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Integrated Optics: Devices, Materials, and Technologies

NbN superconducting nanowire single-photon detectors integrated on Si-based waveguide using CMOS-compatible processing on 200 mm wafers

Valentin Brisson, Joël Bleuse, Raouia Rhazi, Jonathan Faugier-Tovar, Jean‐Michel Gérard, S. Olivier

Published Mar 13, 2024• 0 citations
Publisher

Abstract

There is an increasing demand for superconducting nanowire single photon detectors (SNSPDs) which combine high efficiency, low dark counts and fast response time. They play a crucial role in developing strategic application areas such as photon-based quantum computing and quantum key distribution. We demonstrate the fabrication of high crystalline quality NbN-based waveguide-integrated SNSPDs using a completely CMOS-compatible process on 200 mm SOI wafers. We achieve a detection efficiency over 80 % at 100 Hz dark count rate, a short decay time below 4 ns and a maximum count rate of 200 MHz.

DOI
10.1117/12.3000377

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There is an increasing demand for superconducting nanowire single photon detectors (SNSPDs) which combine high efficiency, low dark counts and fast response time. They play a crucial role in developing strategic application areas such as photon-based quantum computing and quantum key distribution. We demonstrate the fabrication of high crystalline quality NbN-based waveguide-integrated SNSPDs using a completely CMOS-compatible process on 200 mm SOI wafers. We achieve a detection efficiency over 80 % at 100 Hz dark count rate, a short decay time below 4 ns and a maximum count rate of 200 MHz.
Superconducting nanowire single photon detectors stand today as the best technology, due to their near-unity detection efficiency, low dark count rates, and low timing jitter. In this work, we demonstrate the improvement of the superconducting properties of NbN thin films on 8” silicon-on-insulator wafers by using an ultra-thin (10-15 nm) sputtered AlN buffer layer. The higher crystalline quality of NbN, leads to an increase of the superconducting critical temperature up to 10 K for 9-nm-thick NbN films. The material was validated for single photon detection using a fiber-coupled vertical SNSPD with half-cavity architecture. This results opens the way for the development of CMOS compatible waveguide-integrated detectors. The implementation of such guided devices is a keystone for the development of a fully integrated quantum photonics platform able to generate, manipulate and detect a large number of photonic qubits for secure communications and quantum computing applications.
Abstract We report a high system detection-efficiency superconducting nanowire single-photon detector (SNSPD) with a spot-size converter (SSC) on a Si photonics platform. The NbN-SNSPD is evanescently coupled to the Si waveguide and connected to the optical fibre through the low-loss SSC comprising a Si inverse taper and large silica-based core. The fabricated SNSPD chip was assembled on a low-loss fibre-coupled module. The fibre coupling loss of the module is remarkably small (1.9 dB/facet). The fabricated SNSPD module shows system detection efficiency of 32% with the dark count rate of 95 Hz and timing jitter of 75 ps. The measured system detection efficiency is over ten times larger than that of previous waveguide-integrated SNSPDs on the Si platform. The noise equivalent power reaches 3.6 × 10 −18 W Hz −1/2 , and the figure of merit reaches 1.9 × 10 8 .
Superconducting nanowire single-photon detectors (SNSPDs) provide high efficiency for detecting individual photons while keeping dark counts and timing jitter minimal. Besides superior detection performance over a broad optical bandwidth, compatibility with an integrated optical platform is a crucial requirement for applications in emerging quantum photonic technologies. Here we present SNSPDs embedded in nanophotonic integrated circuits which achieve internal quantum efficiencies close to unity at 1550 nm wavelength. This allows for the SNSPDs to be operated at bias currents far below the critical current where unwanted dark count events reach milli-Hz levels while on-chip detection efficiencies above 70% are maintained. The measured dark count rates correspond to noise-equivalent powers in the 10(-19) W/Hz(-1/2) range and the timing jitter is as low as 35 ps. Our detectors are fully scalable and interface directly with waveguide-based optical platforms.
Fast and efficient detection of single photons with high timing accuracy is a crucial requirement in most quantum optics experiments and enables novel sensing and imaging solutions. Superconducting nanowire single-photon detectors (SNSPD) achieve technology-leading performance in terms of detection efficiency, dark count rate, timing jitter, and detector dead times. However, conventional SNSPDs with high system detection efficiency typically rely on resonant enhancement of the absorption efficiency, thus only achieving attractive detector benchmarks over narrow spectral windows. Waveguide-integrated SNSPDs allow for leveraging the wideband material absorption in superconducting nanowires by absorbing light in a traveling-wave geometry but have been limited to low system detection efficiencies due to interface losses when coupling to optical fibers. Here, we show how high system detection efficiencies of 22%–73% are realized over a broad wavelength range from 532 nm to 1640 nm in a single waveguide-integrated SNSPD device. We accomplish efficient coupling between optical fibers and waveguide-integrated nanowire detectors by employing a 3D interface, produced in direct laser writing, that relies on total internal reflection for achieving a broad transmission bandwidth. We further find low timing jitter of 25.7 ps and detector decay times of 9.8 ns, allowing for single-photon counting with high repetition rates up to 100 MHz. Our work paves the way for an efficient single-photon detector solution that combines the spectral requirements of an extremely wide range of quantum optics experiments in a single device. The coupling approach and SNSPD-integration with nanophotonic circuits are further well-suited for realizing large-scale detector arrays.
Quantum information processing brings new protocols to the field of communications, by ensuring absolute security of information transfer thanks to the laws of quantum physics. Furthermore, in the field of computing, quantum processing offers the perspective of performing massively parallel calculations, orders of magnitude faster than with a classical computer. For these two applications, excellent detectors are required with ultimate performances. Superconducting nanowire single photon detectors (SNSPDs) are the best candidate, as they can reach near-unity detection efficiency. We are developing on-chip waveguide integrated SNSPDs on 200 mm SOI wafers, addressing both the material, architecture design and fabrication process challenges.