Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Blog
Job Board
Q3AS

© 2026 Aqora Quantum S.A.S.

TermsPrivacyLegal Notice

European Frequency and Time Forum

Compact Optical Frequency Standard with MEMS Vapor Cells

Qiaohui Yang, Zhenyu Hu, Tianyu Liu, Jie Miao, Zhendong Chen, Jingmin Chen, Duo Pan, Zhiwei Li, Xianlong Wei, Jingbiao Chen

Published Jun 25, 2024• 0 citations
Publisher

Abstract

This work introduces an innovative optical frequency standard that leverages MEMS vapor cells to achieve exceptional stability. To attain these objectives, we have integrated the modulation transfer spectroscopy (MTS) technique, which not only ensures high stability but also contributes to minimal power consumption in a compact form factor. Employing MTS with a high signal-to-noise ratio and utilizing a full bandwidth, high-speed servo feedback, we have successfully stabilized the laser frequency at the hyperfine transitions of rubidium atomic lines within the MEMS vapor cell. Furthermore, after the laser is locked, there is a significant narrowing effect on the laser linewidth. The current specifications of our compact optical frequency standard include a frequency Allan deviation of 4.8E-13@1s and the laser linewidth of only 18 kHz.

DOI
10.1109/eftf61992.2024.10722316

Related papers

Compact optical frequency standard using a wafer-level MEMS vapor cell

Qiaohui Yang, Zhenyu Hu, Tian Liu +6 more

Atomic clocks represent the most advanced instruments for providing time-frequency standards, with increasing demand for designs that offer high frequency stability while minimizing size. Central to an atomic clock’s function is the atomic vapor cell, which serves as the quantum reference. Compared to traditional cells, wafer-level micro-electro-mechanical systems (MEMS) vapor cells enable cost-effective, scalable production and facilitate integration with silicon-based chips. In this work, we present a wafer-level MEMS vapor cell featuring an innovative silicon-glass-silicon transverse optical path structure. A single wafer is used to fabricate 24 identical atomic vapor cells, each with precise dimensions of 14 mm×14 mm×4.3 mm, ensuring scalability. We demonstrate an optical frequency standard that combines modulation transfer spectroscopy (MTS) with a MEMS vapor cell, featuring a compact design with excellent performance. This frequency standard achieves stability over averaging times of 1–400 s, with short-term stability of 2.6×10 −13 at 1 s and 5.1×10 −14 at 200 s. The laser linewidth is only 3.9 kHz, marking a substantial improvement over existing thermal standards, and opening potential applications in navigation, radar, and precision measurement. This work provides a crucial step toward the development of chip-scale optical clocks.

Photonics Research•Jun 12, 2025•9 citations

Compact optical frequency standard based on a miniature cell using modulation transfer spectroscopy

Jiqing Lian, Qiaohui Yang, Tianyu Liu +8 more

This study investigates the application of miniature quantum references within small-scale optical atomic frequency standards, utilizing a diminutive 87 Rb glass cell, dimensions of 6 mm × 6 mm × 6 mm, to establish a quantum frequency standard.By employing the transition spectrum from 5 2 S 1/2 F = 2 to 5 2 P 3/2 F 0 =3, this study successfully demonstrates the development of a compact rubidium atomic optical frequency standard via modulation transfer spectroscopy (MTS).Subsequent to frequency stabilization, the 780 nm clock laser exhibits a linewidth of 6.9 kHz, and its out-of-loop short-term stability reaches 4.1 × 10 -13 @ 1 s, as confirmed through beat frequency analysis.This research not only provides a practical blueprint for the development of small optical atomic frequency standards but also lays down essential groundwork for future advancements in chip-level optical frequency standard technologies.

Chinese Optics Letters•Jan 1, 2025•2 citations

A Compact Rubidium Optical Clock Based on Modulation Transfer Spectrum

Zhendong Chen, Ruoao Yang, Yang Qiaohui +7 more

A compact rubidium optical clock is presented, incorporating an optical frequency standard, a fiber frequency comb, and associated control electronics. Modulation transfer spectroscopy, devoid of Doppler background and characterized by a high signal-to-noise ratio and sensitivity, is employed to lock the laser frequency to the hyperfine transitions of rubidium atomic lines. The clock exhibits a short-term stability of 4.10 × 10-13at a 1-second gate time, and the stability remains below 7.27 × 10-13up to 1000 seconds. These results offer a promising alternative approach for the development of portable optical clocks.

IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)•Sep 22, 2024•0 citations

Chip-scale Optical Clock Based on Modulation Transfer Spectroscopy

Qiaohui Yang, Tianyu Liu, Jie Miao +2 more

SummaryWe propose a scheme for realizing a chip-scale optical clock based on modulation transfer spectroscopy. By using on-chip laser, lithium niobate thin film waveguides and MEMS cells, the laser frequency can be stabilized at the hyperfine transition of rubidium atomic line. In this way, the volume and power consumption of the optical clock can be greatly reduced while the performance is guaranteed.

Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS)•May 15, 2023•0 citations

Frequency stabilization and linewidth narrowing with modulation transfer spectroscopy

Xi Zhang, Hui Liu, Kunliang Jiang +4 more

We report laser frequency stabilization with modulation transfer spectroscopy (MTS) on 85 Rb atoms. With both PZT (piezo-electric transducer) slow-loop feedback and current fastloop feedback to the laser head, we get a linewidth narrowing less than 5 kHz simultaneously. Laser injection to a laser diode and frequency beating with another polarization spectroscopy based stabilization setup are also employed to check the narrow linewidth property. With the help of the technique, a linewidth around kHz-level laser is obtained and pave the way for the locking of the lattice laser of ytterbium clock with transfer cavity technique. The setup can be used as a frequency reference for precise frequency control of atomic clock system.

Wuhan University Journal of Natural Sciences•Jan 12, 2018•0 citations

Frequency Modulation Spectroscopy and Modulation Transfer Spectroscopy for Laser Stabilization to Rubidium Atomic Resonances

Jinni Wu, Ningxuan Zheng, Wenhui Li

We make a detailed comparison of frequency modulation spectroscopy (FMS) and modulation transfer spectroscopy (MTS) and of their applications in stabilizing laser frequency. In both FMS and MTS, intensity modulations of probe beam are observed in saturated absorption spectroscopy of 87Rb atoms. However, the two modulation profiles appear different due to their distinct origins. Demodulation gives rise to frequency discrimination spectra, which can serve as error signals for frequency locking. The optimal error signal of FMS has a larger linear slope but also a slanted baseline, in contrast to that of MTS. We apply FMS and MTS to stabilize two 780 nm external cavity diode lasers to D2 lines of 87Rb atoms. We measure laser linewidth and stability using beat notes of two independently locked lasers. A laser linewidth as narrow as 12.9 kHz is achieved in FMS locking, compared to 70.8 kHz in MTS locking. A laser stability at the level of 10−12 is reached in both schemes. Nevertheless, FMS locking offers a better short-term stability, whereas MTS locking yields a smaller long-term drift. Our investigation of FMS and MTS would be valuable for making a choice of these spectroscopy techniques for laser stabilization as well as other relevant applications.

Photonics•Oct 21, 2026•0 citations
This work introduces an innovative optical frequency standard that leverages MEMS vapor cells to achieve exceptional stability. To attain these objectives, we have integrated the modulation transfer spectroscopy (MTS) technique, which not only ensures high stability but also contributes to minimal power consumption in a compact form factor. Employing MTS with a high signal-to-noise ratio and utilizing a full bandwidth, high-speed servo feedback, we have successfully stabilized the laser frequency at the hyperfine transitions of rubidium atomic lines within the MEMS vapor cell. Furthermore, after the laser is locked, there is a significant narrowing effect on the laser linewidth. The current specifications of our compact optical frequency standard include a frequency Allan deviation of 4.8E-13@1s and the laser linewidth of only 18 kHz.
Atomic clocks represent the most advanced instruments for providing time-frequency standards, with increasing demand for designs that offer high frequency stability while minimizing size. Central to an atomic clock’s function is the atomic vapor cell, which serves as the quantum reference. Compared to traditional cells, wafer-level micro-electro-mechanical systems (MEMS) vapor cells enable cost-effective, scalable production and facilitate integration with silicon-based chips. In this work, we present a wafer-level MEMS vapor cell featuring an innovative silicon-glass-silicon transverse optical path structure. A single wafer is used to fabricate 24 identical atomic vapor cells, each with precise dimensions of 14 mm×14 mm×4.3 mm, ensuring scalability. We demonstrate an optical frequency standard that combines modulation transfer spectroscopy (MTS) with a MEMS vapor cell, featuring a compact design with excellent performance. This frequency standard achieves stability over averaging times of 1–400 s, with short-term stability of 2.6×10 −13 at 1 s and 5.1×10 −14 at 200 s. The laser linewidth is only 3.9 kHz, marking a substantial improvement over existing thermal standards, and opening potential applications in navigation, radar, and precision measurement. This work provides a crucial step toward the development of chip-scale optical clocks.
This study investigates the application of miniature quantum references within small-scale optical atomic frequency standards, utilizing a diminutive 87 Rb glass cell, dimensions of 6 mm × 6 mm × 6 mm, to establish a quantum frequency standard.By employing the transition spectrum from 5 2 S 1/2 F = 2 to 5 2 P 3/2 F 0 =3, this study successfully demonstrates the development of a compact rubidium atomic optical frequency standard via modulation transfer spectroscopy (MTS).Subsequent to frequency stabilization, the 780 nm clock laser exhibits a linewidth of 6.9 kHz, and its out-of-loop short-term stability reaches 4.1 × 10 -13 @ 1 s, as confirmed through beat frequency analysis.This research not only provides a practical blueprint for the development of small optical atomic frequency standards but also lays down essential groundwork for future advancements in chip-level optical frequency standard technologies.
A compact rubidium optical clock is presented, incorporating an optical frequency standard, a fiber frequency comb, and associated control electronics. Modulation transfer spectroscopy, devoid of Doppler background and characterized by a high signal-to-noise ratio and sensitivity, is employed to lock the laser frequency to the hyperfine transitions of rubidium atomic lines. The clock exhibits a short-term stability of 4.10 × 10-13at a 1-second gate time, and the stability remains below 7.27 × 10-13up to 1000 seconds. These results offer a promising alternative approach for the development of portable optical clocks.
We report laser frequency stabilization with modulation transfer spectroscopy (MTS) on 85 Rb atoms. With both PZT (piezo-electric transducer) slow-loop feedback and current fastloop feedback to the laser head, we get a linewidth narrowing less than 5 kHz simultaneously. Laser injection to a laser diode and frequency beating with another polarization spectroscopy based stabilization setup are also employed to check the narrow linewidth property. With the help of the technique, a linewidth around kHz-level laser is obtained and pave the way for the locking of the lattice laser of ytterbium clock with transfer cavity technique. The setup can be used as a frequency reference for precise frequency control of atomic clock system.
We make a detailed comparison of frequency modulation spectroscopy (FMS) and modulation transfer spectroscopy (MTS) and of their applications in stabilizing laser frequency. In both FMS and MTS, intensity modulations of probe beam are observed in saturated absorption spectroscopy of 87Rb atoms. However, the two modulation profiles appear different due to their distinct origins. Demodulation gives rise to frequency discrimination spectra, which can serve as error signals for frequency locking. The optimal error signal of FMS has a larger linear slope but also a slanted baseline, in contrast to that of MTS. We apply FMS and MTS to stabilize two 780 nm external cavity diode lasers to D2 lines of 87Rb atoms. We measure laser linewidth and stability using beat notes of two independently locked lasers. A laser linewidth as narrow as 12.9 kHz is achieved in FMS locking, compared to 70.8 kHz in MTS locking. A laser stability at the level of 10−12 is reached in both schemes. Nevertheless, FMS locking offers a better short-term stability, whereas MTS locking yields a smaller long-term drift. Our investigation of FMS and MTS would be valuable for making a choice of these spectroscopy techniques for laser stabilization as well as other relevant applications.