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Sensors and Actuators A Physical

Rubidium vapor cell with integrated Bragg reflectors for compact atomic MEMS

Maximillian A. Perez, Uyen Nguyen, Svenja A. Knappe, Elizabeth A. Donley, John E. Kitching, Andrei M. Shkel

Published Jun 10, 2009• 29 citations
Publisher
DOI
10.1016/j.sna.2009.06.001

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This paper reports on the design and implementation of thin film multilayer dielectric to form Bragg reflectors on the sidewalls of micromachined atomic cells. Due to deposition shadowing, significant variations in the thicknesses of the thin films are encountered when the layers are deposited using PECVD. These gradients in thickness may limit optical performance of the reflector in atomic cells. An optimized design procedure is described to maximize the performance of the reflector at a wavelength of 795 nm under the variations in material thickness. In addition, an optical design based on two shifted quarter wave Bragg reflectors in series is used to form a reflector with extended optical bandwidth for added robustness. The extended reflectance range maintains high reflection at the D1 absorption wavelength of 87 Rb despite variations in uniformity greater than 70 %. The developed reflector technology is ideally suited for use in miniature rubidium vapor cells. We demonstrate less than 1.5 dB of return loss with circular polarization ellipticity maintained to ±2 ◦ is demonstrated, as
This work introduces an innovative optical frequency standard that leverages MEMS vapor cells to achieve exceptional stability. To attain these objectives, we have integrated the modulation transfer spectroscopy (MTS) technique, which not only ensures high stability but also contributes to minimal power consumption in a compact form factor. Employing MTS with a high signal-to-noise ratio and utilizing a full bandwidth, high-speed servo feedback, we have successfully stabilized the laser frequency at the hyperfine transitions of rubidium atomic lines within the MEMS vapor cell. Furthermore, after the laser is locked, there is a significant narrowing effect on the laser linewidth. The current specifications of our compact optical frequency standard include a frequency Allan deviation of 4.8E-13@1s and the laser linewidth of only 18 kHz.