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Integrated Optics: Devices, Materials, and Technologies

Development of NbN-based superconducting single photon detectors on silicon platform

Raouia Rhazi, Yohan Désières, Jonathan Faugier-Tovar, S. Olivier, Eva Monroy, Jean‐Michel Gérard, Léopold Virot, Joël Bleuse, Quentin Wilmart

Published Mar 4, 2022• 1 citation
Publisher

Abstract

Quantum information processing brings new protocols to the field of communications, by ensuring absolute security of information transfer thanks to the laws of quantum physics. Furthermore, in the field of computing, quantum processing offers the perspective of performing massively parallel calculations, orders of magnitude faster than with a classical computer. For these two applications, excellent detectors are required with ultimate performances. Superconducting nanowire single photon detectors (SNSPDs) are the best candidate, as they can reach near-unity detection efficiency. We are developing on-chip waveguide integrated SNSPDs on 200 mm SOI wafers, addressing both the material, architecture design and fabrication process challenges.

DOI
10.1117/12.2610231

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Quantum information processing brings new protocols to the field of communications, by ensuring absolute security of information transfer thanks to the laws of quantum physics. Furthermore, in the field of computing, quantum processing offers the perspective of performing massively parallel calculations, orders of magnitude faster than with a classical computer. For these two applications, excellent detectors are required with ultimate performances. Superconducting nanowire single photon detectors (SNSPDs) are the best candidate, as they can reach near-unity detection efficiency. We are developing on-chip waveguide integrated SNSPDs on 200 mm SOI wafers, addressing both the material, architecture design and fabrication process challenges.
There is an increasing demand for superconducting nanowire single photon detectors (SNSPDs) which combine high efficiency, low dark counts and fast response time. They play a crucial role in developing strategic application areas such as photon-based quantum computing and quantum key distribution. We demonstrate the fabrication of high crystalline quality NbN-based waveguide-integrated SNSPDs using a completely CMOS-compatible process on 200 mm SOI wafers. We achieve a detection efficiency over 80 % at 100 Hz dark count rate, a short decay time below 4 ns and a maximum count rate of 200 MHz.
Superconducting nanowire single photon detectors stand today as the best technology, due to their near-unity detection efficiency, low dark count rates, and low timing jitter. In this work, we demonstrate the improvement of the superconducting properties of NbN thin films on 8” silicon-on-insulator wafers by using an ultra-thin (10-15 nm) sputtered AlN buffer layer. The higher crystalline quality of NbN, leads to an increase of the superconducting critical temperature up to 10 K for 9-nm-thick NbN films. The material was validated for single photon detection using a fiber-coupled vertical SNSPD with half-cavity architecture. This results opens the way for the development of CMOS compatible waveguide-integrated detectors. The implementation of such guided devices is a keystone for the development of a fully integrated quantum photonics platform able to generate, manipulate and detect a large number of photonic qubits for secure communications and quantum computing applications.
Single photon detectors are a vital part of many emerging technologies which harness the quantum properties of light to benefit the fields of communication, computation and sensing. Superconducting nanowire single photon detectors (SNSPDs) offer high detection efficiency, low dark count rates, low timing jitter, and infrared sensitivity that are required by the most demanding single photon counting applications. This thesis presents SNSPDs fabricated and tested at the University of Glasgow that are integrated with optical structures which enable enhanced detection efficiency and integration with waveguide circuit technology. The monolithic integration of waveguide circuit components presents a route towards realisation of an optical quantum information processor that has the stability and scalability to perform the demanding tasks of quantum computation. A novel process is introduced for incorporating superconducting detectors with single mode gallium arsenide waveguides and quantum dot single photon sources. Together these elements would enable the generation of quantum states of light which could be manipulated and detected on a single chip. Detectors are patterned in NbTiN thin superconducting films on to suspended nanobeam waveguides with better than 50 nm alignment accuracy. Low temperature electrical and optical testing confirms the detectors’ single photon sensitivity under direct illumination as well as to waveguide coupled light. Measured detectors were found to have internal registering efficiencies of 6.8 ± 2.4%. Enhancing absorption of photons into thin superconducting films is vital to the creation of high efficiency superconducting single photon detectors. Fabricating an SNSPD on a dielectric mirror creates a partial cavity that can be tailored to enhance detection of light at specific wavelengths. Devices have been fabricated and tested in this thesis with enhanced detection efficiency at infrared and visible wavelengths for quantum cryptography, remote sensing and life science applications. Detectors fabricated in NbTiN on GaAs/AlGaAs Bragg mirrors exhibited a system detection efficiency of 1.5% at 1500 nm wavelength for the best device measured. SNSPDs were also fabricated in NbN on aperiodic dielectric mirrors with a range of different bandwidths. A peak system detection efficiency of 82.7% at 808 nm wavelength was recorded.
Quantum information processing offers new protocols and functionalities in the field of communications by providing an absolute security guaranteed by the quantum physics laws as well as in the field of quantum computing, with the perspective to drastically speed up massively parallel computations. The second quantum revolution is now about to take place with theoretical concepts being brought into concrete applications thanks to integrated technological solutions. Photons are an excellent physical implementation of quantum bits for these two applications. Photonic quantum information processing requires three key functionalities: a source of single photons, a reconfigurable circuits for their manipulation and a single photon detector. The objective of this PhD work is to design, fabricate and characterize superconducting single photon detectors integrated on silicon photonic circuits, with very high efficiency above 95%, a large spectral operating range at telecom wavelength and the ability to resolve the number of received photons. This PhD will take place at CEA, in collaboration between INAC and LETI institutes to benefit from their complementary expertise. This PhD work will be conducted in parallel with developments of single photon sources and will bring an essential building block for the integration of complex circuits able to generate, manipulate and detect tens of photonic qubits for secured communications and quantum computing.
Single photon technology is enabling for quantum communication and processing. Combining single photon sources, routing circuitry and highly efficient detectors in a high yield, low-loss and scalable fashion represent today a major challenge. Nanophotonic devices allow for the realization of on-chip small footprint architectures for generating, manipulating and detecting single photons. Waveguide-integrated superconducting nanowire single photon detectors are today state-of-the art devices capable of detecting single photons propagating in an integrated photonic circuit with high efficiency, speed and low timing uncertainty. Their excellent metrics in the near-infrared allows to directly interface on-chip devices with existing C-Band communication technology systems. To move towards high communication speed, efficient detectors able to sustain Gcps count rate are desirable. Here we present the design process and the experimental characterization of a new generation of fast detectors, consisting of µm-long NbN superconducting nanowires embedded in a SOI two-dimensional photonic crystal cavity. Almost 70% efficiency at telecommunication wavelengths has been achieved with negligible dark counts and sub-ns recovery time, which could enable Gcps count rates.
Two decades after their demonstration, superconducting nanowire single-photon detectors (SNSPDs) have become indispensable tools for quantum photonics as well as for many other photon-starved applications. This invention has not only led to a burgeoning academic field with a wide range of applications but also triggered industrial efforts. Current state-of-the-art SNSPDs combine near-unity detection efficiency over a wide spectral range, low dark counts, short dead times, and picosecond time resolution. The present perspective discusses important milestones and progress of SNSPDs research, emerging applications, and future challenges and gives an outlook on technological developments required to bring SNSPDs to the next level: a photon-counting, fast time-tagging imaging, and multi-pixel technology that is also compatible with quantum photonic integrated circuits.