Silicon spin qubits satisfy the necessary criteria for quantum information processing. However, a demonstration of high-fidelity state preparation and readout combined with high-fidelity single- and two-qubit gates, all of which must be present for quantum error correction, has been lacking. We use a two-qubit Si/SiGe quantum processor to demonstrate state preparation and readout with fidelity greater than 97%, combined with both single- and two-qubit control fidelities exceeding 99%. The operation of the quantum processor is quantitatively characterized using gate set tomography and randomized benchmarking. Our results highlight the potential of silicon spin qubits to become a dominant technology in the development of intermediate-scale quantum processors.
Abstract Silicon spin qubits offer a promising path to scalable quantum computing due to their compatibility with industrial semiconductor manufacturing. A key requirement for scaling quantum processors is the ability to perform high-fidelity operations in parallel across many qubits. However, simultaneous control remains a major challenge in silicon devices, as fidelities typically degrade under parallel operation. Here we identify microwave-drive-induced a.c.-Stark shifts as the dominant source of this degradation in a five-qubit silicon spin array. We address this by introducing a scalable mitigation protocol based solely on pairwise phase calibrations. Using tailored control pulses on a shared control line, we achieve primitive X and Y gate fidelities well above 99.99% for each qubit individually, with some approaching 99.999%. Furthermore, these fidelities are preserved above 99.99% during simultaneous operation of up to three qubits. During parallel five-qubit operation, fidelities remain above the widely targeted fault-tolerant threshold of 99.9%. By maintaining high-fidelity control during simultaneous operation, shared qubit-control lines can support the development of large-scale semiconductor quantum processors.
In semiconductor single-spin qubits, high-fidelity quantum gates have been demonstrated; however, achieving consistent performance remains challenging due to variations in driven qubit coherence, which is less explored than free-evolution coherence such as
T2∗. Here, we report single-qubit gate fidelities above 99.999%, achieved by dramatically extending the driven-spin coherence time and suppressing off-resonant driving effects that are detrimental to accurate fidelity benchmarking. We demonstrate that removing proximal reservoirs significantly enhances the spin-locking coherence time (
T1ρ), a critical metric for qubits under microwave driving. Furthermore, we reveal that in typical spin qubit setups using parity readout and rectangular pulses, off-resonant excitation of neighboring qubits causes substantial benchmarking artifacts. By optimizing device conditions to mitigate microwave-induced degradation and implementing spectrally tailored pulse shaping, we achieve a
π/2 gate fidelity of 99.99920(2)%, with remaining errors primarily limited by incoherent noise. These results showcase the mechanisms that bound fidelity benchmarking in state-of-the-art silicon spin qubits and provide practical guidelines for achieving and verifying high fidelities in these systems.