Superconducting circuits have emerged as a highly promising platform for quantum computing, among other divices based on Josephson junctions. The fabrication and testing of these devices requires especiallized nanofabrication facilities and milikelvin range testing equipment. In the search for the fabrication of these devices we have ran into limitations which forced us into creative solutions for the fabrications of these superconducting circuits and Josephson Junctions. Furthermore the development of these technologies allows for application in a wide range of research fields such as quantum computing, magnonics, micro-electromechanical systems and more.
Superconducting circuits have emerged as a highly promising platform for quantum computing, among other divices based on Josephson junctions. The fabrication and testing of these devices requires especiallized nanofabrication facilities and milikelvin range testing equipment. In the search for the fabrication of these devices we have ran into limitations which forced us into creative solutions for the fabrications of these superconducting circuits and Josephson Junctions. Furthermore the development of these technologies allows for application in a wide range of research fields such as quantum computing, magnonics, micro-electromechanical systems and more.
The development of useful quantum technologies will heavily rely on assembling many sub-systems that exhibit quantum properties. These systems do not spontaneously assemble themselves into useable quantum machines: they rely on advanced fabrication techniques at micro- and nanometre scales. Examples of such techniques include the fabrication of electrodes and waveguides for trapped ions, of Josephson junctions and microwave chips for superconducting circuits, of electrodes for the control of quantum dots or the fabrication of low-disorder semi-conductors for the operation of Majorana Zero Modes.
The Josephson junction (JJ) is the fundamental nonlinear building block of superconducting quantum technologies. Its macroscopic quantum tunneling physics underpins superconducting quantum computing, sensing, and communication, but scaling these platforms to utility-scale architectures places increasingly stringent demands on junction materials, interfaces, and fabrication. Practical quantum computing requires high reproducibility, low power consumption, tunability, a small device footprint, and resilience to noise and defects. This review surveys how advances in materials science, device characterization, and nanofabrication are addressing these challenges and redefining the figures of merit for next-generation JJs. This review also examines the evolution of fabrication strategies, from conventional multi-angle evaporation to foundry-compatible superconducting processes and the integration of emerging junction materials. Progress along these directions will determine how rapidly JJs move from laboratory-scale components to the foundation of industrial-scale quantum processors.
Quantum computing is rapidly evolving from theoretical frameworks to functional hardware, with physical qubits now being realized across multiple experimental platforms. Precision nanofabrication has enabled the development of low-loss, high-coherence quantum devices. Among the various approaches, superconducting circuits and trapped-ion systems have emerged as the most advanced and experimentally successful platforms for realizing controllable and scalable qubits. This review presents an overview of nanoscale fabrication techniques employed in these two architectures. We first outline the operating principles that define qubit behavior, followed by a discussion of representative device designs and fabrication workflows. In superconducting circuits, we examine processes such as thin-film deposition, lithographic patterning, and Josephson-junction fabrication that determine key parameters including qubit frequency, anharmonicity, and coherence. For trapped-ion systems, we describe the transition from bulk electrode assemblies to microfabricated surface traps produced using photolithography, metal deposition, and dielectric layering, where electrode geometry and surface treatment directly influence ion confinement and motional heating. We further discuss fabrication-related challenges, including dielectric loss, surface contamination, and material defects that limit coherence and reproducibility, along with emerging mitigation strategies such as advanced cleaning, low-loss materials, and improved surface engineering. By drawing parallels between these two leading platforms, this review highlights that continued progress in nanofabrication remains central to realizing scalable, high-fidelity quantum processors.
This article reviews recent progress in superconducting nanodevices, with particular emphasis on fabrication methods developed for superconducting nanowires and nanoscale Josephson junctions based on different barrier materials. It evaluates the future potential of superconducting nanodevices, including nano-superconducting quantum interference devices (nanoSQUIDs), in light of improvements in nanoscale fabrication and manipulation techniques, along with their likely impacts on future quantum technology and measurement. The article first considers efforts to realize devices at the physical scale of 100 nm and below before discussing different types of Josephson junction such as trilayer junctions. It also describes the use of focused ion beam milling and electron beam lithography techniques for junction fabrication at the nanoscale and the improved energy sensitivity detectable with a nanoSQUID. Finally, it looks at a range of applications for nanoSQUIDs, superconducting single photon detectors, and other superconducting nanodevices.
Over the past two decades significant advances have been made in the research of superconducting quantum computing and quantum simulation, in particular of the device design and fabrication that leads to ever-increasing superconducting qubit coherence times and scales. With Google’s announcement of the realization of “quantum supremacy”, superconducting quantum computing has attracted even more attention. Superconducting qubits are macroscopic objects with quantum properties such as quantized energy levels and quantum-state superposition and entanglement. Their quantum states can be precisely manipulated by tuning the magnetic flux, charge, and phase difference of the Josephson junctions with nonlinear inductance through electromagnetic pulse signals, thereby implementing the quantum information processing. They have advantages in many aspects and are expected to become the central part of universal quantum computing. Superconducting qubits and auxiliary devices prepared with niobium or other hard metals like tantalum as bottom layers of large-area components have unique properties and potentials for further development. In this paper the research work in this area is briefly reviewed, starting from the design and working principle of a variety of superconducting qubits, to the detailed procedures of substrate selection and pretreatment, film growth, pattern transfer, etching, and Josephson junction fabrication, and finally the practical superconducting qubit and their auxiliary device fabrications with niobium base layers are also presented. We aim to provide a clear overview for the fabrication process of these superconducting devices as well as an outlook for further device improvement and optimization in order to help establish a perspective for future progress.