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physica status solidi (a)

Fabrication of Nitrogen Vacancy Center‐Doped Free‐Standing Diamond Photonic Devices via Faraday Cage‐Angled Etching

Christian Giese, Patricia Quellmalz, Peter Knittel, Tingpeng Luo, Niklas Mathes, Jan Jeske, Philipp Reinke, Quankui K. Yang

Published Oct 13, 2023• 4 citations
Publisher

Abstract

Herein, methods for the fabrication of monolithic diamond integrated photonic devices via Faraday cage‐angled etching of functional epitaxial diamond layers are presented. Optimal waveguide width is determined via simulation and the fabrication of nitrogen vacancy (NV) center‐doped microring resonators is demonstrated. The performance of the devices is verified via microphotoluminescence as well as cathodoluminescence scans of the in‐grown NV centers, revealing clearly visible cavity lines. The scalable fabrication method allows for the realization of large numbers of lateral waveguide structures as needed for future applications in integrated quantum sensing devices as well as novel spin‐based quantum computers.

DOI
10.1002/pssa.202300433

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Herein, methods for the fabrication of monolithic diamond integrated photonic devices via Faraday cage‐angled etching of functional epitaxial diamond layers are presented. Optimal waveguide width is determined via simulation and the fabrication of nitrogen vacancy (NV) center‐doped microring resonators is demonstrated. The performance of the devices is verified via microphotoluminescence as well as cathodoluminescence scans of the in‐grown NV centers, revealing clearly visible cavity lines. The scalable fabrication method allows for the realization of large numbers of lateral waveguide structures as needed for future applications in integrated quantum sensing devices as well as novel spin‐based quantum computers.
ABSTRACT Deploying nitrogen vacancy (NV) centers in diamond as nanoscale quantum sensors for condensed matter and materials physics requires placing the NV centers close to the sensing target. One solution is to fabricate diamond nanostructures and integrate them with materials and devices. However, diamond etching and ion milling can introduce subsurface damage and surface defects that degrade the charge stability and spin coherence of NV centers near the surface. Here, we report a procedure for fabricating low‐damage free‐standing diamond micromembranes, and we show that this fabrication scheme preserves the optical and spin properties of state‐of‐the‐art shallow NV center quantum sensors, within nanometers of the diamond surface, while providing significant photonic enhancement. Furthermore, we demonstrate a pick‐and‐place transfer method, which enables integration with diverse sensing targets.
We demonstrate a self-aligned lithographic technique for precision generation of nitrogen vacancy (NV) centers within photonic nanostructures on bulk diamond substrates. The process relies on a lithographic mask with nanoscale implantation apertures for NV creation, together with larger features for producing waveguides and photonic nanocavities. This mask allows targeted nitrogen ion implantation, and precision dry etching of nanostructures on bulk diamond. We demonstrate high-yield generation of single NVs at pre-determined nanoscale target regions on suspended diamond waveguides. We report implantation into the mode maximum of diamond photonic crystal nanocavities with a single-NV per cavity yield of ∼26% and Purcell induced intensity enhancement of the zero-phonon line. The generation of NV centers aligned with diamond photonic structures marks an important tool for scalable production of optically coupled spin memories.
Quantum emitters with long-lived quantum memories are a promising scalable quantum system for repeater-based quantum communications, quantum sensing, and distributed quantum computing networks. Although color centers in solids have been successful, further improvements in the efficiency of optical control and detection and scalability are necessary for practical uses. Here, we demonstrate that single nitrogen-vacancy centers can be efficiently coupled in diamond inverted nanocones that can be fabricated directly on the high-quality CVD diamond surface by the all-direction diagonal dry etching using a solid cone-shaped Faraday cage. Since the inverted cone shape allows efficient photon collection thanks to the single-directional guiding of photons, we report 20-fold enhancement in the photon collection efficiency from a single emitter while preserving a long electron spin coherence time. Furthermore, we show that an inverted nanocone can be picked and placed on the target position with desired orientation by using conventional microprobe tips. The demonstrated structure can also be applied to similar emitters in other solids; thus, it can be used for finding new possibilities for scalable photonic quantum devices.
Luminescent lattice defects (so called “color centers”) in diamond provide a robust, solid-state architecture for exploring quantum optics, with many facilitating direct access to highly coherent electron and nuclear spins. The past two decades have seen tremendous advances in our ability to prepare and control the quantum states of these atom-like systems. For instance, demonstrations that leverage the diamond nitrogen vacancy (NV–) center as a spin-photon interface have included the generation of indistinguishable photons, a quantum bit memory exceeding 1 second, entanglement of two distance solid-state qubits, and deterministic long distance quantum teleportation. While diamond color centers are an attractive platform for scalable quantum information processing, the diamond solid-state matrix, by its very nature, inhibits efficient photon collection into either free-space or fiber-optical systems. Due to its large refractive index, emitted photons are inevitably trapped within the diamond crystal by total internal reflection, limiting count rates and overall scalability of information processing via quantum optical protocols. To this end, there has been significant progress towards integrating individual diamond color centers within well-defined radiation channels: namely, those provided by monolithic diamond nanophotonic networks. Currently, on-chip low loss (~ few db/cm) diamond waveguide networks are available, as well as key passive photonic elements like micron scale ring and disk resonators and photonic crystal cavities, with high optical quality (Q) factors. Specifically, we recently demonstrated a scalable ‘angled-etching’ nanofabrication method for realizing nanophotonic networks starting from bulk single-crystal diamond substrates (MJ Burek et al., Nano Letters 2012, MJ Burek et al., Nat Comm. 2014). Angled-etching employs anisotropic oxygen-based plasma etching at an oblique angle to the substrate surface, resulting in suspended optical structures with triangular cross-sections. Using this approach, we demonstrated high Q-factor (> 10^5) optical nanocavities fabricated in bulk single-crystal diamond, operating over a wide wavelength range (visible to telecom). Beyond isolated photonic devices, we have further developed free-standing angled-etched waveguides which efficiently route photons between diamond optical nanocavities, while maintaining physical support through attachment to the bulk substrate. Although on-chip diamond nanophotonics realized by angled-etching continue to mature, efficient off-chip optical coupling schemes which provide near seamless transition of photons on-chip into commercial optical fibers remain an outstanding challenge. This is especially pertinent in applications involving single photons, such as quantum optics with diamond color centers. Herein, we demonstrate a high efficiency fiber-optical interface with aforementioned on-chip diamond nanophotonic networks, achieving > 90% power coupling at both telecom and visible wavelengths. The coupling scheme utilizes a single mode optical fiber, with one end fabricated into a conical taper, to adiabatically transition guided light between on-chip tapered diamond waveguides and off-chip optical fiber networks. Additionally, we develop techniques to robustly pigtail single-mode fibers with diamond waveguide couplers, yielding a packaged technology that may potentially enable deployment in harsh environments, including vacuum, sub-Kelvin cryogenics, or even liquid/biological environments. With these newly developed optical integration schemes, single-crystal diamond is now a viable integrated nanophotonics platform, servicing a range of applications, from non-linear optics and chemical sensing, to quantum science and cavity optomechanics.
Nitrogen-vacancy (NV) centers in diamond photonic nanostructures have attracted much attention as efficient single photon emitters and quantum bits. These quantum optical devices mostly require single or low-density NV centers doped in thin diamond membranes. In contrast, this study focuses on diamond photonic nanostructures with a high concentration of NV centers to achieve a diamond color center laser with a sufficient gain available as a visible light source and a sensitive magnetic-field sensor. We employ high-dose helium ion implantation to type-Ib diamond substrates and thermal annealing, which enables us to obtain uniform thin diamond membranes containing a dense ensemble of NV centers. Luminescence spectroscopy reveals the kinetics of NV centers at high temperature from which we find an optimum annealing temperature maximizing the NV center emission while suppressing the transformation from NV to H3 centers. Furthermore, fine photonic nanowires are also successfully fabricated in the air-suspended diamond membrane, and they exhibit intense photoluminescence from the NV centers with a concentration as high as 7 × 1016 cm−3 (0.4 ppm). These results suggest a route to the fabrication of diamond photonic nanostructures containing a dense ensemble of NV centers, which can be a key material for developing diamond-based light emitting and magnetic-field sensing devices.