Mz Atomic Magnetometer Using A 3D Mems Glass Alkali Vapor Cell With Vertical Sidewalls
Jin Zhang, Jianfeng Zhang, Wenqi Li +2 more
This paper reports a novel Mzatomic magnetometer based on a low-cost 3D MEMS glass alkali vapor cell with vertical sidewalls for optical pumping/probing transmission. By designing vertical side walls, the 3D MEMS vapor cell provides high-quality centimeter-level optical paths for atom-photon interactions. The wafer-level high-quality multiple optical paths are also acquired for flexible Mzatomic magnetometer designs. Experiments show that the sensitivity of the proposed Mz magnetometer is 3.7 pT/Hz1/2at 1 Hz under 14000 nT.
IEEE International Conference on Micro Electro Mechanical Systems (MEMS)•Jan 15, 2023•3 citations