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Wafer Level Fabrication of Evacuated Alkali Vapor Cells

Yang Li, Donggyu B. Sohn, Matthew T. Hummon, John E. Kitching

Published Jan 1, 2023• 1 citation
Publisher

Abstract

We describe a wafer level fabrication process for evacuated Rb vapor cells. By etching channels on the wafer surface around the cell positions, we demonstrate wafers of cells with residual gas pressures below 5 mbar.
DOI
10.1364/cleo_at.2023.jtu2a.46

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